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1. 发明申请

US20150096373A1 ANGULAR VELOCITY SENSOR 有权
标题翻译：角速度传感器
公开(公告)号：US20150096373A1
公开(公告)日：2015-04-09
申请号：US14383335
申请日：2012-03-19
申请人： Heewon Jeong , Masahide Hayashi , Kiyoko Yamanaka
发明人： Heewon Jeong , Masahide Hayashi , Kiyoko Yamanaka
IPC分类号： G01C19/02 , G01C19/5719
CPC分类号： G01P9/02 , G01C19/5719 , G01C19/5726 , G01C19/5762
摘要： Provided is an angular velocity sensor including a plurality of angular velocity detection units each outputting a different detection result, and including a common driving circuit to drive the angular velocity detection units. The angular velocity detection units of the angular velocity sensor of the present invention are configured to have different driving amplitudes when being driven by a driving signal at the same frequency.
摘要翻译：提供了一种角速度传感器，其包括多个角速度检测单元，每个角速度检测单元输出不同的检测结果，并且包括用于驱动角速度检测单元的公共驱动电路。本发明的角速度传感器的角速度检测单元被配置为当由相同频率的驱动信号驱动时具有不同的驱动振幅。

2. 发明授权

US09000543B2 Combined sensor 有权
标题翻译：组合传感器
公开(公告)号：US09000543B2
公开(公告)日：2015-04-07
申请号：US13991749
申请日：2011-11-22
申请人： Heewon Jeong , Masahide Hayashi , Kiyoko Yamanaka
发明人： Heewon Jeong , Masahide Hayashi , Kiyoko Yamanaka
IPC分类号： H01L29/84 , B81B3/00 , G01C19/574 , G01P15/125 , G01P15/18
CPC分类号： B81B3/0018 , G01C19/574 , G01P15/125 , G01P15/18
摘要： To provide a combined sensor that can detect a plurality of physical quantities. With the combined sensor, it is possible to realize, while maintaining performance, a reduction in size and a reduction in costs by increasing elements that can be shared among respective sensors. A weight M2 and a detection electrode DTE2 used in an angular-velocity detecting section are also used as a reference capacitive element of a Z-direction-acceleration detecting section configured to detect acceleration in a Z direction. That is, in the Z-direction-acceleration detecting section, a detection capacitive element including the weight M2 and the detection electrode DTE2 configuring the angular-velocity detecting section is used as a reference capacitive element for a detection capacitive element formed by a detection electrode DTE5 and a weight M4.
摘要翻译：提供可以检测多个物理量的组合传感器。利用组合的传感器，通过增加可在各个传感器之间共享的元件，可以在保持性能的同时实现尺寸的减小和成本的降低。在角速度检测部中使用的重量M2和检测电极DTE2也被用作被配置为检测Z方向上的加速度的Z方向加速度检测部的基准电容元件。也就是说，在Z方向加速度检测部中，使用包括权重M2的检测电容元件和构成角速度检测部的检测电极DTE2作为由检测电极形成的检测用电容元件的基准电容元件 DTE5和重量M4。

3. 发明授权

US08659101B2 Physical quantity detector 有权
标题翻译：物理量检测器
公开(公告)号：US08659101B2
公开(公告)日：2014-02-25
申请号：US13878776
申请日：2011-10-07
申请人： Kiyoko Yamanaka , Kengo Suzuki , Kazunori Ohta , Heewon Jeong , Masahide Hayashi
发明人： Kiyoko Yamanaka , Kengo Suzuki , Kazunori Ohta , Heewon Jeong , Masahide Hayashi
IPC分类号： B81B3/00 , G01L9/00 , H01L29/84
CPC分类号： B81B7/0058 , G01C19/5783 , G01P15/125 , G01P2015/0814 , G01P2015/0845 , H01L24/32 , H01L2224/05554 , H01L2224/48091 , H01L2224/49171 , H01L2224/73265 , H01L2924/14 , H01L2924/00014 , H01L2924/00
摘要： Provided is an inertial sensor device comprising a detection part having an MEMS structure, wherein convenience during sensor installation is ensured while erroneous operation caused by the application of external vibration is controlled. To achieve this objective, an anti-vibration structure (103) is provided in the inertial sensor device, between a semiconductor chip (102) mounted on a package substrate and a semiconductor chip (104) comprising a sensor detection part. The anti-vibration structure (103) has a structure in which the periphery of an anti-vibration part (103a) is surrounded by an anti-vibration part (103b) comprising a material having a larger Young's modulus.
摘要翻译：提供了一种惯性传感器装置，其包括具有MEMS结构的检测部件，其中，在控制由施加外部振动引起的错误操作的同时确保传感器安装期间的便利性。为了实现该目的，在惯性传感器装置中，在安装在封装基板上的半导体芯片（102）和包括传感器检测部件的半导体芯片（104）之间设置防振结构（103）。防振结构（103）具有防振部（103a）的周围由包含杨氏模量较大的材料的防振部（103b）包围的结构。

4. 发明申请

US20130345901A1 Inertial Sensor 有权
标题翻译：惯性传感器
公开(公告)号：US20130345901A1
公开(公告)日：2013-12-26
申请号：US14001634
申请日：2012-01-11
申请人： Daisuke Maeda , Heewon Jeong , Masahide Hayashi , Makoto Yamamoto
发明人： Daisuke Maeda , Heewon Jeong , Masahide Hayashi , Makoto Yamamoto
IPC分类号： G01P15/00
CPC分类号： G01P15/00 , B60W2050/0055 , B60W2050/0056 , G01C19/5776
摘要： An object of the invention is to provide an inertial sensor with small delay and high accuracy. An inertial sensor 1 includes an acceleration detecting element 2 that detects an acceleration of at least one axis of a vehicle; a first filter 6 that limits a detection signal of the acceleration to a first band; a second filter 7 that limits a detection signal of the acceleration to a second band; a vehicle control variable calculation section 8 that calculates a vehicle control variable Gxc on the basis of the detection signal of the acceleration limited to the second band; and a sensor signal output section 9 that outputs the detection signal of the acceleration limited to the first band and the vehicle control variable.
摘要翻译：本发明的目的是提供一种具有小延迟和高精度的惯性传感器。惯性传感器1包括检测车辆的至少一个轴的加速度的加速度检测元件2; 第一滤波器6，其将加速度的检测信号限制到第一频带; 第二滤波器7，其将加速度的检测信号限制到第二频带; 基于限于第二频带的加速度的检测信号计算车辆控制变量Gxc的车辆控制变量运算部8; 以及传感器信号输出部9，其输出限制在第一频带的加速度的检测信号和车辆控制变量。

5. 发明申请

US20130226506A1 Physical Quantity Detection Device, And Network System 审中-公开
标题翻译：物理量检测装置和网络系统
公开(公告)号：US20130226506A1
公开(公告)日：2013-08-29
申请号：US13879566
申请日：2011-10-20
申请人： Toshiaki Nakamura , Masahide Hayashi
发明人： Toshiaki Nakamura , Masahide Hayashi
IPC分类号： G06F17/00
CPC分类号： G06F17/00 , G01C19/56 , G01C19/5776 , G01D3/08 , G01P15/097 , G01P15/125 , G01P15/18
摘要： An object is to provide a physical quantity detection device capable of reducing a communication load for transmitting a sensor detection result, and also, of reducing a processing load of a receiving device receiving the sensor detection result.In a case a sensor is not normally operating, the physical quantity detection device according to the present invention transmits a diagnosis result without transmitting a detection result of the sensor (see FIG. 4).
摘要翻译：本发明的目的是提供一种物理量检测装置，其能够减少用于传送传感器检测结果的通信负荷，并且还降低接收传感器检测结果的接收装置的处理负荷。在传感器不正常工作的情况下，根据本发明的物理量检测装置发送诊断结果而不发送传感器的检测结果（参见图4）。

6. 发明授权

US08459108B2 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US08459108B2
公开(公告)日：2013-06-11
申请号：US13029520
申请日：2011-02-17
申请人： Kazunori Ohta , Masahide Hayashi
发明人： Kazunori Ohta , Masahide Hayashi
IPC分类号： G01P1/02
CPC分类号： G01C19/5783 , G01C19/56 , H01L2224/48091 , H01L2224/48137 , H01L2224/73265 , H01L2224/92247 , H01L2924/15311 , H01L2924/00014
摘要： An angular rate sensor includes a metallic core board having a core meal layer made of a metal plate and a wiring layer including a wiring structure, a semiconductor device for detecting an angular rate fixed on the core metal layer, and a cap fixed to the wiring layer. The semiconductor device for detecting an angular rate is disposed in a hollow chamber formed by the cap and the metallic core board. The metallic core board, the semiconductor device, and the cap are molded with resin. Consequently, the angular rate sensor has a packaging structure in which electromagnetic noise resistance and moisture resistance are improved while stress applied to the semiconductor device for detecting an angular rate is reduced.
摘要翻译：角速率传感器包括具有由金属板制成的芯粕层的金属芯板和包括布线结构的布线层，用于检测固定在芯金属层上的角速率的半导体器件和固定到布线的帽层。用于检测角速率的半导体装置设置在由盖和金属芯板形成的中空室中。金属芯板，半导体器件和盖子用树脂模制。因此，角速率传感器具有改善电磁噪声阻抗和耐湿性的封装结构，同时减小了施加到用于检测角速率的半导体器件的应力。

7. 发明申请

US20130133422A1 Inertial Sensor 有权
标题翻译：惯性传感器
公开(公告)号：US20130133422A1
公开(公告)日：2013-05-30
申请号：US13811950
申请日：2011-08-08
申请人： Kiyoko Yamanaka , Heewon Jeong , Toshiaki Nakamura , Masahide Hayashi
发明人： Kiyoko Yamanaka , Heewon Jeong , Toshiaki Nakamura , Masahide Hayashi
IPC分类号： G01P15/125 , G01P21/00
CPC分类号： G01P15/125 , G01C19/5747 , G01P15/0802 , G01P21/00 , G01P2015/0814
摘要： In order to provide an inertial sensor capable of suppressing a wrong diagnosis even in an adverse environment such that sudden noise occurs, an inertial sensor is provided with a movable part (105), a first detection unit (C1, C2) for detecting the amount of displacement of the movable part (105), a forced vibration means (503, C3, C4) for forcedly vibrating the movable part (105) by applying a diagnosis signal, a physical quantity calculation unit (502) for calculating the physical quantity from a detection signal from the first detection unit (C1, C2), and an abnormality determination unit (504) for determining the presence or absence of the abnormality for the physical quantity using the diagnosis signal obtained via the first detection unit (C1, C2), and is used within a vehicle, the inertial sensor further comprising a second sensor (510) mounted in the same vehicle and connected to the abnormality determination unit (504).
摘要翻译：为了提供一种惯性传感器，即使在出现突发噪声的不利环境下也能够抑制错误的诊断，惯性传感器设置有可动部（105），第一检测单元（C1，C2）通过施加诊断信号对可动部（105）进行强制振动的强制振动装置（503，C3，C4）;物理量计算部（502），用于计算物理量来自第一检测单元（C1，C2）的检测信号和用于通过经由第一检测单元（C1，C2）获得的诊断信号来确定物理量的异常的存在或不存在的异常确定单元（504），并且在车辆内使用，惯性传感器还包括安装在同一车辆中并连接到异常判定单元（504）的第二传感器（510）。

8. 发明申请

US20130068020A1 Combined Sensor and Method for Manufacturing the Same 有权
标题翻译：组合传感器及其制造方法
公开(公告)号：US20130068020A1
公开(公告)日：2013-03-21
申请号：US13699235
申请日：2011-05-20
申请人： Takanori Aono , Kengo Suzuki , Akira Koide , Masahide Hayashi
发明人： Takanori Aono , Kengo Suzuki , Akira Koide , Masahide Hayashi
IPC分类号： G01P3/44 , H05K3/30 , H05K3/28 , B23P11/00
CPC分类号： G01P15/0802 , B81B2201/0235 , B81B2201/0242 , B81B2203/0315 , B81B2207/095 , B81C1/00293 , B81C2203/031 , G01C19/56 , G01C19/5783 , G01P15/125 , H01L21/561 , H01L23/315 , H01L24/94 , H01L2924/12042 , H01L2924/15788 , H01L2924/16235 , Y10T29/49146 , Y10T29/49826 , H01L2924/00
摘要： An acceleration sensor and an angular velocity sensor are sealed in respective pressure atmospheres suitable therefor in the process of a series of bonding steps, thereby improving the detection sensibilities of the sensors.A movable member 111 of an acceleration sensor 11 and a vibrator 121 of an angular velocity sensor 12 are fabricated on the same sensor wafer 10 with a wall 16 interposed therebetween. A cap wafer 20 is formed in which gaps 21, 22 corresponding to the movable member 111 of the acceleration sensor 11 and the vibrator 121 of the angular velocity sensor 12 are provided. Bumps 23 are disposed near the gap 22 of the angular velocity sensor 12. The acceleration sensor 11 is sealed at atmospheric pressure. Then, the angular velocity sensor 12 is subjected to high temperature and a high-load and is vacuum-sealed. Thereafter, cutting with a diamond grindstone and mounting of circuit substrates and a wiring substrate are performed to form a combined sensor.
摘要翻译：加速度传感器和角速度传感器在一系列接合步骤的过程中被密封在适合于其的相应的压力环境中，从而提高传感器的检测灵敏度。加速度传感器11的可动部件111和角速度传感器12的振动器121被制造在相同的传感器晶片10上，壁16插入其中。形成盖片20，其中设置有与加速度传感器11的可动构件111对应的间隙21,22和角速度传感器12的振子121。凸起23设置在角速度传感器12的间隙22附近。加速度传感器11在大气压下被密封。然后，对角速度传感器12进行高温高负荷的真空密封。此后，进行用金刚石磨石切割并安装电路基板和布线基板以形成组合的传感器。

9. 发明申请

US20090020419A1 Physical Sensor And Method Of Process 有权
标题翻译：物理传感器和过程方法
公开(公告)号：US20090020419A1
公开(公告)日：2009-01-22
申请号：US12175347
申请日：2008-07-17
申请人： Kengo SUZUKI , Takeshi Harada , Yasuo Osone , Masahide Hayashi , Teruhisa Akashi
发明人： Kengo SUZUKI , Takeshi Harada , Yasuo Osone , Masahide Hayashi , Teruhisa Akashi
IPC分类号： G01N27/30
CPC分类号： G01P15/0802 , B81B2207/096 , B81C1/00301 , G01C19/5719
摘要： There is provided a physical sensor which ensures long-term reliability and can be miniaturized and increased in density, and a method of producing the same. A physical sensor includes a supporting substrate, an element substrate that includes a sensor element and is joined to the supporting substrate through an insulating layer, a glass cap that covers an area of the sensor element and is joined to the element substrate, and a built-in electrode that is electrically connected to the sensor element. The built-in electrode is formed in a through hole passing through the element substrate, the insulating layer and the supporting substrate. A portion of the glass cap that covers an area of the built-in electrode is anodically bonded to the element substrate.
摘要翻译：提供了一种物理传感器，其确保了长期可靠性并且可以小型化和增加密度，以及其制造方法。物理传感器包括支撑基板，包括传感器元件并通过绝缘层与支撑基板接合的元件基板，覆盖传感器元件的区域并与元件基板接合的玻璃盖，以及内置电连接到传感器元件。内置电极形成在穿过元件基板，绝缘层和支撑基板的通孔中。覆盖内置电极的区域的玻璃帽的一部分阳极接合到元件基板。

10. 发明申请

US20050115328A1 Pressure sensor, flowmeter electonic component, and method for manufacturing the same 失效
标题翻译：压力传感器，流量计电子部件及其制造方法
公开(公告)号：US20050115328A1
公开(公告)日：2005-06-02
申请号：US10500873
申请日：2003-01-17
申请人： Masahide Hayashi , Katsuhiko Kikuchi , Hiromichi Ebine
发明人： Masahide Hayashi , Katsuhiko Kikuchi , Hiromichi Ebine
IPC分类号： G01L9/00 , G01L19/00
CPC分类号： G01L19/0092 , G01L19/0038 , G01L19/0084 , G01L19/141
摘要： An outer case connector portion, a gauge housing case, and the like for use with a pressure sensor, for example, are generally made of a thermoplastic or thermosetting resin. However, the resin physically causes curing shrinkage. Especially, when a metal is insert molded with a resin, curing shrinkage of the resin generates a gap at the interface between the resin and the metal. By filling an anaerobic, high-permeability adhesive in the gap, hermetic sealing can be ensured and reliability can be enhanced. Inexpensive hermetic sealing and enhanced reliability are realized.
摘要翻译：例如，与压力传感器一起使用的外壳连接器部分，量规壳体壳体等通常由热塑性或热固性树脂制成。然而，树脂物理地引起固化收缩。特别地，当金属用树脂嵌入成型时，树脂的固化收缩在树脂和金属之间的界面处产生间隙。通过在间隙中填充厌氧性高渗透性粘合剂，可以确保气密密封，提高可靠性。实现了廉价的密封和增强的可靠性。

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