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    • 4. 发明授权
    • Workpiece holder and method for plasma reactor apparatus
    • 等离子体反应堆设备的工件架和方法
    • US4222839A
    • 1980-09-16
    • US944427
    • 1978-09-21
    • Willis R. GoodnerJoseph P. Y. Kao
    • Willis R. GoodnerJoseph P. Y. Kao
    • C30B33/00C23F1/00B01K1/00
    • C30B33/00
    • A holder and method for controlling and uniformly maintaining the temperature of work pieces when the work pieces are acted upon by a plasma in a plasma reactor apparatus. Support means which hold the work pieces so as to expose them to the reactive plasma also position metallic plate members which are capable of being heated to an elevated temperature by the plasma when in electrical contact with an electrode of the plasma reactor apparatus. The metallic plate members are all electrically shorted together, but are insulated from the support means. A temperature sensitive switch connects the metallic plate members to an electrode of the plasma apparatus. Work pieces to be acted upon by the plasma are placed in proximity to the metal plate members. In the presence of a plasma and when shorted to the apparatus electrode, the metallic plate members are rapidly heated and heat is conducted to the work pieces to heat them uniformly. The temperature of the work pieces is controlled by selectively opening and closing the temperature sensitive switch and thereby selectively shorting the metal members to the apparatus electrode. Little heating occurs when the switch is open and the members are isolated from the electrode.
    • 一种用于在等离子体反应器装置中通过等离子体作用工件时控制和均匀地保持工件的温度的保持器和方法。 保持工件以便将它们暴露于反应性等离子体的支撑装置还定位当与等离子体反应器装置的电极电接触时能够被等离子体加热到升高的温度的金属板构件。 金属板构件全部电短路在一起,但与支撑装置绝缘。 温度敏感开关将金属板构件连接到等离子体装置的电极。 待等离子体作用的工件被放置在金属板构件附近。 在等离子体的存在下,当与设备电极短路时,金属板构件被快速加热,并且热量被传导到工件以均匀地加热它们。 通过选择性地打开和关闭温度敏感开关来控制工件的温度,从而将金属构件选择性地短路到设备电极。 当开关打开并且构件与电极隔离时,几乎不发生加热。