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    • 2. 发明授权
    • Capacitive gas sensor and method of fabricating the same
    • 电容式气体传感器及其制造方法
    • US07816681B2
    • 2010-10-19
    • US12502824
    • 2009-07-14
    • Jaehyun MoonSu Jae LeeJin Ah ParkTae Hyoung Zyung
    • Jaehyun MoonSu Jae LeeJin Ah ParkTae Hyoung Zyung
    • H01L21/28H01L29/22
    • G01N27/227Y10S977/921
    • A capacitive gas sensor and a method of fabricating the same are provided. The capacitive gas sensor includes an insulating substrate, a metal electrode and a micro thin-film heater wire integrally formed on the same plane of the insulating substrate, and an oxide detection layer coated on the metal electrode and the micro thin-film heater wire. The fabrication method includes depositing a metal layer on an insulating substrate, etching the metal layer so that a metal electrode and a micro thin-film heater wire form an interdigital transducer on the same plane, and forming a nano crystal complex oxide thin film or a complex oxide nano fiber coating layer on the metal electrode and the micro thin-film heater wire as a detecting layer. The capacitive gas sensor can be easily fabricated and can have excellent characteristics such as high sensitivity, high selectivity, high stability, and low power consumption.
    • 提供了一种电容式气体传感器及其制造方法。 电容性气体传感器包括绝缘基板,金属电极和整体形成在绝缘基板的同一平面上的微薄膜加热丝,以及涂覆在金属电极和微薄膜加热丝上的氧化物检测层。 该制造方法包括在绝缘基板上沉积金属层,蚀刻金属层,使得金属电极和微薄膜加热丝线在同一平面上形成叉指式换能器,并形成纳米晶体复合氧化物薄膜或 金属电极上的复合氧化物纳米纤维涂层和微薄膜加热丝作为检测层。 电容气体传感器可以容易地制造,并且可以具有优异的特性,例如高灵敏度,高选择性,高稳定性和低功耗。
    • 9. 发明申请
    • CAPACITIVE GAS SENSOR AND METHOD OF FABRICATING THE SAME
    • 电容式气体传感器及其制造方法
    • US20100133528A1
    • 2010-06-03
    • US12502824
    • 2009-07-14
    • Jaehyun MOONSu Jae LeeJin Ah ParkTae Hyoung Zyung
    • Jaehyun MOONSu Jae LeeJin Ah ParkTae Hyoung Zyung
    • H01L29/22H01L21/28
    • G01N27/227Y10S977/921
    • A capacitive gas sensor and a method of fabricating the same are provided. The capacitive gas sensor includes an insulating substrate, a metal electrode and a micro thin-film heater wire integrally formed on the same plane of the insulating substrate, and an oxide detection layer coated on the metal electrode and the micro thin-film heater wire. The fabrication method includes depositing a metal layer on an insulating substrate, etching the metal layer so that a metal electrode and a micro thin-film heater wire form an interdigital transducer on the same plane, and forming a nano crystal complex oxide thin film or a complex oxide nano fiber coating layer on the metal electrode and the micro thin-film heater wire as a detecting layer. The capacitive gas sensor can be easily fabricated and can have excellent characteristics such as high sensitivity, high selectivity, high stability, and low power consumption.
    • 提供了一种电容式气体传感器及其制造方法。 电容性气体传感器包括绝缘基板,金属电极和整体形成在绝缘基板的同一平面上的微薄膜加热丝,以及涂覆在金属电极和微薄膜加热丝上的氧化物检测层。 该制造方法包括在绝缘基板上沉积金属层,蚀刻金属层,使得金属电极和微薄膜加热丝线在同一平面上形成叉指式换能器,并形成纳米晶体复合氧化物薄膜或 金属电极上的复合氧化物纳米纤维涂层和微薄膜加热丝作为检测层。 电容气体传感器可以容易地制造,并且可以具有优异的特性,例如高灵敏度,高选择性,高稳定性和低功耗。