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    • 4. 发明申请
    • ELECTRO-ACOUSTIC TRANSDUCER COMPRISING A MEMS SENSOR
    • 包含MEMS传感器的电声传感器
    • US20100195864A1
    • 2010-08-05
    • US12671031
    • 2008-07-29
    • Josef LutzStefan Leitner
    • Josef LutzStefan Leitner
    • H04R1/00
    • H04R19/005H04R19/04
    • An electro-acoustic transducer (1) is disclosed, comprising a substrate (2) that comprises conducting paths (3), a cover (4) attached to said substrate (2) thus forming an inner chamber (A) and a space (B) outside said chamber (A), wherein said cover (4) comprises one or more ports (5). A MEMS sensor (6) of said transducer (1) has at least one hole (7) extending from a first side (C) to a second side (D). A membrane (8) is arranged in said hole (7) transverse to the hole axis (E) thus forming a first hole space (a) and a second hole space (b). The sensor (6) furthermore has electrical connectors (9) designed to carry electrical signals representing sound acting on said membrane (8), which connectors (9) are connected to said conducting paths (3). According to the invention, said MEMS sensor (6) is arranged inside said chamber (A) in such a way that said second hole space (b) is connected to said outside space (B) via said port or ports (5) and said first hole space (a) is connected to said inner chamber (A).
    • 公开了一种电声换能器(1),其包括基板(2),其包括导电路径(3),附接到所述基板(2)的盖(4),从而形成内室(A)和空间(B ),其中所述盖(4)包括一个或多个端口(5)。 所述换能器(1)的MEMS传感器(6)具有从第一侧(C)延伸到第二侧(D)的至少一个孔(7)。 在所述孔(7)中横向于孔轴线(E)布置膜(8),从而形成第一孔空间(a)和第二孔空间(b)。 传感器(6)还具有电连接器(9),其被设计成承载表示作用在所述膜(8)上的声音的电信号,该连接器(9)连接到所述导电路径(3)。 根据本发明,所述MEMS传感器(6)以所述第二孔空间(b)经由所述端口(5)连接到所述外部空间(B)的方式布置在所述室(A)内,并且所述 第一孔空间(a)连接到所述内室(A)。
    • 5. 发明授权
    • Electro-acoustic transducer comprising a MEMS sensor
    • 包含MEMS传感器的电声换能器
    • US08526665B2
    • 2013-09-03
    • US12671031
    • 2008-07-29
    • Josef LutzStefan Leitner
    • Josef LutzStefan Leitner
    • H04R1/00
    • H04R19/005H04R19/04
    • An electro-acoustic transducer (1) is disclosed, comprising a substrate (2) that comprises conducting paths (3), a cover (4) attached to said substrate (2) thus forming an inner chamber (A) and a space (B) outside said chamber (A), wherein said cover (4) comprises one or more ports (5). A MEMS sensor (6) of said transducer (1) has at least one hole (7) extending from a first side (C) to a second side (D). A membrane (8) is arranged in said hole (7) transverse to the hole axis (E) thus forming a first hole space (a) and a second hole space (b). The sensor (6) furthermore has electrical connectors (9) designed to carry electrical signals representing sound acting on said membrane (8), which connectors (9) are connected to said conducting paths (3). According to the invention, said MEMS sensor (6) is arranged inside said chamber (A) in such a way that said second hole space (b) is connected to said outside space (B) via said port or ports (5) and said first hole space (a) is connected to said inner chamber (A).
    • 公开了一种电声换能器(1),其包括基板(2),其包括导电路径(3),附接到所述基板(2)的盖(4),从而形成内室(A)和空间(B ),其中所述盖(4)包括一个或多个端口(5)。 所述换能器(1)的MEMS传感器(6)具有从第一侧(C)延伸到第二侧(D)的至少一个孔(7)。 在所述孔(7)中横向于孔轴线(E)布置膜(8),从而形成第一孔空间(a)和第二孔空间(b)。 传感器(6)还具有电连接器(9),其被设计成承载表示作用在所述膜(8)上的声音的电信号,该连接器(9)连接到所述导电路径(3)。 根据本发明,所述MEMS传感器(6)以所述第二孔空间(b)经由所述端口(5)连接到所述外部空间(B)的方式布置在所述室(A)内,并且所述 第一孔空间(a)连接到所述内室(A)。