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    • 4. 发明授权
    • Bar type ionizer
    • 酒吧型离子发生器
    • US07746621B2
    • 2010-06-29
    • US11918827
    • 2006-02-09
    • Yong-Chul JungByung-Soo LeeMin-Ho JungChung-Han Shim
    • Yong-Chul JungByung-Soo LeeMin-Ho JungChung-Han Shim
    • H05F3/00
    • H01T23/00
    • A bar type ionizer has a discharging electrode, a ground electrode, a high voltage unit, and a controller unit and uses the technique of eliminating static electricity by corona discharging. The ionizer also has a FND unit mounted on the bar which lets the user see the bar information including address of the bar, frequency, duty rate, alarm, run/stop state easily, plus buttons that let the user control the bar information easily, an air supply device installed around the needles in the air injecting socket which sends air, and a second air supply device installed around the needles having round sections and sending air to the end of the needles to eliminate the dust attached on the end of the needles. The ionizer has a streamlined section so that inside air flows smoothly. The second air supply device is elliptic with the minor axis smaller than the radius of the needle. The needle is positioned at the center of this elliptic groove and fixed by it.
    • 棒式离子发生器具有放电电极,接地电极,高压单元和控制器单元,并且采用通过电晕放电消除静电的技术。 离子发生器还具有安装在棒上的FND单元,使用户可以轻松地查看包括条的地址,频率,占空比,报警,运行/停止状态的条形信息,以及允许用户轻松控制条形信息的按钮, 安装在空气喷射插座中的针周围的空气供应装置,以及安装在具有圆形部分的针周围的第二供气装置,并且将空气送到针的末端以消除附着在针的端部上的灰尘 。 电离器具有流线型部分,使得内部空气流畅地流动。 第二供气装置是椭圆形的,短轴小于针的半径。 针位于该椭圆槽的中心并由其固定。
    • 6. 发明授权
    • Organic anti-reflective polymer and preparation thereof
    • 有机抗反射聚合物及其制备方法
    • US06956091B2
    • 2005-10-18
    • US10438531
    • 2003-05-14
    • Sung-eun HongMin-ho JungKi-ho Baik
    • Sung-eun HongMin-ho JungKi-ho Baik
    • C07C317/22C07C303/28C07C309/73C08F2/06C08F4/04C08F4/34C08F20/38C08F20/58C08F220/38C09D5/00C09D133/14C09D163/00C08F124/00
    • C08F20/58C07C303/28C07C309/73
    • The present invention relates to organic anti-reflective coating polymers suitable for use in a semiconductor device during a photolithograhy process for forming ultrafine patterns using 193 nm ArF beam radiation, and preparation method therefor. Anti-reflective coating polymers of the present invention contain a monomer having a pendant phenyl group having high absorbency at the 193 nm wavelength. When the polymers of the present invention are used in an anti-reflective coating in a photolithography process for forming ultrafine patterns, the polymers eliminate the standing waves caused by changes in the thickness of the overlying photosensitive film, by the spectroscopic property of lower layers on wafer and by changes in CD due to diffractive and reflective light originating from the lower layers. Use of the anti-reflective coating of the present invention results in the stable formation of ultrafine patters suitable for 64M, 256M, 1G, 4G and 16G DRAM semiconductor devices and a great improvement in the production yield.The present invention also relates to anti-reflective coating compositions containing these polymers and to the anti-reflective coatings formed from these compositions, as well as preparation methods therefor.
    • 本发明涉及一种适用于半光装置的有机抗反射涂层聚合物,其用于使用193nm ArF光束辐射形成超细纹图案的光刻方法及其制备方法。 本发明的抗反射涂层聚合物含有在193nm波长处具有高吸收性的侧基苯基的单体。 当本发明的聚合物在用于形成超细图案的光刻工艺中的抗反射涂层中使用时,聚合物消除由上覆感光膜的厚度变化引起的驻波,通过下层的分光特性 晶片以及由于来自下层的衍射和反射光引起的CD变化。 使用本发明的抗反射涂层可以稳定地形成适用于64M,256M,1G,4G和16G DRAM半导体器件的超微图案,并且可以大大提高生产率。 本发明还涉及含有这些聚合物和由这些组合物形成的抗反射涂层的抗反射涂料组合物及其制备方法。