专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20170221194A1 SYSTEM FOR ACTINIC INSPECTION OF SEMICONDUCTOR MASKS 审中-公开
公开(公告)号：US20170221194A1
公开(公告)日：2017-08-03
申请号：US15423239
申请日：2017-02-02
申请人： Steven M. Ebstein
发明人： Steven M. Ebstein
IPC分类号： G06T7/00 , G02B21/00 , G01N21/956 , H01S3/09 , G02B5/18
CPC分类号： G01N21/956 , G01N2021/95676 , G02B5/1876 , G02B21/0016 , G03F1/84
摘要： An apparatus and method are disclosed for actinic inspection of semiconductor masks intended for extended ultraviolet (EUV) lithography, or similar objects, with feature sizes less than 100 nm. The approach uses a coherent light source with wavelength less than 120 nm. Inside a vacuum system, an optical system directs the light to an object, i.e., the mask or mask blank, and directs the resulting reflected or transmitted light to an imaging sensor. A computational system processes the imaging sensor data to generate phase and amplitude images of the object. The preferred imaging modality, a form of digital holography, produces images of buried structures and phase objects, as well as amplitude or reflectance images, with nanometer resolution less than or equal to the feature size of the mask.

2. 发明授权

US08325339B2 Applications of laser-processed substrate for molecular diagnostics 有权
标题翻译：激光加工基板用于分子诊断的应用
公开(公告)号：US08325339B2
公开(公告)日：2012-12-04
申请号：US13135197
申请日：2011-06-28
申请人： Steven M. Ebstein
发明人： Steven M. Ebstein
IPC分类号： G01J3/44
CPC分类号： G01N21/658 , B01L3/5023 , B01L3/5027 , B01L3/5088 , B01L2200/12 , B01L2300/165 , B81B1/006 , B81C1/00206 , B82Y15/00 , B82Y30/00
摘要： A method for performing a diagnostic assay of an analyte, wherein the method comprises providing a base that has been structured using laser processing so as to provide a substrate with at least one patterned surface, wherein the laser processing comprises the selective application of pulsed laser energy to the base, whereby to melt a surface layer of the base which resolidifies, whereby to create the at least one patterned surface; applying a metal to the at least one patterned surface so as to provide at least one metalized patterned surface; positioning the analyte on the at least one metalized patterned surface; and performing a diagnostic assay of the analyte; wherein the metal comprises a metal film.
摘要翻译：一种用于执行分析物的诊断测定的方法，其中所述方法包括提供已经使用激光处理构造的基底，以便为基底提供至少一个图案化表面，其中所述激光处理包括选择性地施加脉冲激光能量从而使基体的表面层熔融，从而形成至少一个图案化的表面; 将金属施加到所述至少一个图案化表面，以便提供至少一个金属化图案化表面; 将分析物定位在至少一个金属化图案化表面上; 并进行分析物的诊断测定; 其中所述金属包括金属膜。

3. 发明申请

US20100165336A1 Applications of laser-processed substrate for molecular diagnostics 有权
标题翻译：激光加工基板用于分子诊断的应用
公开(公告)号：US20100165336A1
公开(公告)日：2010-07-01
申请号：US12584574
申请日：2009-09-08
申请人： Steven M. Ebstein
发明人： Steven M. Ebstein
IPC分类号： G01J3/44 , G01N21/01
CPC分类号： G01N21/658 , B01L3/5023 , B01L3/5027 , B01L3/5088 , B01L2200/12 , B01L2300/165 , B81B1/006 , B81C1/00206 , B82Y15/00 , B82Y30/00
摘要： Surface enhanced Raman Scattering (SERS) and related modalities offer greatly enhanced sensitivity and selectivity for detection of molecular species through the excitation of plasmon modes and their coupling to molecular vibrational modes. One of the chief obstacles to widespread application is the availability of suitable nanostructured materials that exhibit strong enhancement of Raman scattering, are inexpensive to fabricate, and are reproducible. I describe nanostructured surfaces for SERS and other photonic sensing that use semiconductor and metal surfaces fabricated using femtosecond laser processing. A noble metal film (e.g., silver or gold) is evaporated onto the resulting nanostructured surfaces for use as a substrate for SERS. These surfaces are inexpensive to produce and can have their statistical properties precisely tailored by varying the laser processing. Surfaces can be readily micropatterned and both stochastic and self-organized structures can be fabricated. This material has application to a variety of genomic, proteomic, and biosensing applications including label free applications including binding detection. Using this material, monolithic or arrayed substrates can be designed. Substrates for cell culture and microlabs incorporating microfluidics and electrochemical processing can be fabricated as well. Laser processing can be used to form channels in the substrate or a material sandwiched onto it in order to introduce reagents and drive chemical reactions. The substrate can be fabricated so application of an electric potential enables separation of materials by electrophoresis or electro-osmosis.
摘要翻译：表面增强拉曼散射（SERS）和相关模式通过激发等离子体模式及其与分子振动模式的耦合，为分子物质的检测提供了极大的增强的灵敏度和选择性。广泛应用的主要障碍之一是具有显示拉曼散射强烈增强的合适的纳米结构材料的可用性，制造成本低且可再现。我描述了使用飞秒激光加工制造的半导体和金属表面的SERS和其他光子传感的纳米结构表面。将贵金属膜（例如银或金）蒸发到所得的纳米结构表面上，用作SERS的底物。这些表面生产成本便宜，并且可以通过改变激光加工来精确地调整其统计特性。表面可以容易地微图案化，并且可以制造随机和自组织结构。该材料可应用于各种基因组，蛋白质组学和生物传感应用，包括无标签应用，包括结合检测。使用这种材料，可以设计单片或阵列基板。也可以制造用于细胞培养的底物和结合微流体学和电化学处理的微生物。激光加工可用于在基材中形成通道或夹在其上的材料以引入试剂并驱动化学反应。可以制造衬底，因此施加电势可以通过电泳或电渗透分离材料。

4. 发明申请

US20090279085A1 LASER-PROCESSED SUBSTRATE FOR MOLECULAR DIAGNOSTICS 有权
标题翻译：激光加工基质用于分子诊断
公开(公告)号：US20090279085A1
公开(公告)日：2009-11-12
申请号：US12430599
申请日：2009-04-27
申请人： Steven M. Ebstein
发明人： Steven M. Ebstein
IPC分类号： G01J3/44
CPC分类号： B01L3/502753 , B01L3/5023 , B01L3/5027 , B01L3/5088 , B01L2200/12 , B01L2300/165 , B01L2400/0418 , B01L2400/0421 , B01L2400/086 , B82Y15/00 , B82Y30/00 , G01N21/658
摘要： Surface enhanced Raman Scattering (SERS) and related modalities offer greatly enhanced sensitivity and selectivity for detection of molecular species through the excitation of plasmon modes and their coupling to molecular vibrational modes. One of the chief obstacles to widespread application is the availability of suitable nanostructured materials that exhibit strong enhancement of Raman scattering, are inexpensive to fabricate, and are reproducible. I describe nanostructured surfaces for SERS and other photonic sensing that use semiconductor and metal surfaces fabricated using femtosecond laser processing. A noble metal film (e.g., silver or gold) is evaporated onto the resulting nanostructured surfaces for use as a substrate for SERS. These surfaces are inexpensive to produce and can have their statistical properties precisely tailored by varying the laser processing. Surfaces can be readily micropatterned and both stochastic and self-organized structures can be fabricated. This material has application to a variety of genomic, proteomic, and biosensing applications including label free applications including binding detection. Using this material, monolithic or arrayed substrates can be designed. Substrates for cell culture and microlabs incorporating microfluidics and electrochemical processing can be fabricated as well. Laser processing can be used to form channels in the substrate or a material sandwiched onto it in order to introduce reagents and drive chemical reactions. The substrate can be fabricated so application of an electric potential enables separation of materials by electrophoresis or electro-osmosis.
摘要翻译：表面增强拉曼散射（SERS）和相关模式通过激发等离子体模式及其与分子振动模式的耦合，为分子物质的检测提供了极大的增强的灵敏度和选择性。广泛应用的主要障碍之一是具有显示拉曼散射强烈增强的合适的纳米结构材料的可用性，制造成本低且可再现。我描述了使用飞秒激光加工制造的半导体和金属表面的SERS和其他光子传感的纳米结构表面。将贵金属膜（例如银或金）蒸发到所得的纳米结构表面上，用作SERS的底物。这些表面生产成本便宜，并且可以通过改变激光加工来精确地调整其统计特性。表面可以容易地微图案化，并且可以制造随机和自组织结构。该材料可应用于各种基因组，蛋白质组学和生物传感应用，包括无标签应用，包括结合检测。使用这种材料，可以设计单片或阵列基板。也可以制造用于细胞培养的底物和结合微流体学和电化学处理的微生物。激光加工可用于在基材中形成通道或夹在其上的材料以引入试剂并驱动化学反应。可以制造衬底，因此施加电势可以通过电泳或电渗透分离材料。

5. 发明申请

US20190331611A1 SYSTEM FOR ACTINIC INSPECTION OF SEMICONDUCTOR MASKS 审中-公开
公开(公告)号：US20190331611A1
公开(公告)日：2019-10-31
申请号：US16506241
申请日：2019-07-09
申请人： Steven M. Ebstein
发明人： Steven M. Ebstein
IPC分类号： G01N21/95 , H04N5/225 , G02B21/00
摘要： An apparatus and method are disclosed for actinic inspection of semiconductor masks intended for extended ultraviolet (EUV) lithography, or similar objects, with feature sizes less than 100 nm. The approach uses a coherent light source with wavelength less than 120 nm. Inside a vacuum system, an optical system directs the light to an object, i.e., the mask or mask blank, and directs the resulting reflected or transmitted light to an imaging sensor. A computational system processes the imaging sensor data to generate phase and amplitude images of the object. The preferred imaging modality, a form of digital holography, produces images of buried structures and phase objects, as well as amplitude or reflectance images, with nanometer resolution less than or equal to the feature size of the mask.

6. 发明授权

US09958402B2 Dosimetric scintillating screen detector for charged particle radiotherapy quality assurance (QA) 有权
公开(公告)号：US09958402B2
公开(公告)日：2018-05-01
申请号：US13775325
申请日：2013-02-25
申请人： Steven M. Ebstein
发明人： Steven M. Ebstein
IPC分类号： G01J1/00 , G01N23/04 , A61N5/10
CPC分类号： G01N23/04 , A61N5/1075 , A61N2005/1076
摘要： An apparatus and method are provided for performing Quality Assurance of complex beams of penetrating radiation inside a patient. A detector with a transverse scintillating screen images the radiation inside a tissue phantom with high spatial resolution. The scintillator is comprised of a mixture of two or more scintillators emitting different spectra of light and having different characteristic responses as a function of the beam LET value. The optics relaying the scintillation output have variable transmission with wavelength, further shaping the spectrum of light transmitted to the imaging sensor which also has spectrally varying sensitivity. Parameters of the scintillator construction, the optics, and the imaging sensor are chosen so the output of the composite detector is proportional to a characteristic of the input beam, for example the dose deposited as a function of depth inside the tissue phantom.

7. 发明授权

US07969570B2 Applications of laser-processed substrate for molecular diagnostics 有权
标题翻译：激光加工基板用于分子诊断的应用
公开(公告)号：US07969570B2
公开(公告)日：2011-06-28
申请号：US12584574
申请日：2009-09-08
申请人： Steven M. Ebstein
发明人： Steven M. Ebstein
IPC分类号： G01J3/44
CPC分类号： G01N21/658 , B01L3/5023 , B01L3/5027 , B01L3/5088 , B01L2200/12 , B01L2300/165 , B81B1/006 , B81C1/00206 , B82Y15/00 , B82Y30/00
摘要： A method for performing a diagnostic assay of an analyte, wherein the method comprises providing a base that has been structured using laser processing so as to provide a substrate with at least one patterned surface, wherein the laser processing comprises the selective application of pulsed laser energy to the base, whereby to melt a surface layer of the base which resolidifies, whereby to create the at least one patterned surface; applying a metal to the at least one patterned surface so as to provide at least one metalized patterned surface; positioning the analyte on the at least one metalized patterned surface; and performing a diagnostic assay of the analyte.
摘要翻译：一种用于执行分析物的诊断测定的方法，其中所述方法包括提供已经使用激光处理构造的基底，以便为基底提供至少一个图案化表面，其中所述激光处理包括选择性地施加脉冲激光能量从而使基体的表面层熔融，从而形成至少一个图案化的表面; 将金属施加到所述至少一个图案化表面，以便提供至少一个金属化图案化表面; 将分析物定位在至少一个金属化图案化表面上; 并进行分析物的诊断测定。

8. 发明申请

US20150071408A1 DOSIMETRIC SCINTILLATING SCREEN DETECTOR FOR CHARGED PARTICLE RADIOTHERAPY QUALITY ASSURANCE 审中-公开
标题翻译：用于充电颗粒放射性质量保证的数字扫描屏幕检测器
公开(公告)号：US20150071408A1
公开(公告)日：2015-03-12
申请号：US14528079
申请日：2014-10-30
申请人： Steven M. Ebstein
发明人： Steven M. Ebstein
IPC分类号： A61N5/10
CPC分类号： A61N5/1075 , A61N2005/1076
摘要： An apparatus and method are provided for performing Quality Assurance of complex beams of penetrating radiation inside a patient. A detector with a transverse scintillating screen images the radiation inside a tissue phantom with high spatial resolution. The scintillator is comprised of a mixture of two or more scintillators emitting different spectra of light and having different characteristic responses as a function of the beam LET value. The optics relaying the scintillation output have variable transmission with wavelength, further shaping the spectrum of light transmitted to the imaging sensor which also has spectrally varying sensitivity. Parameters of the scintillator construction, the optics, and the imaging sensor are chosen so the output of the composite detector is proportional to a characteristic of the input beam, for example the dose deposited as a function of depth inside the tissue phantom.
摘要翻译：提供了一种用于执行患者内的复杂的穿透辐射束的质量保证的装置和方法。具有横向闪烁屏幕的检测器以高空间分辨率对组织体模内的辐射进行成像。闪烁体由两个或更多个闪烁体的混合物组成，其发射不同光谱并且具有作为束LET值的函数的不同特征响应。中继闪烁输出的光学器件具有波长可变的透射率，进一步使传输到成像传感器的光谱形成光谱变化的灵敏度。选择闪烁体结构，光学器件和成像传感器的参数，使得复合检测器的输出与输入光束的特性成比例，例如作为组织体模内部深度的函数沉积的剂量。

9. 发明授权

US10346964B2 System for actinic inspection of semiconductor masks 有权
公开(公告)号：US10346964B2
公开(公告)日：2019-07-09
申请号：US15423239
申请日：2017-02-02
申请人： Steven M. Ebstein
发明人： Steven M. Ebstein
IPC分类号： G06T7/00 , H01S3/09 , G02B5/18 , G01N21/956 , G02B21/00
摘要： An apparatus and method are disclosed for actinic inspection of semiconductor masks intended for extended ultraviolet (EUV) lithography, or similar objects, with feature sizes less than 100 nm. The approach uses a coherent light source with wavelength less than 120 nm. Inside a vacuum system, an optical system directs the light to an object, i.e., the mask or mask blank, and directs the resulting reflected or transmitted light to an imaging sensor. A computational system processes the imaging sensor data to generate phase and amplitude images of the object. The preferred imaging modality, a form of digital holography, produces images of buried structures and phase objects, as well as amplitude or reflectance images, with nanometer resolution less than or equal to the feature size of the mask.

10. 发明授权

US08184284B2 Laser-processed substrate for molecular diagnostics 有权
标题翻译：用于分子诊断的激光加工基板
公开(公告)号：US08184284B2
公开(公告)日：2012-05-22
申请号：US12430599
申请日：2009-04-27
申请人： Steven M. Ebstein
发明人： Steven M. Ebstein
IPC分类号： G01J3/44
CPC分类号： B01L3/502753 , B01L3/5023 , B01L3/5027 , B01L3/5088 , B01L2200/12 , B01L2300/165 , B01L2400/0418 , B01L2400/0421 , B01L2400/086 , B82Y15/00 , B82Y30/00 , G01N21/658
摘要： Apparatus for use in performing a diagnostic assay of an analyte, the apparatus comprising a base that has been structured using laser processing so as to provide at least one patterned surface by melting and resolidification of the base, wherein the patterned surface is characterized by structures ranging in scale from 10 to 2000 nanometers and further wherein the pattern is stochastic in all three spatial dimensions; and a metal applied to the at least one patterned surface so as to provide at least one metalized patterned surface.
摘要翻译：用于执行分析物的诊断测定的装置，所述装置包括已经使用激光处理构造的基底，以便通过熔化和重新固定基底来提供至少一个图案化表面，其中所述图案化表面的特征在于结构范围尺度为10至2000纳米，并且其中图案在所有三个空间维度上是随机的; 以及施加到所述至少一个图案化表面的金属，以便提供至少一个金属化图案化表面。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式