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1. 发明授权

US07858899B2 Coaxial microwave plasma torch 有权
标题翻译：同轴微波等离子炬
公开(公告)号：US07858899B2
公开(公告)日：2010-12-28
申请号：US10594746
申请日：2005-03-25
申请人： Shuitsu Fujii , Raju Ramasamy , Takuya Urayama , Kazunari Fujioka
发明人： Shuitsu Fujii , Raju Ramasamy , Takuya Urayama , Kazunari Fujioka
IPC分类号： B23K9/02 , H05B31/26
CPC分类号： H05H1/30 , H05H1/46
摘要： A coaxial microwave plasma torch, comprising, an outside conductor (1) formed in a cylindrical shape, a cylindrical electric discharge tube (3) fixedly inserted into an axial hole (2) formed in the outside conductor on one end face (4) side, and a coaxial cable (6) having one end fitted to the other end face of the outside conductor. An antenna (9) electrically connected to an inside conductor (8) is fitted to the one end of the coaxial cable and extended into the electric discharge tube through a through-hole (11) axially passed through between the other end face (5) of the outside conductor and the bottom face of the axial hole. The outside conductor (7) of the coaxial cable is electrically connected to the outside conductor, and a gas inlet pipeline (13) supplying a gas into the electric discharge tube is fitted in the outside conductor.
摘要翻译：一种同轴微波等离子体焰炬，包括形成为圆筒形状的外部导体（1），在一个端面（4）侧固定地插入形成在外部导体中的轴向孔（2）中的圆柱形放电管（3），以及一端配合到外导体的另一端面的同轴电缆（6）。电连接到内部导体（8）的天线（9）装配到同轴电缆的一端，并通过在另一端面（5）之间轴向穿过的通孔（11）延伸到放电管中，的外部导体和轴向孔的底面。同轴电缆的外部导体（7）电连接到外部导体，并且将外部导体中的气体供应到放电管中的气体导入管道（13）。

2. 发明授权

US07514377B2 Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device 有权
标题翻译：等离子体发生器，臭氧发生器，基板加工装置及半导体装置的制造方法
公开(公告)号：US07514377B2
公开(公告)日：2009-04-07
申请号：US10539569
申请日：2003-12-26
申请人： Noriyoshi Sato , Takeshi Taniguchi , Hiroshi Mase , Shuitsu Fujii , Tamiya Fujiwara
发明人： Noriyoshi Sato , Takeshi Taniguchi , Hiroshi Mase , Shuitsu Fujii , Tamiya Fujiwara
IPC分类号： H01L21/00
CPC分类号： C01B13/11 , C01B13/115 , C01B2201/12 , H05H1/46 , H05H2001/466 , H05H2001/4682
摘要： To provide a generator capable of generating plasma and ozone with high efficiency and easy to handle, with a simple structure. An electrode part 10 is formed of electrodes 11 and 12 without dielectric material interposed therebetween. An arc-extinguishing capacitor 13 as a charge storage part for storing charge is connected in series to the electrode part 10. An AC power source 15 generating plasma by causing self-arc-extinguishing discharge between the electrodes 11 and 12 by applying AC voltage to charge and discharge the arc-extinguishing capacitor 13, is connected to both ends of a circuit in which the electrode part 10 and the arc-extinguishing capacitor 13 are connected in series. The arc-extinguishing capacitor 13 and one electrode 12 of the electrode part 10 connected thereto are unitized, for making the electrode part multi-polarized. A unit is constituted of a floating electrode serving as both of the one electrode 12 of the electrode part 10 and one electrode of the arc-extinguishing capacitor 13, an insulating material provided around the floating electrode and a grounding electrode provided around the insulating material.
摘要翻译：提供能够以简单的结构高效率且易于处理的能够产生等离子体和臭氧的发电机。电极部分10由电极11和12形成，其间没有电介质材料。作为用于存储电荷的电荷存储部分的灭弧电容器13与电极部分10串联连接。一种交流电源15，其通过在电极11和12之间施加交流电压而产生电弧而产生等离子体，将灭弧电容器13的充放电连接到电极部10和灭弧电容器13串联连接的电路的两端。将灭弧电容器13和与其连接的电极部10的一个电极12组合，用于使电极部分多极化。单元由用作电极部分10的一个电极12和灭弧电容器13的一个电极的浮动电极，设置在浮动电极周围的绝缘材料和设置在绝缘材料周围的接地电极构成。

3. 发明授权

US07683342B2 Plasma source 有权
标题翻译：等离子体源
公开(公告)号：US07683342B2
公开(公告)日：2010-03-23
申请号：US12065230
申请日：2006-09-11
申请人： Gregor Morfill , Tetsuji Shimizu , Bernd Steffes , Shuitsu Fujii
发明人： Gregor Morfill , Tetsuji Shimizu , Bernd Steffes , Shuitsu Fujii
IPC分类号： H05H1/46 , B23K9/02 , H01J27/00 , A61B18/04
CPC分类号： A61L2/0011 , A61L2/14 , A61L2202/21 , H05H1/30 , H05H1/34 , H05H2001/463
摘要： A plasma source, particularly for disinfection of wounds, comprising: an ionization chamber having an inlet for introducing a gas into the ionization chamber and further having an outlet for dispensing the ionized gas onto an object; several ionization electrodes being disposed within the ionization chamber for ionizing the gas and a predetermined ratio of the electrode-electrode distance on the one hand and the electrode-wall distance on the other hand, wherein the ratio is in a range approximately between about 1.8 and about 2.2.
摘要翻译：一种等离子体源，特别是用于消毒伤口，其包括：电离室，具有用于将气体引入电离室的入口，并且还具有用于将电离气体分配到物体上的出口; 多个电离电极设置在离子化室内，用于电离气体，另一方面电极 - 电极距离和电极壁距离的预定比例，其中该比例在约1.8和约2.2。

4. 发明申请

US20070210038A1 Coaxial Microwave Plasma Torch 有权
标题翻译：同轴微波等离子火炬
公开(公告)号：US20070210038A1
公开(公告)日：2007-09-13
申请号：US10594746
申请日：2005-03-25
申请人： Shuitsu Fujii , Raju Ramasamy , Takuya Urayama , Kazunari Fujioka
发明人： Shuitsu Fujii , Raju Ramasamy , Takuya Urayama , Kazunari Fujioka
IPC分类号： H05H1/30
CPC分类号： H05H1/30 , H05H1/46
摘要： A coaxial microwave plasma torch, comprising, an outside conductor (1) formed in a cylindrical shape, a cylindrical electric discharge tube (3) fixedly inserted into an axial hole (2) formed in the outside conductor on one end face (4) side, and a coaxial cable (6) having one end fitted to the other end face of the outside conductor. An antenna (9) electrically connected to an inside conductor (8) is fitted to the one end of the coaxial cable and extended into the electric discharge tube through a through-hole (11) axially passed through between the other end face (5) of the outside conductor and the bottom ice of the axial hole. The outside conductor (7) of the coaxial cable is electrically connected to the outside conductor, and a gas inlet pipeline (13) supplying a gas into the electric discharge tube is fitted in the outside conductor.
摘要翻译：一种同轴微波等离子体焰炬，包括形成为圆筒形状的外部导体（1），在一个端面（4）侧固定地插入形成在外部导体中的轴向孔（2）中的圆柱形放电管（3），以及一端配合到外导体的另一端面的同轴电缆（6）。电连接到内部导体（8）的天线（9）装配到同轴电缆的一端，并通过在另一端面（5）之间轴向穿过的通孔（11）延伸到放电管中，的外部导体和轴向孔的底部冰。同轴电缆的外部导体（7）电连接到外部导体，并且将外部导体中的气体供应到放电管中的气体导入管道（13）。

5. 发明授权

US6080271A Plasma source for generating inductively coupled, plate-shaped plasma, having magnetically permeable core 失效
标题翻译：用于产生电感耦合的板状等离子体的等离子体源，其具有导磁芯
公开(公告)号：US6080271A
公开(公告)日：2000-06-27
申请号：US895351
申请日：1997-07-16
申请人： Shuitsu Fujii
发明人： Shuitsu Fujii
IPC分类号： H05H1/46 , C23C16/50 , C23C16/507 , C23F4/00 , H01J37/32 , H01L21/203 , H01L21/205 , H01L21/302 , H01L21/31 , C23F1/02
CPC分类号： H01J37/321 , C23C16/507
摘要： The arrangement comprises an antenna coil disposed close to a cover 4 for a Plasma forming chamber 3 and having one side surface opposed to the chamber space of said plasma forming chamber, a magnetically permeable core 7 of ferromagnetic material whose lower surface opposed to said chamber space is formed with a groove 7a in which the conductor of said antenna coil is received, and a susceptor 16 disposed in the lower region of said chamber space for placing an object to be treated 19 thereon.
摘要翻译：该装置包括靠近用于等离子体成形室3的盖4设置的天线线圈，并且具有与所述等离子体形成室的腔室空间相对的一个侧面，铁磁材料的导磁芯7，其下表面与所述腔室空间相对形成有槽7a，所述天线线圈的导体被容纳在所述凹槽7a中，并且设置在所述腔室空间的下部区域中的基座16，用于将被处理物体19放置在其上。

6. 发明授权

US5936481A System for impedance matching and power control for apparatus for high frequency plasma treatment 失效
标题翻译：用于高频等离子体处理装置的阻抗匹配和功率控制系统
公开(公告)号：US5936481A
公开(公告)日：1999-08-10
申请号：US7428
申请日：1998-01-15
申请人： Shuitsu Fujii
发明人： Shuitsu Fujii
IPC分类号： H05H1/46 , C23C14/54 , C23C16/50 , H01L21/203 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/31 , H03H7/40
CPC分类号： H03H7/40
摘要： The invention provides an impedance matching and power control system not resorting to mechanical control for a device for high frequency plasma treatment. An impedance matching unit 14 inserted in the terminal end of a power feed line 3 extending from a high frequency power oscillator 1 to a plasma chamber 2 comprises phase detecting means 17, a load-associated detector 19 having the function of detecting voltage, current, and phase angle, and an arithmetic and output section 21, whereby the impedance matching unit delivers a frequency control signal corresponding to the detected phase and a power signal representing the consumed power of the plasma chamber as calculated from the voltage, current and phase angle. The high frequency power oscillator comprises an oscillation control section 24 for controlling the oscillation frequency thereof according to said frequency control signal, and an output control section including a summing amplifier 25 which receives an external set power signal and the detected power signal to find the difference between the two values of power, thus controlling its own output power according to the difference.
摘要翻译：本发明提供一种阻抗匹配和功率控制系统，而不是对用于高频等离子体处理的装置进行机械控制。插入从高频功率振荡器1延伸到等离子体室2的馈电线3的终端的阻抗匹配单元14包括相位检测装置17，负载相关检测器19，具有检测电压，电流，和相位角，以及算术和输出部分21，由此阻抗匹配单元输出对应于检测相位的频率控制信号和表示从电压，电流和相位角计算的等离子体室的消耗功率的功率信号。高频功率振荡器包括：振荡控制部分24，用于根据所述频率控制信号控制其振荡频率;以及输出控制部分，其包括加法放大器25，其接收外部设定功率信号和检测到的功率信号以找到差在两个功率值之间，从而根据差异控制自己的输出功率。

7. 发明申请

US20090317294A1 Method of low-temperature dry sterilization and apparatus therefor 审中-公开
标题翻译：低温干燥灭菌方法及其设备
公开(公告)号：US20090317294A1
公开(公告)日：2009-12-24
申请号：US11990975
申请日：2005-08-25
申请人： Takehiko Sato , Shuitsu Fujii , Takuya Urayama , Akinori Shida , Raju Ramasamy , Kazunari Fujioka , Tatsuyuki Nakatani
发明人： Takehiko Sato , Shuitsu Fujii , Takuya Urayama , Akinori Shida , Raju Ramasamy , Kazunari Fujioka , Tatsuyuki Nakatani
IPC分类号： A61L2/02 , A61L2/00
CPC分类号： A61L2/14 , H05H1/30 , H05H2245/1225
摘要： A method of low temperature sterilization that with the use of a compact simple apparatus, is capable of safe, unfailing sterilization. There is provided an apparatus comprising gas cylinder (gas supply source)(8), high energy particle generation part (1-3) capable of generating a gas of temperature nonequilibrium condition containing high energy particles through exciting of the gas supplied from the gas cylinder (8) and gas blow part (4) capable of jetting the gas of temperature nonequilibrium condition generated by the high energy particle generation part (1-3) over pathogenic microbes positioned outside.
摘要翻译：一种低温灭菌方法，通过使用紧凑简单的装置，能够安全，可靠地灭菌。提供了一种装置，包括气瓶（气体供给源）（8），高能粒子产生部分（1-3），能够产生含有高能粒子的温度非平衡状态的气体，该气体通过从气瓶（8）和气体吹出部分（4），其能够喷射由高能粒子产生部分（1-3）产生的温度非平衡状态的气体超过位于外部的致病微生物。

8. 发明申请

US20080237484A1 Plasma Source 有权
标题翻译：等离子源
公开(公告)号：US20080237484A1
公开(公告)日：2008-10-02
申请号：US12065230
申请日：2006-09-11
申请人： Gregor Morfill , Tetsuji Shimizu , Bernd Steffes , Shuitsu Fujii
发明人： Gregor Morfill , Tetsuji Shimizu , Bernd Steffes , Shuitsu Fujii
IPC分类号： A61B18/04 , H05H1/26
CPC分类号： A61L2/0011 , A61L2/14 , A61L2202/21 , H05H1/30 , H05H1/34 , H05H2001/463
摘要： A plasma source, particularly for disinfection of wounds, comprising: an ionization chamber having an inlet for introducing a gas into the ionization chamber and further having an outlet for dispensing the ionized gas onto an object; several ionization electrodes being disposed within the ionization chamber for ionizing the gas and a predetermined ratio of the electrode-electrode distance on the one hand and the electrode-wall distance on the other hand, wherein the ratio is in a range approximately between about 1.8 and about 2.2.
摘要翻译：一种等离子体源，特别是用于消毒伤口，其包括：电离室，具有用于将气体引入电离室的入口，并且还具有用于将电离气体分配到物体上的出口; 多个电离电极设置在离子化室内，用于电离气体，另一方面电极 - 电极距离和电极壁距离的预定比例，其中该比例在约1.8和约2.2。

9. 发明申请

US20060189168A1 Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device 有权
标题翻译：等离子体发生器，臭氧发生器，基板加工装置及半导体装置的制造方法
公开(公告)号：US20060189168A1
公开(公告)日：2006-08-24
申请号：US10539569
申请日：2003-12-26
申请人： Noriyoshi Sato , Takeshi Taniguchi , Hiroshi Mase , Shuitsu Fujii , Tarmiya Fujiwara
发明人： Noriyoshi Sato , Takeshi Taniguchi , Hiroshi Mase , Shuitsu Fujii , Tarmiya Fujiwara
IPC分类号： H01L21/306 , C23C16/00 , H01L21/324 , C23F1/00
CPC分类号： C01B13/11 , C01B13/115 , C01B2201/12 , H05H1/46 , H05H2001/466 , H05H2001/4682
摘要： To provide a generator capable of generating plasma and ozone with high efficiency and easy to handle, with a simple structure. An electrode part 10 is formed of electrodes 11 and 12 without dielectric material interposed therebetween. An arc-extinguishing capacitor 13 as a charge storage part for storing charge is connected in series to the electrode part 10. An AC power source 15 generating plasma by causing self-arc-extinguishing discharge between the electrodes 11 and 12 by applying AC voltage to charge and discharge the arc-extinguishing capacitor 13, is connected to both ends of a circuit in which the electrode part 10 and the arc-extinguishing capacitor 13 are connected in series. The arc-extinguishing capacitor 13 and one electrode 12 of the electrode part 10 connected thereto are unitized, for making the electrode part multi-polarized. A unit is constituted of a floating electrode serving as both of the one electrode 12 of the electrode part 10 and one electrode of the arc-extinguishing capacitor 13, an insulating material provided around the floating electrode and a grounding electrode provided around the insulating material.
摘要翻译：提供能够以简单的结构高效率且易于处理的能够产生等离子体和臭氧的发电机。电极部分10由电极11和12形成，其间没有电介质材料。作为用于存储电荷的电荷存储部的灭弧电容器13与电极部10串联连接。通过施加交流电压对灭弧电容器13进行充电和放电，通过在电极11和12之间引起自身的放电而产生等离子体的交流电源15连接到电极部10的电路的两端并且灭弧电容器13串联连接。将灭弧电容器13和与其连接的电极部10的一个电极12组合，用于使电极部分多极化。单元由用作电极部分10的一个电极12和灭弧电容器13的一个电极的浮动电极，设置在浮动电极周围的绝缘材料和设置在绝缘材料周围的接地电极构成。

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