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    • 3. 发明授权
    • Methods of forming trench isolation in the fabrication of integrated circuitry and methods of fabricating integrated circuitry
    • 在集成电路的制造中形成沟槽隔离的方法和制造集成电路的方法
    • US08349699B2
    • 2013-01-08
    • US13211174
    • 2011-08-16
    • Robert D. PatrawMartin Ceredig RobertsKeith R. Cook
    • Robert D. PatrawMartin Ceredig RobertsKeith R. Cook
    • H01L21/76
    • H01L21/76229
    • First and second isolation trenches are formed into semiconductive material of a semiconductor substrate. The first isolation trench has a narrowest outermost cross sectional dimension which is less than that of the second isolation trench. An insulative layer is deposited to within the first and second isolation trenches effective to fill remaining volume of the first isolation trench within the semiconductive material but not that of the second isolation trench within the semiconductive material. The insulative layer comprises silicon dioxide deposited from flowing TEOS to the first and second isolation trenches. A spin-on-dielectric is deposited over the silicon dioxide deposited from flowing the TEOS within the second isolation trench within the semiconductive material, but not within the first isolation trench within the semiconductive material. The spin-on-dielectric is deposited effective to fill remaining volume of the second isolation trench within the semiconductive material. The spin-on-dielectric is densified within the second isolation trench.
    • 第一和第二隔离沟槽形成半导体衬底的半导体材料。 第一隔离沟槽具有比第二隔离沟槽小的最小横截面尺寸。 绝缘层沉积在第一和第二隔离沟槽内,有效地填充半导体材料内的第一隔离沟槽的剩余容积,而不是半导体材料内的第二隔离沟槽的剩余体积。 绝缘层包括从流动TEOS沉积到第一和第二隔离沟槽的二氧化硅。 通过在半导体材料内的第二隔离沟槽内流动TEOS,而不是在半导体材料内的第一隔离沟槽内,在沉积的二氧化硅上沉积自旋电介质。 沉积电介质有效地填充半导体材料内的第二隔离沟槽的剩余体积。 旋转电介质在第二隔离沟槽内致密化。
    • 4. 发明授权
    • Methods of forming trench isolation in the fabrication of integrated circuitry and methods of fabricating integrated circuitry
    • 在集成电路的制造中形成沟槽隔离的方法和制造集成电路的方法
    • US08012847B2
    • 2011-09-06
    • US11097876
    • 2005-04-01
    • Robert D. PatrawM. Ceredig RobertsKeith R. Cook
    • Robert D. PatrawM. Ceredig RobertsKeith R. Cook
    • H01L21/76
    • H01L21/76229
    • First and second isolation trenches are formed into semiconductive material of a semiconductor substrate. The first isolation trench has a narrowest outermost cross sectional dimension which is less than that of the second isolation trench. An insulative layer is deposited to within the first and second isolation trenches effective to fill remaining volume of the first isolation trench within the semiconductive material but not that of the second isolation trench within the semiconductive material. The insulative layer comprises silicon dioxide deposited from flowing TEOS to the first and second isolation trenches. A spin-on-dielectric is deposited over the silicon dioxide deposited from flowing the TEOS within the second isolation trench within the semiconductive material, but not within the first isolation trench within the semiconductive material. The spin-on-dielectric is deposited effective to fill remaining volume of the second isolation trench within the semiconductive material. The spin-on-dielectric is densified within the second isolation trench.
    • 第一和第二隔离沟槽形成半导体衬底的半导体材料。 第一隔离沟槽具有比第二隔离沟槽小的最小横截面尺寸。 绝缘层沉积在第一和第二隔离沟槽内,有效地填充半导体材料内的第一隔离沟槽的剩余容积,而不是半导体材料内的第二隔离沟槽的剩余体积。 绝缘层包括从流动TEOS沉积到第一和第二隔离沟槽的二氧化硅。 通过在半导体材料内的第二隔离沟槽内流动TEOS,而不是在半导体材料内的第一隔离沟槽内,在沉积的二氧化硅上沉积自旋电介质。 沉积电介质有效地填充半导体材料内的第二隔离沟槽的剩余体积。 旋转电介质在第二隔离沟槽内致密化。
    • 9. 发明申请
    • Methods of Forming Trench Isolation in the Fabrication of Integrated Circuitry and Methods of Fabricating Integrated Circuitry
    • 集成电路制造中形成沟槽隔离的方法和制造集成电路的方法
    • US20110300689A1
    • 2011-12-08
    • US13211174
    • 2011-08-16
    • Robert D. PatrawM. Ceredig RobertsKeith R. Cook
    • Robert D. PatrawM. Ceredig RobertsKeith R. Cook
    • H01L21/762
    • H01L21/76229
    • First and second isolation trenches are formed into semiconductive material of a semiconductor substrate. The first isolation trench has a narrowest outermost cross sectional dimension which is less than that of the second isolation trench. An insulative layer is deposited to within the first and second isolation trenches effective to fill remaining volume of the first isolation trench within the semiconductive material but not that of the second isolation trench within the semiconductive material. The insulative layer comprises silicon dioxide deposited from flowing TEOS to the first and second isolation trenches. A spin-on-dielectric is deposited over the silicon dioxide deposited from flowing the TEOS within the second isolation trench within the semiconductive material, but not within the first isolation trench within the semiconductive material. The spin-on-dielectric is deposited effective to fill remaining volume of the second isolation trench within the semiconductive material. The spin-on-dielectric is densified within the second isolation trench.
    • 第一和第二隔离沟槽形成半导体衬底的半导体材料。 第一隔离沟槽具有比第二隔离沟槽小的最小横截面尺寸。 绝缘层沉积在第一和第二隔离沟槽内,有效地填充半导体材料内的第一隔离沟槽的剩余容积,而不是半导体材料内的第二隔离沟槽的剩余体积。 绝缘层包括从流动TEOS沉积到第一和第二隔离沟槽的二氧化硅。 通过在半导体材料内的第二隔离沟槽内流动TEOS,而不是在半导体材料内的第一隔离沟槽内,在沉积的二氧化硅上沉积自旋电介质。 沉积电介质有效地填充半导体材料内的第二隔离沟槽的剩余体积。 旋转电介质在第二隔离沟槽内致密化。