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    • 1. 发明授权
    • Photolithographic structured thick layer sensor
    • 光刻结构厚层传感器
    • US09068913B2
    • 2015-06-30
    • US13319767
    • 2010-05-06
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • G01N15/00G01N15/06
    • G01N15/0656Y10T29/49002
    • A sensor, particularly an impedance sensor, for example a soot sensor, is provided which has two mutually electrically insulated electrodes, wherein at least one external electrode is formed from a composite of metal and inorganic oxide as a film pattern having a film thickness of 0.5 to 20 μm. The trace width of the film pattern and the spacing between the traces is 5 to 70 μm and the border region around the conductor trace edge varies less than 10 μm. Both electrodes can be arranged adjacent to each other as a film pattern in a plane. Preferably, the sensor has a heater. For mass production, electrodes are produced as a film pattern having a film thickness of 0.5 to 20 μm on electrically insulating oxide bases and, following full-surface imprinting of a metal powder and oxide-containing paste, the electrodes are structured particularly accurately as traces from the printed film. In particular, the film thickness of the printed film is reduced.
    • 提供了一种传感器,特别是阻抗传感器,例如烟灰传感器,其具有两个相互电绝缘的电极,其中至少一个外部电极由金属和无机氧化物的复合物形成,膜厚度为0.5 至20μm。 膜图案的迹线宽度和迹线之间的间距为5〜70μm,导体迹线边缘周围的边界区域变化小于10μm。 两个电极可以彼此相邻地布置为平面中的膜图案。 优选地,传感器具有加热器。 为了大规模生产,电极在电绝缘氧化物基底上作为膜厚度为0.5至20μm的膜图案生产,并且在金属粉末和含氧化物浆料的全表面压印之后,电极被特别精确地构造为痕迹 从印刷电影。 特别地,印刷膜的膜厚减小。
    • 2. 发明申请
    • PHOTOLITHOGRAPHIC STRUCTURED THICK LAYER SENSOR
    • 光刻结构厚层传感器
    • US20120062254A1
    • 2012-03-15
    • US13319767
    • 2010-05-06
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • G01R27/00H01F41/00G01M15/10
    • G01N15/0656Y10T29/49002
    • A sensor, particularly an impedance sensor, for example a soot sensor, is provided which has two mutually electrically insulated electrodes, wherein at least one external electrode is formed from a composite of metal and inorganic oxide as a film pattern having a film thickness of 0.5 to 20 μm. The trace width of the film pattern and the spacing between the traces is 5 to 70 μm and the border region around the conductor trace edge varies less than 10 μm. Both electrodes can be arranged adjacent to each other as a film pattern in a plane. Preferably, the sensor has a heater. For mass production, electrodes are produced as a film pattern having a film thickness of 0.5 to 20 μm on electrically insulating oxide bases and, following full-surface imprinting of a metal powder and oxide-containing paste, the electrodes are structured particularly accurately as traces from the printed film. In particular, the film thickness of the printed film is reduced.
    • 提供了一种传感器,特别是阻抗传感器,例如烟灰传感器,其具有两个相互电绝缘的电极,其中至少一个外部电极由金属和无机氧化物的复合物形成,膜厚度为0.5 至20μm。 膜图案的迹线宽度和迹线之间的间距为5〜70μm,导体迹线边缘周围的边界区域变化小于10μm。 两个电极可以彼此相邻地布置为平面中的膜图案。 优选地,传感器具有加热器。 为了大规模生产,电极在电绝缘氧化物基底上作为膜厚度为0.5至20μm的膜图案生产,并且在金属粉末和含氧化物浆料的全表面压印之后,电极被特别精确地构造为痕迹 从印刷电影。 特别地,印刷膜的膜厚减小。
    • 3. 发明授权
    • Flow sensor element and its self-cleaning
    • 流量传感器元件及其自洁性
    • US07739908B2
    • 2010-06-22
    • US12108878
    • 2008-04-24
    • Karlheinz WienandKarlheinz UllrichMatthias Muziol
    • Karlheinz WienandKarlheinz UllrichMatthias Muziol
    • G01F1/68
    • G01F1/6983G01F1/6845G01F1/692
    • A flow sensor element and a method for self-cleaning of the flow sensor element are provided, in which a temperature-measuring element and a heating element are arranged on a carrier element, and these elements can form a multiple-part ceramic component. The temperature-measuring element has a platinum thin-film resistor on a ceramic substrate for the temperature measurement and is heated with an additional platinum thin-film resistor. A measurement device, in particular an anemometric measurement device of a flow sensor, contains film resistors mounted in at least one opening of a cover or a hollow body. Two of the film resistors have resistance values differing by one to three orders of magnitude. The anemometric measurement device has a temperature sensor and a heat output sensor set in a carrier element. The temperature sensor has a temperature-measuring resistor and a heat conductor, as platinum thin-film or thick-film resistors, on a ceramic substrate.
    • 提供了流量传感器元件和流量传感器元件的自清洁方法,其中温度测量元件和加热元件布置在载体元件上,并且这些元件可以形成多部件陶瓷部件。 温度测量元件在陶瓷基板上具有用于温度测量的铂薄膜电阻器,并用附加的铂薄膜电阻器加热。 测量装置,特别是流量传感器的气流测量装置包含安装在盖子或中空体的至少一个开口中的薄膜电阻器。 两个薄膜电阻器的电阻值相差一到三个数量级。 风速测量装置具有设置在载体元件中的温度传感器和热输出传感器。 温度传感器在陶瓷基板上具有温度测量电阻和作为铂薄膜或厚膜电阻的导热体。
    • 5. 发明申请
    • FLOW SENSOR ELEMENT AND ITS SELF-CLEANING
    • 流量传感器元件及其自清洁
    • US20080264166A1
    • 2008-10-30
    • US12108878
    • 2008-04-24
    • Karlheinz WIENANDKarlheinz ULLRICHMatthias MUZIOL
    • Karlheinz WIENANDKarlheinz ULLRICHMatthias MUZIOL
    • G01F1/68
    • G01F1/6983G01F1/6845G01F1/692
    • A flow sensor element and a method for self-cleaning of the flow sensor element are provided, in which a temperature-measuring element and a heating element are arranged on a carrier element, and these elements can form a multiple-part ceramic component. The temperature-measuring element has a platinum thin-film resistor on a ceramic substrate for the temperature measurement and is heated with an additional platinum thin-film resistor. A measurement device, in particular an anemometric measurement device of a flow sensor, contains film resistors mounted in at least one opening of a cover or a hollow body. Two of the film resistors have resistance values differing by one to three orders of magnitude. The anemometric measurement device has a temperature sensor and a heat output sensor set in a carrier element. The temperature sensor has a temperature-measuring resistor and a heat conductor, as platinum thin-film or thick-film resistors, on a ceramic substrate.
    • 提供了流量传感器元件和流量传感器元件的自清洁方法,其中温度测量元件和加热元件布置在载体元件上,并且这些元件可以形成多部件陶瓷部件。 温度测量元件在陶瓷基板上具有用于温度测量的铂薄膜电阻器,并用附加的铂薄膜电阻器加热。 测量装置,特别是流量传感器的气流测量装置包含安装在盖子或中空体的至少一个开口中的薄膜电阻器。 两个薄膜电阻器的电阻值相差一到三个数量级。 风速测量装置具有设置在载体元件中的温度传感器和热输出传感器。 温度传感器在陶瓷基板上具有温度测量电阻和作为铂薄膜或厚膜电阻的导热体。
    • 7. 发明授权
    • Semiconductor component with integrated circuit, cooling body, and temperature sensor
    • 具有集成电路,冷却体和温度传感器的半导体元件
    • US06787870B2
    • 2004-09-07
    • US10444215
    • 2003-05-23
    • Karl-Heinz WienandKarlheinz Ullrich
    • Karl-Heinz WienandKarlheinz Ullrich
    • H01L31058
    • H01L23/34G01K7/183H01L2924/0002H01L2924/00
    • A semiconductor component with an integrated circuit has a cooling body as a heat sink and a temperature sensor thermally connected thereto, whose resistance is dependent on temperature. The temperature sensor contains a thin film measuring resistor, which is applied to an electrically insulating surface of a foil-like substrate, and the total thickness of the temperature sensor lies in a range of about 10 &mgr;m to 100 &mgr;m. The thin film measuring resistor is formed as a planar component, with the temperature sensor being arranged between the integrated circuit and the cooling body. The thin film measuring resistor is provided on one side with a thermal coupling layer bordering on the cooling body, while on the other side the resistor has a substrate bordering on a heat distributor, which at least partially surrounds the integrated circuit.
    • 具有集成电路的半导体部件具有作为散热器的冷却体和与其热连接的温度传感器,其电阻取决于温度。 温度传感器包含薄膜测量电阻器,其被施加到箔状衬底的电绝缘表面,并且温度传感器的总厚度在约10μm至100μm的范围内。 薄膜测量电阻器形成为平面部件,温度传感器布置在集成电路和冷却体之间。 薄膜测量电阻器在一侧设置有与冷却体接壤的热耦合层,而另一侧,电阻器具有与分布器接壤的衬底,其至少部分地围绕集成电路。
    • 10. 发明授权
    • Flow sensor element and method of using same
    • 流量传感器元件及其使用方法
    • US06898969B2
    • 2005-05-31
    • US10742235
    • 2003-12-19
    • Karl-Heinz WienandKarlheinz UllrichMatthias Muziol
    • Karl-Heinz WienandKarlheinz UllrichMatthias Muziol
    • G01P13/00G01F1/692G01F1/68
    • G01F1/692
    • A flow sensor element is provided having at least one temperature-measuring element and at least one heating element each having at least one platinum thin film resistor, the at least one temperature-measuring element and the at least one heating element each being arranged on a carrier element which is formed from a ceramic foil laminate or a multi-part ceramic component. The carrier elements have electrical conductor paths and junction surfaces for electrically contacting the at least one temperature-measuring element and the at least one heating element. The at least one temperature-measuring element and the at least one heating element each have a metallic carrier foil with an electrically insulating coating, on which the platinum thin film resistors are arranged. The flow sensor element may be used for mass through-flow measurements of gaseous or liquid media in pipe ducts, for example in an exhaust gas pipe of an internal combustion engine.
    • 提供一种流量传感器元件,其具有至少一个温度测量元件和至少一个加热元件,每个至少一个加热元件具有至少一个铂薄膜电阻器,所述至少一个温度测量元件和至少一个加热元件各自布置在 载体元件,其由陶瓷箔层压体或多部件陶瓷部件形成。 载体元件具有用于电接触至少一个温度测量元件和至少一个加热元件的电导体路径和接合表面。 所述至少一个温度测量元件和所述至少一个加热元件各自具有带有电绝缘涂层的金属载体箔,铂薄膜电阻器布置在其上。 流量传感器元件可以用于例如在内燃机的废气管道中的管道中的气体或液体介质的质量流量测量。