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    • 4. 发明申请
    • DROPLET DISCHARGE HEAD AND IMAGE FORMING APPARATUS INCORPORATING SAME
    • DROPLET放电头和图像形成装置同时进行
    • US20160236470A1
    • 2016-08-18
    • US15044311
    • 2016-02-16
    • Satoshi Mizukami
    • Satoshi Mizukami
    • B41J2/14B41J2/16
    • B41J2/14233B41J2/14201B41J2/161B41J2/1629B41J2/1631B41J2/1642B41J2/1645B41J2/1646B41J2002/14241B41J2002/14258B41J2002/14266B41J2202/03
    • A droplet discharge head includes a nozzle, a substrate, a diaphragm, and an electromechanical transducer element. The nozzle discharges droplets. The substrate includes a pressurization chamber communicated with the nozzle. The diaphragm is disposed on the substrate. The electromechanical transducer element is disposed on the diaphragm. The electromechanical transducer element includes an electromechanical transducer film, a lower electrode, and an upper electrode. The electromechanical transducer film includes a piezoelectric material. The lower electrode is disposed below the electromechanical transducer film, to apply voltage to the electromechanical transducer film. The upper electrode is disposed above the electromechanical transducer film, to apply voltage to the electromechanical transducer film. The diaphragm includes an SiO2 film, an SiN film, and a Poly-Si film laminated one on another. The diaphragm has, in a direction of lamination, a thickness of not less than 1 μm and not greater than 3 μm. The diaphragm has a deflection projecting toward the pressurization chamber with no voltage applied to the electromechanical transducer film. A radius of curvature of the deflection in a transverse direction of the diaphragm is in a range of not less than 2000 μm and not greater than 6000 μm.
    • 液滴喷射头包括喷嘴,基板,隔膜和机电换能器元件。 喷嘴排出液滴。 基板包括与喷嘴连通的加压室。 隔膜设置在基板上。 机电换能器元件设置在隔膜上。 机电换能器元件包括机电换能器膜,下电极和上电极。 机电换能器膜包括压电材料。 下部电极设置在机电换能器膜下方,以向机电换能器膜施加电压。 上电极设置在机电换能器膜上方,以向机电换能器膜施加电压。 隔膜包括层叠的SiO 2膜,SiN膜和Poly-Si膜。 隔膜在层叠方向上具有不小于1μm且不大于3μm的厚度。 隔膜具有朝向加压室突出的偏转,没有电压施加到机电换能器膜。 隔膜横向偏转的曲率半径在2000μm以上且6000μm以下的范围内。