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    • 9. 发明申请
    • DEPOSITION APPARATUS AND MANUFACTURING PROCESS INCLUDING FILM FORMING STEP BY DEPOSITION APPARATUS
    • 沉积装置和制造工艺,包括通过沉积装置形成薄膜
    • US20160303607A1
    • 2016-10-20
    • US15095325
    • 2016-04-11
    • NALUX CO., LTD.
    • Toshiro HIGUCHIHiroshi UENOHitoshi KIMURA
    • B05D1/00B05C13/00
    • A deposition apparatus includes a dome rotatable around the central axis; a loop chain surrounding the central axis on the dome; a power transmission shaft transmitting rotational motion of the dome; a first gear section transforming the rotational motion of the dome to rotational motion of the shaft; a second gear section provided with a chain-driving sprocket and configured to transform the rotational motion of the shaft to rotational motion of the sprocket; and a tray holder located beside the loop chain, the tray holder including a first internal power transmission shaft and a rotating portion holding a tray. The sprocket is rotated through the rotation of the dome to drive the loop chain, the first internal power transmission shaft of the tray holder is rotated by motion of the loop chain, and the rotating portion is rotated through rotation of the first internal power transmission shaft.
    • 沉积设备包括可围绕中心轴线旋转的圆顶; 围绕圆顶上的中心轴的环链; 传递圆顶的旋转运动的动力传递轴; 将所述圆顶的旋转运动转换成所述轴的旋转运动的第一齿轮部; 第二齿轮部分,其设置有链条驱动链轮并且构造成将轴的旋转运动转换成链轮的旋转运动; 以及位于环链旁边的托盘支架,托盘保持器包括第一内部动力传递轴和保持托盘的旋转部分。 链轮通过圆顶的旋转旋转以驱动环链,托盘保持架的第一内部动力传递轴通过环链的运动而旋转,并且旋转部分通过第一内部动力传递轴的旋转而旋转 。