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    • 3. 发明授权
    • Apparatus for measuring electric characteristics of semiconductor
    • 用于测量半导体电气特性的装置
    • US07573271B2
    • 2009-08-11
    • US11661219
    • 2005-08-25
    • Toshiyuki SamejimaHajime Watakabe
    • Toshiyuki SamejimaHajime Watakabe
    • G01R31/00G01R31/302
    • G01R31/2648H02S50/10
    • An apparatus for measuring electric characteristics of a semiconductor includes a light irradiating means for irradiating light to a characteristic measured semiconductor, an alternating-current voltage source, an electric potential measuring means and an impedance regulator wherein impedance is regulated by an impedance regulator in such a manner that electric potential at an electric potential measuring point of the characteristic measured semiconductor may become zero electric potential in the state in which light is not irradiated on the characteristic measured semiconductor by the light irradiating means. Electric characteristics of the characteristic measured semiconductor are measured based on measurement of electric potential obtained with or without irradiation of light onto the characteristic measured semiconductor. With this arrangement, semiconductor electric characteristics can be measured with high accuracy by a simple arrangement.
    • 用于测量半导体的电特性的装置包括用于将光照射到特性测量半导体的光照射装置,交流电压源,电位测量装置和阻抗调节器,其中阻抗由这样的阻抗调节器调节 在光照射装置不对特征测量半导体照射光的状态下,特性测量半导体的电位测量点的电位可能变为零电位。 基于特性测量半导体的光照射光电位的测定,测定特性测量半导体的电特性。 利用这种布置,可以通过简单的布置以高精度测量半导体电特性。
    • 5. 发明授权
    • Method of manufacturing LCD apparatus by using halftone exposure method
    • 使用半色调曝光方法制造LCD设备的方法
    • US07602456B2
    • 2009-10-13
    • US11749190
    • 2007-05-16
    • Sakae TanakaToshiyuki Samejima
    • Sakae TanakaToshiyuki Samejima
    • G02F1/136
    • G02F1/13458G02F2001/136236H01L27/124H01L27/1288
    • The present invention discloses a method of manufacturing a super large wide-angle super high-speed response LCD apparatus by using a photolithographic process for three times. The invention adopts a halftone exposure technology and a nitrogen ion doped technology to form a gate electrode, a common electrode, a pixel electrode and a contact pad, and then uses the halftone exposure technology to form a silicon (Si) island and a contact hole, and a general exposure technology to form a source electrode, a drain electrode and an alignment control electrode. A P-CVD apparatus is provided for forming a passivation layer into a film by using a masking deposition method, or an ink-jet coating method is used to coat a protective layer at a partial area, and a photolithographic process is performed for three times to manufacture a TFT matrix substrate of the super large wide-angle super high-speed response LCD.
    • 本发明公开了通过使用光刻工艺三次制造超大型广角超高速响应LCD装置的方法。 本发明采用半色调曝光技术和氮离子掺杂技术形成栅电极,公共电极,像素电极和接触焊盘,然后使用半色调曝光技术形成硅(Si)岛和接触孔 以及形成源电极,漏电极和取向控制电极的一般曝光技术。 提供了一种P-CVD装置,用于通过使用掩模沉积方法将钝化层形成为膜,或者使用喷墨涂覆法在部分区域上涂覆保护层,并且进行光刻处理三次 制造超大型广角超高速液晶显示器的TFT矩阵基板。