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1. 发明申请

US20130015616A1 LINEAR FLEXURE BEARING 有权
标题翻译：线性挠性轴承
公开(公告)号：US20130015616A1
公开(公告)日：2013-01-17
申请号：US13180437
申请日：2011-07-11
申请人： Michael Valois
发明人： Michael Valois
IPC分类号： F16F3/00
CPC分类号： F16F3/02
摘要： This compound linear flexure bearing incorporates a simple but unique flexure arrangement which inherently allows stable long travel operation. The flexure arrangement passively constrains all degrees of freedom except translation along the bearing axis while also compensating for flexure foreshortening. This design permits large displacement, low operating stress, low operating force, and high stiffness in the five noncompliant degrees of freedom. The linear flexure bearing described herein has applications in precision mechanics, particularly opto-mechanics. Specific applications include but are not limited to wafer and reticle positioning stages used in microlithography systems, optic translation and scanning mechanisms used in tactical and spaceborne systems, as well as flip-in mechanisms used in multiple field of view optical systems
摘要翻译：这种复合线性挠性轴承结合了简单而独特的弯曲布置，其固有地允许稳定的长行程操作。挠曲布置被动地约束所有自由度，除了沿轴承轴线的平移之外，还补偿挠曲缩短。这种设计允许在五个不符合自由度的大位移，低操作应力，低操作力和高刚度。本文描述的线性挠曲轴承在精密力学，特别是光学力学中具有应用。具体应用包括但不限于在微光刻系统中使用的晶片和掩模版定位级，用于战术和空间系统中的光学平移和扫描机构，以及用于多视场光学系统中的翻转机构

2. 发明授权

US08899869B2 Rotary flexure bearing 有权
标题翻译：旋转挠性轴承
公开(公告)号：US08899869B2
公开(公告)日：2014-12-02
申请号：US12852968
申请日：2010-08-09
申请人： Michael Valois
发明人： Michael Valois
IPC分类号： F16C11/12
CPC分类号： F16C11/12 , Y10T403/10 , Y10T403/451 , Y10T403/54
摘要： This rotary flexure bearing consists of concentric inner and outer hubs connected by compound flexure stages. These compound flexure stages provide the angular compliance required for bearing rotation as well as compliance for flexure foreshortening while holding a constant axis of rotation over the entire range of motion. This design offers large angular displacement, low operating stress, low operating torque, and high stiffness in the five noncompliant degrees of freedom. The rotary flexure bearing described herein has applications in precision mechanics, particularly opto-mechanics. Specific applications include but are not limited to wafer and reticle alignment stages used in microlithography systems, mirror pointing and scanning mechanisms used in tactical and spaceborne systems, as well as flip-in mechanisms used in multiple field of view optical systems.
摘要翻译：该旋转挠曲轴承由通过复合弯曲台连接的同心内部和外部毂组成。这些复合弯曲台提供轴承旋转所需的角度顺应性以及挠曲缩短的顺应性，同时在整个运动范围内保持恒定的旋转轴。这种设计提供了大的角位移，低工作应力，低操作扭矩和高刚度在五个不一致的自由度。本文所述的旋转挠曲轴承在精密力学，特别是光学力学中具有应用。具体应用包括但不限于在微光刻系统中使用的晶片和掩模版对准阶段，在战术和空间系统中使用的镜面指示和扫描机构，以及用于多视场光学系统的翻转机构。

3. 发明授权

US08662484B2 Linear flexure bearing 有权
标题翻译：线性挠性轴承
公开(公告)号：US08662484B2
公开(公告)日：2014-03-04
申请号：US13180437
申请日：2011-07-11
申请人： Michael Valois
发明人： Michael Valois
IPC分类号： F16B43/00
CPC分类号： F16F3/02
摘要： This compound linear flexure bearing incorporates a simple but unique flexure arrangement which inherently allows stable long travel operation. The flexure arrangement passively constrains all degrees of freedom except translation along the bearing axis while also compensating for flexure foreshortening. This design permits large displacement, low operating stress, low operating force, and high stiffness in the five noncompliant degrees of freedom. The linear flexure bearing described herein has applications in precision mechanics, particularly opto-mechanics. Specific applications include but are not limited to wafer and reticle positioning stages used in microlithography systems, optic translation and scanning mechanisms used in tactical and spaceborne systems, as well as flip-in mechanisms used in multiple field of view optical systems.
摘要翻译：这种复合线性挠性轴承结合了简单而独特的弯曲布置，其固有地允许稳定的长行程操作。挠曲布置被动地约束所有自由度，除了沿轴承轴线的平移之外，还补偿挠曲缩短。这种设计允许在五个不符合自由度的大位移，低操作应力，低操作力和高刚度。本文描述的线性挠曲轴承在精密力学，特别是光学力学中具有应用。具体应用包括但不限于在微光刻系统中使用的晶片和掩模版定位阶段，在战术和空间系统中使用的光学平移和扫描机构，以及用于多视场光学系统的翻转机构。

4. 发明申请

US20120034027A1 ROTARY FLEXURE BEARING 有权
标题翻译：旋转灵活轴承
公开(公告)号：US20120034027A1
公开(公告)日：2012-02-09
申请号：US12852968
申请日：2010-08-09
申请人： Michael Valois
发明人： Michael Valois
IPC分类号： F16C11/12
CPC分类号： F16C11/12 , Y10T403/10 , Y10T403/451 , Y10T403/54
摘要： This rotary flexure bearing is a monolithic structure with inner and outer hubs connected by unique rotary compound flexure stages. These rotary compound flexure stages provide the angular compliance required for bearing rotation as well as compliance for flexure foreshortening while holding a constant axis of rotation with great precision over the entire range of motion. This design offers large angular displacement, low operating stress, low operating torque, and high stiffness in the five noncompliant degrees of freedom. The rotary flexure bearing described herein has applications in precision mechanics, particularly opto-mechanics. Specific applications include but are not limited to wafer and reticle alignment stages used in microlithography systems, mirror pointing and scanning mechanisms used in tactical and spaceborne systems, as well as flip-in mechanisms used in multiple field of view optical systems.
摘要翻译：这种旋转挠性轴承是一种整体结构，内部和外部轮毂通过独特的旋转复合弯曲台连接。这些旋转复合弯曲台提供轴承旋转所需的角顺应性以及挠曲缩短的顺应性，同时在整个运动范围内以高精度保持恒定的旋转轴。这种设计提供了大的角位移，低工作应力，低操作扭矩和高刚度在五个不一致的自由度。本文所述的旋转挠曲轴承在精密力学，特别是光学力学中具有应用。具体应用包括但不限于在微光刻系统中使用的晶片和掩模版对准阶段，在战术和空间系统中使用的镜面指示和扫描机构，以及用于多视场光学系统的翻转机构。

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