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    • 2. 发明授权
    • Manufacturing method for an integrated semiconductor structure
    • 集成半导体结构的制造方法
    • US07361974B2
    • 2008-04-22
    • US11388234
    • 2006-03-23
    • Werner Graf
    • Werner Graf
    • H01L21/4763
    • H01L21/76897H01L21/76802H01L21/76829H01L27/105H01L27/1052H01L27/10888H01L27/10894
    • The present invention provides a manufacturing method for an integrated semiconductor structure comprising the steps of: providing a semiconductor substrate having a plurality of gate stacks in a first region and at least one gate stack in a second region; forming a sacrificial plug made of a first material surrounded by an isolation layer between two adjacent gate stacks in the first region; depositing a planarisation layer over said plurality of gate stacks in said first region and said at least one gate stack in said second region; backpolishing said planarisation layer such that the upper surface of said sacrificial plug is exposed; forming a structured hardmask layer made of said first material on said backpolished planarisation layer which structured hardmask layer adjoins said sacrificial plug and has at least one opening in said second region; forming at least one contact hole in said second region under said at least one opening in said second region, said at least one contact hole exposing a substrate contact area adjacent to said gate stack in said second region or a contact area in said gate stack; selectively removing said hardmask layer and said sacrificial plug in a single etch step, whereby another contact hole is formed between two adjacent gate stacks in said first region; removing said isolation layer on the bottom of said another contact hole such that the substrate is exposed; and filling said contact hole and said another contact hole with a respective contact plug.
    • 本发明提供了一种用于集成半导体结构的制造方法,包括以下步骤:提供在第一区域中具有多个栅极叠层的半导体衬底和在第二区域中的至少一个栅极叠层; 形成由在所述第一区域中的两个相邻栅极叠层之间的隔离层围绕的第一材料制成的牺牲插塞; 在所述第一区域中的所述多个栅极堆叠上沉积平面化层,并且在所述第二区域中沉积所述至少一个栅极堆叠; 抛光所述平面化层,使得所述牺牲塞的上表面露出; 在所述后抛光平面化层上形成由所述第一材料制成的结构化硬掩模层,所述结构化硬掩模层与所述牺牲塞邻接,并且在所述第二区域中具有至少一个开口; 在所述第二区域的所述至少一个开口下方的所述第二区域内形成至少一个接触孔,所述至少一个接触孔暴露在所述第二区域中的所述栅极堆叠附近的衬底接触区域或所述栅极叠层中的接触区域; 在单个蚀刻步骤中选择性地去除所述硬掩模层和所述牺牲塞,由此在所述第一区域中的两个相邻的栅叠层之间形成另一个接触孔; 去除所述另一个接触孔的底部上的所述隔离层,使得所述衬底露出; 以及用相应的接触插塞填充所述接触孔和所述另一个接触孔。
    • 3. 发明申请
    • Manufacturing method for an integrated semiconductor structure
    • 集成半导体结构的制造方法
    • US20070224810A1
    • 2007-09-27
    • US11388234
    • 2006-03-23
    • Werner Graf
    • Werner Graf
    • H01L21/44
    • H01L21/76897H01L21/76802H01L21/76829H01L27/105H01L27/1052H01L27/10888H01L27/10894
    • The present invention provides a manufacturing method for an integrated semiconductor structure comprising the steps of: providing a semiconductor substrate having a plurality of gate stacks in a first region and at least one gate stack in a second region; forming a sacrificial plug made of a first material surrounded by an isolation layer between two adjacent gate stacks in the first region; depositing a polarization layer over said plurality of gate stacks in said first region and said at least one gate stack in said second region; backpolishing said polarization layer such that the upper surface of said sacrificial plug is exposed; forming a structured hardmask layer made of said first material on said backpolished polarization layer which structured hardmask layer adjoins said sacrificial plug and has at least one opening in said second region; forming at least one contact hole in said second region under said at least one opening in said second region, said at least one contact hole exposing a substrate contact area adjacent to said gate stack in said second region or a contact area in said gate stack; selectively removing said hardmask layer and said sacrificial plug in a single etch step, whereby another contact hole is formed between two adjacent gate stacks in said first region; removing said isolation layer on the bottom of said another contact hole such that the substrate is exposed; and filling said contact hole and said another contact hole with a respective contact plug.
    • 本发明提供了一种用于集成半导体结构的制造方法,包括以下步骤:提供在第一区域中具有多个栅极叠层的半导体衬底和在第二区域中的至少一个栅极叠层; 形成由在所述第一区域中的两个相邻栅极叠层之间的隔离层围绕的第一材料制成的牺牲插塞; 在所述第一区域中的所述多个栅极堆叠上沉积偏振层,并在所述第二区域中沉积所述至少一个栅极堆叠; 反向抛光所述偏振层,使得所述牺牲塞的上表面露出; 在所述后抛光偏振层上形成由所述第一材料制成的结构化硬掩模层,所述结构化硬掩模层与所述牺牲插塞相邻,并且在所述第二区域中具有至少一个开口; 在所述第二区域的所述至少一个开口下方的所述第二区域内形成至少一个接触孔,所述至少一个接触孔暴露在所述第二区域中的所述栅极堆叠附近的衬底接触区域或所述栅极叠层中的接触区域; 在单个蚀刻步骤中选择性地去除所述硬掩模层和所述牺牲塞,由此在所述第一区域中的两个相邻的栅叠层之间形成另一个接触孔; 去除所述另一个接触孔的底部上的所述隔离层,使得所述衬底露出; 以及用相应的接触插塞填充所述接触孔和所述另一个接触孔。
    • 5. 发明申请
    • Method for fabricating a first contact hole plane in a memory module
    • 用于在存储器模块中制造第一接触孔平面的方法
    • US20060148227A1
    • 2006-07-06
    • US11115385
    • 2005-04-27
    • Matthias KronkeJoachim PatzerWerner Graf
    • Matthias KronkeJoachim PatzerWerner Graf
    • H01L21/4763
    • H01L21/76897H01L21/76802H01L21/76831H01L27/10888H01L27/10894
    • A silicon dioxide layer is formed and a mask layer is deposited and then patterned to produce openings in the mask layer in the region around the gate contacts onto the gate electrode tracks in the logic region. The surface is uncovered around the gate contacts to the gate electrode tracks in the logic region, reducing the silicon dioxide layer. A sacrificial layer covering the gate electrode tracks is formed and patterned to form sacrificial layer blocks above the contact openings for the bit line contacts between the mutually adjacent gate electrode tracks in the cell array region and above the contact openings for the substrate contacts to the semiconductor surface and the gate contacts onto the gate electrode tracks in the logic region. A filling layer is formed between the sacrificial layer blocks, and the sacrificial layer blocks are removed. The contact opening regions are filled with conductive material.
    • 形成二氧化硅层,并且沉积掩模层,然后图案化以在栅极接触周围的区域中的掩模层中产生在逻辑区域中的栅电极轨道上的开口。 围绕逻辑区域中的栅极电极的栅极触点周围没有表面,减少了二氧化硅层。 覆盖栅极电极轨迹的牺牲层被形成并图案化以在接触开口上方形成用于电池阵列区域中相互相邻的栅极电极轨道之间的位线接触和用于衬底接触半导体的接触开口之上的位线接触的牺牲层块 表面,并且栅极接触逻辑区域中的栅极电极轨迹。 在牺牲层块之间形成填充层,去除牺牲层块。 接触开口区域填充有导电材料。
    • 6. 发明申请
    • Method for producing a semiconductor structure
    • 半导体结构的制造方法
    • US20060141756A1
    • 2006-06-29
    • US11282432
    • 2005-11-18
    • Werner GrafLars HeineckJana Horst
    • Werner GrafLars HeineckJana Horst
    • H01L21/331H01L21/265
    • H01L27/105H01L27/1052
    • In a method for producing a semiconductor structure a semiconductor a substrate with a top surface is provided. A gate dielectric layer is provided on the top surface and on the gate dielectric layer is provided a memory cell array region with a first plurality of gate stacks and a peripheral element region with a second plurality of gate stacks. A dielectric layer is provided over the memory cell array region and the peripheral element region. A first source/drain implantation over the memory cell array region and the peripheral element region is carried out, a blocking mask over the memory cell array region is formed, the dielectric layer is removed using the blocking mask, and a second source/drain implantation over the memory cell array region and the peripheral element region is carried out, wherein the memory cell array region is protected by a mask.
    • 在制造半导体结构的方法中,提供了具有顶表面的衬底的半导体。 栅极电介质层设置在顶表面上,并且在栅极介电层上提供有具有第一多个栅极堆叠的存储单元阵列区域和具有第二多个栅极堆叠的外围元件区域。 在存储单元阵列区域和外围元件区域上提供介电层。 执行存储单元阵列区域和外围元件区域上的第一源极/漏极注入,形成存储单元阵列区域上的阻挡掩模,使用阻挡掩模去除电介质层,并且使用第二源极/漏极注入 在存储单元阵列区域和外围元件区域上进行,其中存储单元阵列区域被掩模保护。