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    • 10. 发明授权
    • Method of fabricating a non-volatile memory device
    • 制造非易失性存储器件的方法
    • US07585730B1
    • 2009-09-08
    • US12164721
    • 2008-06-30
    • Seok Pyo SongDong Sun SheenYoung Jin LeeMi Ri LeeChi Ho KimGil Jae ParkBo Min Seo
    • Seok Pyo SongDong Sun SheenYoung Jin LeeMi Ri LeeChi Ho KimGil Jae ParkBo Min Seo
    • H01L21/8247
    • H01L29/7881H01L21/28273H01L27/115H01L27/11521H01L29/42324
    • A method of fabricating a non-volatile memory device includes forming a tunneling layer and a conductive layer on a semiconductor substrate, and patterning the conductive layer, the tunneling layer, and the semiconductor substrate to form a conductive pattern, a tunneling pattern, and a trench in the semiconductor substrate. The method also includes filling the trench with a insulating material, and exposing a partial sidewall of the conductive pattern. The method further includes recessing the exposed partial sidewall of the conductive pattern in an inward direction to form a floating gate. The floating gate includes a base portion and a protruding portion having a width smaller than that of the base portion. The method also includes etching the insulating layer to form an isolation layer that exposes the base portion of the floating gate. Still further, the method includes forming a dielectric layer, that extends along the base and protruding portions of the floating gate, and a control gate that covers the base and protruding portions of the floating gate.
    • 一种制造非易失性存储器件的方法包括在半导体衬底上形成隧道层和导电层,并且对导电层,隧道层和半导体衬底进行构图以形成导电图案,隧道图案和 沟槽在半导体衬底中。 该方法还包括用绝缘材料填充沟槽,以及暴露导电图案的部分侧壁。 该方法还包括将导电图案的暴露部分侧壁向内凹入以形成浮动栅极。 浮动门包括基部和具有小于基部的宽度的突出部分。 该方法还包括蚀刻绝缘层以形成暴露浮动栅极的基部的隔离层。 此外,该方法包括形成沿着基极延伸的电介质层和浮动栅极的突出部分,以及覆盖浮动栅极的基部和突出部分的控制栅极。