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    • 3. 发明申请
    • Visual inspection apparatus
    • 目视检查仪器
    • US20070222976A1
    • 2007-09-27
    • US11728292
    • 2007-03-23
    • Katsuyuki Hashimoto
    • Katsuyuki Hashimoto
    • G01N21/88
    • G01N21/8803H01L21/67207H01L21/67288
    • A visual inspection apparatus includes: at least two inspection object transfer portions that transfer inspection objects to and from storage cassettes; at least two inspection portions that are located in different inspection positions from each other in order to inspect the inspection objects; an inspection object moving portion that moves the inspection objects that have been transferred to a main body of the apparatus between the inspection object transfer portions and the inspection portions, or between two of the inspection portions; and an inspection object transporting portion that transfers the inspection objects between the inspection object transfer portions and the storage cassettes.
    • 视觉检查装置包括:至少两个检查对象传送部分,用于将检查对象传送到存储盒和从存储盒传送; 至少两个检查部分彼此位于不同的检查位置以便检查检查对象; 检查对象移动部,其使已经被传送到检查对象传送部和检查部之间的设备的主体的检查对象或两个检查部之间移动; 以及检查对象传送部,其在检查对象传送部和存储盒之间传送检查对象。
    • 5. 发明申请
    • Laminate film
    • 层压膜
    • US20060121299A1
    • 2006-06-08
    • US10542802
    • 2004-01-20
    • Katsuyuki HashimotoMakoto Handa
    • Katsuyuki HashimotoMakoto Handa
    • B32B27/36B32B27/30B32B27/06
    • C09D5/32C08J5/04C08J2367/02Y10T428/24942Y10T428/25Y10T428/31786Y10T428/31797Y10T428/31935
    • The object of the present invention is to provide a laminated film excellent in light resistance, scratch resistance, transparency, dimensional stability and adhesion to a hard coating layer. The present invention is a laminated film comprising a base material layer, an easily adhering layer and a hard coating layer, wherein the easily adhering layer is formed on the base material layer and the hard coating layer is formed on the easily adhering layer, and further wherein (1) the base material layer is formed of a polyester resin formed from naphthalenedicarboxylic acid as a main dicarboxylic acid component and ethylene glycol as a main glycol component, (2) the hard coating layer has an ultraviolet absorbing function and has a pencil hardness of H or higher on the hard coating layer surface, and (3) said laminated film has a variation (Δb*) of less than 2.0 between transmittance b* values obtained before and after a 300 hours' xenon arc test of said laminated film.
    • 本发明的目的是提供耐光性,耐刮擦性,透明性,尺寸稳定性和对硬涂层的粘附性优异的层压膜。 本发明是一种层叠膜,其包括基材层,易粘合层和硬涂层,其中容易粘附层形成在基材层上,并且硬涂层形成在易粘附层上,并且进一步 其特征在于,(1)基材层由作为主要二羧酸成分的萘二羧酸和作为主要二醇成分的乙二醇形成的聚酯树脂形成,(2)硬涂层具有紫外线吸收功能,并具有铅笔硬度 (3)所述层压膜在所述层叠膜的300小时氙弧试验前后的透射率b *值之间的变化(Deltab *)小于2.0。
    • 10. 发明授权
    • Substrate processing apparatus and substrate housing method
    • 基板加工装置及基板收纳方法
    • US07747343B2
    • 2010-06-29
    • US11377509
    • 2006-03-16
    • Katsuyuki Hashimoto
    • Katsuyuki Hashimoto
    • G06G7/00
    • H01L21/681Y10S414/135
    • A substrate housing method for a substrate processing apparatus, including: a first step of transporting the substrate taken out from a housing case to the substrate processing apparatus by a transport means; a third step of processing the substrate at the substrate processing apparatus; a fourth step of returning the substrate after the third step to the housing case by the transport means; a second step of calculating a difference in amount in relation to a normal position of the substrate at the transport means from the first step and before the fourth step; and a fifth step of adjusting a returning position of the substrate in the housing case after the third step and until the fourth step.
    • 一种用于基板处理装置的基板收纳方法,包括:第一步骤,通过传送装置将从壳体取出的基板输送到基板处理装置; 在基板处理装置处理基板的第三步骤; 第四步骤,通过传送装置将第三步骤之后的衬底返回到壳体; 第二步骤,从第一步骤和第四步骤计算相对于输送装置处的基板的正常位置的量的差异; 以及第五步骤,在第三步骤之后调整基板在壳体中的返回位置,直到第四步骤。