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    • 5. 发明授权
    • Method and device for modulating light with optical compensation
    • 用光学补偿调制光的方法和装置
    • US08422108B2
    • 2013-04-16
    • US12642750
    • 2009-12-18
    • Mark W. Miles
    • Mark W. Miles
    • G02B26/12G02F1/29
    • G02B26/001
    • An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.
    • 干涉式调制器(Imod)腔具有反射器和诱导吸收体。 直视图反射式平板显示器可以包括调制器的阵列。 通过剥离技术在衬底上制造不同厚度的相邻间隔物,其用于对分离沉积的间隔物进行图案化,每个沉积提供不同厚度的间隔物。 或者图案化的光致抗蚀剂可以用于允许蚀刻工艺选择性地回蚀在单次沉积中沉积的间隔物的厚度。 全色静态图形图像可以由干涉式调制器腔的组合图案形成。 每个空腔包括反射器和感应吸收器,所述诱导吸收器包括具有限定与空腔相关联的颜色的厚度的间隔件。