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    • 1. 发明授权
    • Material delivery system for clean room-like environments
    • 洁净室环境的物料输送系统
    • US06648587B1
    • 2003-11-18
    • US09801379
    • 2001-03-07
    • Tom E. McMunigalMichael A. FinnJohn D. McCrandall
    • Tom E. McMunigalMichael A. FinnJohn D. McCrandall
    • B65G6000
    • H01L21/67775Y10S414/135Y10S414/14
    • A material delivery system is disclosed which is particularly useful for filtered environments, such as clean rooms, minienvironments, or the like. One aspect of this particular material delivery system is that movement of an elevator is automatically controlled (i.e., no operator input), and more preferably is accomplished by monitoring for the presence of containers at multiple vertical positions. Another aspect of this particular material delivery system is that its elevator may be installed on and removed from a main housing of the material delivery system without requiring any tools. Yet another aspect of this particular material delivery system is that containers need not be unloaded from the material delivery system prior to removing its elevator, such as for replacement/maintenance purposes.
    • 公开了一种材料输送系统,其特别适用于过滤的环境,例如洁净室,小环境等。 该特定材料输送系统的一个方面是电梯的移动被自动控制(即,不需要操作员输入),并且更优选地通过监视在多个垂直位置处的容器的存在来实现。 这种特定材料输送系统的另一方面是其电梯可以安装在材料输送系统的主壳体上并从其移除,而不需要任何工具。 这种特定材料输送系统的另一方面是,在移除其电梯之前,例如用于替换/维护目的,容器不需要从材料输送系统卸载。