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    • 1. 发明授权
    • Piezoelectric actuator
    • 压电执行器
    • US07839054B2
    • 2010-11-23
    • US11724457
    • 2007-03-15
    • Michael P. CookeChristopher A. GoatSimon R. PantenyGordon M. Reid
    • Michael P. CookeChristopher A. GoatSimon R. PantenyGordon M. Reid
    • H01L41/08
    • H01L41/0472H01L41/0833H01L41/293
    • A piezoelectric actuator comprising a stack of piezoelectric layers formed from a piezoelectric material, a plurality of internal electrodes disposed throughout the stack to define active regions of the piezoelectric material therebetween which are responsive to a voltage applied across two or more groups of the internal electrodes in use, an insulating arrangement which at least partially covers at least one surface of the stack to define a piezoelectric/insulator interface, and two or more side electrodes to connect with the two or more groups of the internal electrodes. At least one bridging arrangement extends through the insulating arrangement and comprises a conductive material, so as to provide a connection between a side electrode and an internal electrode, wherein at least one first surface, defined by an interface between the conductive material and the insulating arrangement, and at least one second surface, defined by an internal boundary of a piezoelectric layer, are substantially continuous with one another in the vicinity of the piezoelectric/insulator interface.
    • 一种压电致动器,包括由压电材料形成的压电层的叠层,设置在整个堆叠中的多个内部电极,以限定其间的压电材料的有源区,其响应于施加在两组或更多组内部电极上的电压 使用绝缘装置,其至少部分地覆盖堆叠的至少一个表面以限定压电/绝缘体接口,以及两个或更多个侧电极与两组或多组内部电极连接。 至少一个桥接装置延伸穿过绝缘装置并且包括导电材料,以便在侧面电极和内部电极之间提供连接,其中至少一个第一表面由导电材料和绝缘布置之间的界面限定 ,并且由压电层的内部边界限定的至少一个第二表面在压电/绝缘体界面附近彼此基本连续。
    • 3. 发明申请
    • Piezoelectric actuator
    • 压电执行器
    • US20070216265A1
    • 2007-09-20
    • US11724457
    • 2007-03-15
    • Michael P. CookeChristopher A. GoatSimon R. PantenyGordon M. Reid
    • Michael P. CookeChristopher A. GoatSimon R. PantenyGordon M. Reid
    • H01L41/083
    • H01L41/0472H01L41/0833H01L41/293
    • A piezoelectric actuator comprising a stack of piezoelectric layers formed from a piezoelectric material, a plurality of internal electrodes disposed throughout the stack to define active regions of the piezoelectric material therebetween which are responsive to a voltage applied across two or more groups of the internal electrodes in use, an insulating arrangement which at least partially covers at least one surface of the stack to define a piezoelectric/insulator interface, and two or more side electrodes to connect with the two or more groups of the internal electrodes. At least one bridging arrangement extends through the insulating arrangement and comprises a conductive material, so as to provide a connection between a side electrode and an internal electrode, wherein at least one first surface, defined by an interface between the conductive material and the insulating arrangement, and at least one second surface, defined by an internal boundary of a piezoelectric layer, are substantially continuous with one another in the vicinity of the piezoelectric/insulator interface.
    • 一种压电致动器,包括由压电材料形成的压电层的叠层,设置在整个堆叠中的多个内部电极,以限定其间的压电材料的有源区,其响应于施加在两组或更多组内部电极上的电压 使用绝缘装置,其至少部分地覆盖堆叠的至少一个表面以限定压电/绝缘体接口,以及两个或更多个侧电极与两组或多组内部电极连接。 至少一个桥接装置延伸穿过绝缘装置并且包括导电材料,以便在侧面电极和内部电极之间提供连接,其中至少一个第一表面由导电材料和绝缘布置之间的界面限定 ,并且由压电层的内部边界限定的至少一个第二表面在压电/绝缘体界面附近彼此基本连续。