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1. 发明授权

US09233538B2 Piezoelectric device, piezoelectric actuator, droplet ejecting head, and droplet ejecting apparatus 有权
标题翻译：压电器件，压电致动器，液滴喷射头和液滴喷射装置
公开(公告)号：US09233538B2
公开(公告)日：2016-01-12
申请号：US12968890
申请日：2010-12-15
申请人： Eiji Osawa , Koji Ohashi , Eiju Hirai
发明人： Eiji Osawa , Koji Ohashi , Eiju Hirai
IPC分类号： B41J2/045 , B41J2/14 , H01L41/047 , H01L41/09
CPC分类号： B41J2/14233 , B41J2/14201 , H01L41/047 , H01L41/0973
摘要： A piezoelectric device including: a first electrode layer provided so as to overlie a substrate; a second electrode layer disposed so as to face the first electrode layer; and a piezoelectric layer disposed between the first electrode layer and the second electrode layer. The first electrode layer has a conductive layer and a barrier layer. The barrier layer is provided between the conductive layer and the piezoelectric layer so as to prevent the conductive layer from contacting the piezoelectric layer.
摘要翻译：一种压电装置，包括：设置成覆盖基板的第一电极层; 设置成面对第一电极层的第二电极层; 以及设置在第一电极层和第二电极层之间的压电层。第一电极层具有导电层和阻挡层。阻挡层设置在导电层和压电层之间，以防止导电层与压电层接触。

2. 发明授权

US08708463B2 Piezoelectric device, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus 有权
标题翻译：压电元件，压电致动器，液体喷射头和液体喷射装置
公开(公告)号：US08708463B2
公开(公告)日：2014-04-29
申请号：US12943177
申请日：2010-11-10
申请人： Koji Ohashi
发明人： Koji Ohashi
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1634 , B41J2/1642 , B41J2/1643 , B41J2/1646 , B41J2202/03 , H01L41/0477 , H01L41/0478 , H01L41/0973
摘要： A piezoelectric device includes a first electrode and a facing second electrode, with a piezoelectric layer therebetween. The first electrode includes a first conductive layer, a first intermediate layer that contacts the first conductive layer, a second intermediate layer that contacts the first intermediate layer, and a second conductive layer that contacts the second intermediate layer and the piezoelectric layer. The first conductive layer contains a metal and an alloy. The metal is Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn, Fe, Co, Ni, Cu, Ag, or Au, and the alloy contains at least one of the foregoing metals. The first intermediate layer contains a nitrogen compound. The second intermediate layer contains a metal and an alloy. The metal is Ti, Zr, W, Ta, or Al, and the alloy contains at least two of the foregoing metals. The second conductive layer contains a conductive oxide.
摘要翻译：压电装置包括第一电极和面对的第二电极，其间具有压电层。第一电极包括第一导电层，接触第一导电层的第一中间层，接触第一中间层的第二中间层和接触第二中间层和压电层的第二导电层。第一导电层含有金属和合金。金属是Ti，Zr，Hf，V，Nb，Ta，Cr，Mo，W，Mn，Fe，Co，Ni，Cu，Ag或Au，合金含有至少一种上述金属。第一中间层含有氮化合物。第二中间层含有金属和合金。金属是Ti，Zr，W，Ta或Al，合金含有至少两种上述金属。第二导电层含有导电氧化物。

3. 发明授权

US08491105B2 Production method of piezoelectric element, piezoelectric element, liquid ejecting head, and liquid ejecting apparatus 有权
标题翻译：压电元件，压电元件，液体喷射头和液体喷射装置的制造方法
公开(公告)号：US08491105B2
公开(公告)日：2013-07-23
申请号：US13426412
申请日：2012-03-21
申请人： Koji Ohashi
发明人： Koji Ohashi
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , H01L41/0815 , H01L41/0973 , H01L41/318 , H01L41/319
摘要： A production method of a piezoelectric element which includes an insulating film, a first electrode provided on the insulating film, a piezoelectric layer that is provided on the first electrode and is made of a composite oxide having a perovskite structure containing lead, zirconium, and titanium, and a second electrode provided on the piezoelectric layer on the opposite side to the first electrode, includes: forming and patterning the first electrode on the insulating film; forming island-shaped lanthanum nickel oxide portions over the insulating film and the first electrode; and forming a piezoelectric precursor film over the insulating film and the first electrode, and forming the piezoelectric layer having a piezoelectric film that is crystallized by baking the piezoelectric precursor film.
摘要翻译：一种压电元件的制造方法，包括绝缘膜，设置在绝缘膜上的第一电极，设置在第一电极上并由具有含铅，锆和钛的钙钛矿结构的复合氧化物制成的压电体层以及设置在与第一电极相反的一侧的压电层上的第二电极，包括：在绝缘膜上形成和图案化第一电极; 在绝缘膜和第一电极上形成岛状镧氧化镍部分; 以及在所述绝缘膜和所述第一电极上形成压电前体膜，以及形成具有压电膜的所述压电层，所述压电膜通过烘烤所述压电前体膜而结晶化。

4. 发明授权

US08491102B2 Droplet-ejecting head, method for manufacturing droplet-ejecting head, and droplet-ejecting apparatus 有权
标题翻译：液滴喷射头，液滴喷射头的制造方法和液滴喷射装置
公开(公告)号：US08491102B2
公开(公告)日：2013-07-23
申请号：US13045147
申请日：2011-03-10
申请人： Koji Ohashi
发明人： Koji Ohashi
IPC分类号： B41J2/045 , H02K5/00 , H02K1/18 , H02K5/15
CPC分类号： B41J2/14233 , H01L41/0478 , H01L41/0973 , H01L41/1876 , Y10T29/49401
摘要： Provided are a droplet-ejecting head having good displacement and a droplet-ejecting apparatus. The droplet-ejecting head includes a pressure chamber; a piezoelectric element which includes a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode, the piezoelectric layer being made of a lead zirconate titanate; and a nozzle plate having a nozzle orifice communicating with the pressure chamber. The first electrode includes at least one lanthanum nickelate layer which is located on the piezoelectric layer side. The piezoelectric layer has a distribution in which the concentration of lanthanum and nickel decrease from the interface between the lanthanum nickelate layer and the piezoelectric layer toward the second electrode. Lanthanum is locally distributed in the piezoelectric layer. Nickel is globally distributed in the piezoelectric layer so as to have a plurality of peaks. At least one of the peaks is split.
摘要翻译：提供具有良好位移的液滴喷射头和液滴喷射装置。液滴喷射头包括压力室; 压电元件，其包括第一电极，第二电极和设置在所述第一电极和所述第二电极之间的压电层，所述压电层由锆钛酸铅制成; 以及具有与压力室连通的喷嘴孔的喷嘴板。第一电极包括位于压电层一侧的至少一个镍酸镧层。压电层具有镧和镍的浓度从镍酸镧层与压电体层之间的界面朝向第二电极的分布。镧局部分布在压电层中。镍全部分布在压电层中，以具有多个峰。至少有一个峰是分裂的。

5. 发明申请

US20120242754A1 PRODUCTION METHOD OF PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS 有权
标题翻译：压电元件，压电元件，液体喷射头和液体喷射装置的生产方法
公开(公告)号：US20120242754A1
公开(公告)日：2012-09-27
申请号：US13426412
申请日：2012-03-21
申请人： Koji Ohashi
发明人： Koji Ohashi
IPC分类号： B41J2/045 , H01L41/22 , H01L41/04
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , H01L41/0815 , H01L41/0973 , H01L41/318 , H01L41/319
摘要： A production method of a piezoelectric element which includes an insulating film, a first electrode provided on the insulating film, a piezoelectric layer that is provided on the first electrode and is made of a composite oxide having a perovskite structure containing lead, zirconium, and titanium, and a second electrode provided on the piezoelectric layer on the opposite side to the first electrode, includes: forming and patterning the first electrode on the insulating film; forming island-shaped lanthanum nickel oxide portions over the insulating film and the first electrode; and forming a piezoelectric precursor film over the insulating film and the first electrode, and forming the piezoelectric layer having a piezoelectric film that is crystallized by baking the piezoelectric precursor film.
摘要翻译：一种压电元件的制造方法，包括绝缘膜，设置在绝缘膜上的第一电极，设置在第一电极上并由具有含铅，锆和钛的钙钛矿结构的复合氧化物制成的压电体层以及设置在与第一电极相反的一侧的压电层上的第二电极，包括：在绝缘膜上形成和图案化第一电极; 在绝缘膜和第一电极上形成岛状镧氧化镍部分; 以及在所述绝缘膜和所述第一电极上形成压电前体膜，以及形成具有压电膜的所述压电层，所述压电膜通过烘烤所述压电前体膜而结晶化。

6. 发明申请

US20110228015A1 DROPLET-EJECTING HEAD, METHOD FOR MANUFACTURING DROPLET-EJECTING HEAD, AND DROPLET-EJECTING APPARATUS 有权
标题翻译：喷射头，制造喷射头的方法和喷射装置
公开(公告)号：US20110228015A1
公开(公告)日：2011-09-22
申请号：US13045147
申请日：2011-03-10
申请人： Koji OHASHI
发明人： Koji OHASHI
IPC分类号： B41J2/045 , B23P17/00
CPC分类号： B41J2/14233 , H01L41/0478 , H01L41/0973 , H01L41/1876 , Y10T29/49401
摘要： Provided are a droplet-ejecting head having good displacement and a droplet-ejecting apparatus. The droplet-ejecting head includes a pressure chamber; a piezoelectric element which includes a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode, the piezoelectric layer being made of a lead zirconate titanate; and a nozzle plate having a nozzle orifice communicating with the pressure chamber. The first electrode includes at least one lanthanum nickelate layer which is located on the piezoelectric layer side. The piezoelectric layer has a distribution in which the concentration of lanthanum and nickel decrease from the interface between the lanthanum nickelate layer and the piezoelectric layer toward the second electrode. Lanthanum is locally distributed in the piezoelectric layer. Nickel is globally distributed in the piezoelectric layer so as to have a plurality of peaks. At least one of the peaks is split.
摘要翻译：提供具有良好位移的液滴喷射头和液滴喷射装置。液滴喷射头包括压力室; 压电元件，其包括第一电极，第二电极和设置在所述第一电极和所述第二电极之间的压电层，所述压电层由锆钛酸铅制成; 以及具有与压力室连通的喷嘴孔的喷嘴板。第一电极包括位于压电层一侧的至少一个镍酸镧层。压电层具有镧和镍的浓度从镍酸镧层与压电体层之间的界面朝向第二电极的分布。镧局部分布在压电层中。镍全部分布在压电层中，以具有多个峰。至少有一个峰是分裂的。

7. 发明申请

US20110228013A1 PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, DROPLET-EJECTING HEAD, DROPLET-EJECTING APPARATUS, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT 有权
标题翻译：压电元件，压电致动器，喷射头，喷射喷射装置和制造压电元件的方法
公开(公告)号：US20110228013A1
公开(公告)日：2011-09-22
申请号：US13048175
申请日：2011-03-15
申请人： Koji OHASHI , Masao NAKAYAMA , Noboru FURUYA
发明人： Koji OHASHI , Masao NAKAYAMA , Noboru FURUYA
IPC分类号： B41J2/045 , H01L41/047 , H01L41/09 , H01L41/22
CPC分类号： B41J2/14233 , H01L41/0815 , H01L41/0973 , H01L41/29 , H01L41/316 , H01L41/318 , H01L41/319
摘要： A piezoelectric element includes a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a resin layer that covers at least the side surfaces of the first electrode. The first electrode includes a metal layer and an anti-oxidation layer. The metal layer is formed of a base metal. The anti-oxidation layer is disposed between the metal layer and the piezoelectric layer to prevent contact between the metal layer and the piezoelectric layer.
摘要翻译：压电元件包括设置在基板上的第一电极，设置在第一电极上的压电层，设置在压电层上的第二电极和至少覆盖第一电极的侧表面的树脂层。第一电极包括金属层和抗氧化层。金属层由贱金属形成。抗氧化层设置在金属层和压电层之间，以防止金属层与压电层之间的接触。

8. 发明申请

US20110109701A1 PIEZOELECTRIC DEVICE, PIEZOELECTRIC ACTUATOR, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS 有权
标题翻译：压电装置，压电致动器，液体喷射头和液体喷射装置
公开(公告)号：US20110109701A1
公开(公告)日：2011-05-12
申请号：US12943177
申请日：2010-11-10
申请人： Koji OHASHI
发明人： Koji OHASHI
IPC分类号： B41J2/045 , H01L41/047
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1634 , B41J2/1642 , B41J2/1643 , B41J2/1646 , B41J2202/03 , H01L41/0477 , H01L41/0478 , H01L41/0973
摘要： A piezoelectric device includes a first electrode and a facing second electrode, with a piezoelectric layer therebetween. The first electrode includes a first conductive layer, a first intermediate layer that contacts the first conductive layer, a second intermediate layer that contacts the first intermediate layer, and a second conductive layer that contacts the second intermediate layer and the piezoelectric layer. The first conductive layer contains a metal and an alloy. The metal is Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn, Fe, Co, Ni, Cu, Ag, or Au, and the alloy contains at least one of the foregoing metals. The first intermediate layer contains a nitrogen compound. The second intermediate layer contains a metal and an alloy. The metal is Ti, Zr, W, Ta, or Al, and the alloy contains at least two of the foregoing metals. The second conductive layer contains a conductive oxide.
摘要翻译：压电装置包括第一电极和面对的第二电极，其间具有压电层。第一电极包括第一导电层，接触第一导电层的第一中间层，接触第一中间层的第二中间层和接触第二中间层和压电层的第二导电层。第一导电层含有金属和合金。金属是Ti，Zr，Hf，V，Nb，Ta，Cr，Mo，W，Mn，Fe，Co，Ni，Cu，Ag或Au，合金含有至少一种上述金属。第一中间层含有氮化合物。第二中间层含有金属和合金。金属是Ti，Zr，W，Ta或Al，合金含有至少两种上述金属。第二导电层含有导电氧化物。

9. 发明授权

US07707701B2 Method for manufacturing a piezoelectric element 有权
标题翻译：压电元件的制造方法
公开(公告)号：US07707701B2
公开(公告)日：2010-05-04
申请号：US11358836
申请日：2006-02-20
申请人： Setsuya Iwashita , Koji Ohashi , Takamitsu Higuchi
发明人： Setsuya Iwashita , Koji Ohashi , Takamitsu Higuchi
IPC分类号： H01L41/22 , H01L41/00 , B41J2/045
CPC分类号： H01L41/319 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1646 , H01L41/0477 , H01L41/0478 , H01L41/0973 , H01L41/1871 , H01L41/1873 , H01L41/1875 , H01L41/29 , Y10T29/42 , Y10T29/43 , Y10T29/435 , Y10T29/49005 , Y10T29/49155 , Y10T29/49401
摘要： A method for manufacturing a piezoelectric element includes the steps of forming a first electrode above a substrate, forming above the first electrode a piezoelectric layer composed of a piezoelectric material having a perovskite structure, and forming a second electrode above the piezoelectric layer, wherein the step of forming the first electrode includes forming a lanthanum nickelate layer that is oriented to a cubic (100) by a sputter method, and a ratio of nickel to lanthanum (Ni/La) in a target used for the sputter method is greater than 1 but smaller than 1.5.
摘要翻译：一种制造压电元件的方法包括以下步骤：在基板上形成第一电极，在第一电极上方形成由具有钙钛矿结构的压电材料构成的压电层，并在压电层上方形成第二电极，其中步骤形成第一电极包括通过溅射法形成定向为立方（100）的镍酸镧层，并且用于溅射法的靶中的镍与镧（Ni / La）的比例大于1，但是小于1.5。

10. 发明申请

US20100020133A1 LIQUID EJECTION HEAD AND LIQUID JET APPARATUS 有权
标题翻译：液体喷射头和液体喷射装置
公开(公告)号：US20100020133A1
公开(公告)日：2010-01-28
申请号：US12499415
申请日：2009-07-08
申请人： Koji OHASHI , Setsuya IWASHITA , Eiji OSAWA
发明人： Koji OHASHI , Setsuya IWASHITA , Eiji OSAWA
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2/1646 , B41J2202/03
摘要： A liquid jet head includes: a nozzle plate having a nozzle opening; a pressure chamber substrate having a pressure chamber communicating with the nozzle opening and formed above the nozzle plate; a vibration formed on one side of the pressure chamber substrate; and a piezoelectric element formed above the vibration plate and provided at a position corresponding to the pressure chamber, wherein the piezoelectric element includes two electrodes, a piezoelectric layer provided between the electrodes, and an orientation layer that is provided between one of the electrodes closer to the vibration plate and the piezoelectric layer, wherein the orientation layer includes a mixed crystal of lanthanum nickelate, and the lanthanum nickelate included in the mixed crystal is expressed by a formula LaxNiyOz, where x is an integer of any of 1 to 3, y is 1 or 2, and z is an integer of any of 2 to 7.
摘要翻译：液体喷射头包括：具有喷嘴开口的喷嘴板; 压力室基板，其具有与喷嘴开口连通并形成在喷嘴板上方的压力室; 形成在压力室基板的一侧的振动; 以及压电元件，其形成在所述振动板的上方并且设置在与所述压力室对应的位置处，其中，所述压电元件包括两个电极，设置在所述电极之间的压电层，以及设置在所述电极之间的更接近所述振动板和所述压电层，其中所述取向层包括镍酸镧的混合晶体，并且所述混合晶体中包含的所述镍酸镧由式LaxNiyOz表示，其中x是1至3中任一项的整数，y是 1或2，z为2〜7任意的整数。

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