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    • 3. 发明申请
    • MEASURING APPARATUS HAVING NANOTUBE PROBE
    • 具有纳米管探针的测量装置
    • US20090243637A1
    • 2009-10-01
    • US12412113
    • 2009-03-26
    • Makoto OKAIMotoyuki Hirooka
    • Makoto OKAIMotoyuki Hirooka
    • G01R27/00
    • G01R1/06761
    • An object of the present invention is to provide a measuring apparatus such as a conduction characteristics evaluation apparatus, a probe microscope, etc. having a nanotube probe, wherein the measuring apparatus is succeeded in reducing the electrical resistance of the carbon nanotube as well as the electrical resistance between the carbon nanotube and a metal substrate to improve electrical conduction characteristics of the nanotube probe and attain a uniform diameter, thus improving the measurement accuracy.In order to solve the above-mentioned problem, there is provided a conduction characteristics evaluation apparatus having a nanotube probe made of a nanotube coated by tiny fragments of graphene sheets to improve the wettability with respect to metal materials and then coated by a metal layer, or a conduction characteristics evaluation apparatus having a nanotube probe made of a metal-coated amorphous nanotube composed of tiny fragments of graphene sheets.
    • 本发明的目的是提供一种具有纳米管探针的导电特性评价装置,探针显微镜等测量装置,其中测量装置成功地降低了碳纳米管的电阻以及 碳纳米管和金属基板之间的电阻,以改善纳米管探针的导电特性并获得均匀的直径,从而提高测量精度。 为了解决上述问题,提供了一种具有纳米管探针的导电特性评价装置,该纳米管探针由石墨烯片的微小碎片涂覆的纳米管构成,以提高相对于金属材料的润湿性,然后用金属层涂覆, 或具有由石墨烯片的微小碎片构成的金属涂覆的无定形纳米管制成的纳米管探针的导电特性评价装置。