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    • 3. 发明申请
    • CONNECTING DEVICE FOR INSPECTION
    • US20220221502A1
    • 2022-07-14
    • US17608118
    • 2020-04-03
    • Kabushiki Kaisha Nihon Micronics
    • Minoru SATO
    • G01R31/26G01R1/073
    • A connecting device for inspection includes a probe head (30) configured to hold electric contacts (10) and optical contacts (20) such that tip ends of the respective contacts are exposed on a lower surface of the probe head (30), and a transformer (40) including connecting wires (41) arranged therein and optical wires (42) penetrating therethrough. The respective proximal ends of the electric contacts (10) and the optical contacts (20) are exposed on an upper surface of the probe head (30), and tip ends on one side of the connecting wires (41) electrically connected to the proximal ends of the electric contacts (10) and connecting ends of the optical wires (42) optically connected to the proximal ends of the optical contacts (20) are arranged in a lower surface of the transformer (40). A positional relationship between the tip end of the respective electric contacts (10) and the tip end of the respective optical contacts (20) on the lower surface of the probe head (30) corresponds to a positional relationship between an electrical signal terminal and an optical signal terminal of a semiconductor device.
    • 4. 发明申请
    • CONNECTING DEVICE FOR INSPECTION
    • US20220214391A1
    • 2022-07-07
    • US17604319
    • 2020-04-03
    • Kabushiki Kaisha Nihon Micronics
    • Minoru SATO
    • G01R31/26G01R1/073
    • A connecting device for inspection includes a probe head (30) configured to hold electric contacts (10) and optical contacts (20) such that tip ends of the respective contacts are exposed on a lower surface of the probe head (30) while proximal ends of the electric contacts (10) are exposed on an upper surface of the probe head and the optical contacts (20) are fixed to the probe head (30), and a transformer (40) including connecting wires (41) provided therein such that tip ends on one side of the connecting wires (41) electrically connected to the proximal ends of the electric contacts (10) exposed on the upper surface of the probe head (30) are arranged in a lower surface of the transformer (40) while the optical contacts (20) slidably penetrate the transformer (40). A positional relationship between the tip end of the respective electric contacts (10) and the tip end of the respective optical contacts (20) on the lower surface of the probe head (30) corresponds to a positional relationship between an electrical signal terminal and an optical signal terminal of a semiconductor device. The optical contacts (20) continuously penetrate the probe head (30) and the transformer (40).
    • 6. 发明授权
    • Electric connection device
    • US11249109B2
    • 2022-02-15
    • US16757292
    • 2018-08-03
    • Kabushiki Kaisha Nihon Micronics
    • Mika Nasu
    • G01R1/067G01R1/073
    • An electric connection device includes a probe (10) and a probe head (20). The probe (10) includes: a tubular barrel (11), a rod-like top-side plunger (121), and a rod-like bottom-side plunger (122). The top- and bottom-side plungers are connected to the barrel (11) with tips thereof exposed from respective open ends of the barrel (11). The probe head (2) includes guide plates (211 and 212) which are spaced apart from each other in the axial direction of the probe (10) and each include a through-hole through which a body of the barrel (11) penetrates. A protrusion (13) having an outer diameter greater than the body of the barrel (11) is provided on the circumference of the probe (10). The guide plates (211 and 212) include a support guide plate in which the through-hole has a diameter smaller than the outer diameter of the protrusion (13). The probe (10) is supported by the support guide plate with the top-side plunger (121) up such that the lower section of the protrusion (13) is in contact with the edge of the upper opening of the through-hole of the support guide plate.