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1. 发明申请

US20090059344A1 MICROMIRROR DEVICE 审中-公开
标题翻译： MICROMIRROR设备
公开(公告)号：US20090059344A1
公开(公告)日：2009-03-05
申请号：US12181934
申请日：2008-07-29
申请人： Cornel MARXER , Peter Herbst , Michael Zickar , Wilfried Noell
发明人： Cornel MARXER , Peter Herbst , Michael Zickar , Wilfried Noell
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A micromirror device (21) comprises an electrostatically actuable micromirror (25) and also a frame (27) and a base (9). The micromirror (25) is cardanically suspended in the base (9) via the frame (27) in that it is connected to the frame (27) via two articulated joints and the frame (27) is connected to the base (9) via two further articulated joints. In this way, the micromirror (25) can be actuated by application of an electrical voltage to correspondingly positioned electrodes, that is to say that one or both of the rotation axes defined by the two pairs of articulated joints are pivoted. The micromirror is then suspended in such a way that the two articulated joints defining one of the two rotation axes each comprise a torsion spring and the other two articulated joints defining the other of the two rotation axes each comprise a bending spring.
摘要翻译：微反射镜装置（21）包括静电致动微镜（25）以及框架（27）和基座（9）。微镜（25）通过框架（27）主要悬挂在基座（9）中，因为它通过两个铰接接头连接到框架（27），并且框架（27）经由两个铰接接头。以这种方式，可以通过将电压施加到相应定位的电极来致动微镜（25），也就是说由两对铰接接头所限定的一个或两个旋转轴线枢转。然后以这样一种方式悬挂微镜，使得限定两个旋转轴中的一个的两个关节接头各自包括扭转弹簧，并且限定两个旋转轴中的另一个的另一个铰接接头各自包括弯曲弹簧。

2. 发明申请

US20070297041A1 MOVABLE LENS BEAM STEERER 失效
标题翻译：可移动镜头光束转向器
公开(公告)号：US20070297041A1
公开(公告)日：2007-12-27
申请号：US11851971
申请日：2007-09-07
申请人： Marc Epitaux , Wilfried Noell , Yves Petremand , Nicolaas-F. De Rooij
发明人： Marc Epitaux , Wilfried Noell , Yves Petremand , Nicolaas-F. De Rooij
IPC分类号： G02F1/29
CPC分类号： G02B7/005 , G02B6/4204 , G02B6/4226 , G02B26/0875
摘要： Embodiments of a system are described herein, and include a controller, and an optoelectronic module coupled to the controller. The optoelectronic module has a substrate, and a stage having a lens. An electromechanical subsystem is coupled to the substrate and to the stage, to hold the stage in a suspended manner over the substrate, and is adapted to move and lock in place the stage to position the lens to steer a light beam, responsive to control signals. A network interface module comprises the optoelectronic module.
摘要翻译：本文描述了系统的实施例，并且包括耦合到控制器的控制器和光电模块。光电子模块具有基板和具有透镜的台。机电子系统耦合到基板和平台，以将悬挂的平台保持在基板上方，并且适于移动和锁定载物台，以便根据控制信号来调整透镜以引导光束。网络接口模块包括光电子模块。

3. 发明授权

US08717531B2 Mirror for guiding a radiation bundle 有权
标题翻译：用于引导辐射束的镜子
公开(公告)号：US08717531B2
公开(公告)日：2014-05-06
申请号：US12707783
申请日：2010-02-18
申请人： Severin Waldis , Florian Bach , Daniel Benz , Armin Werber , Wilfried Noell , Dirk Heinrich Ehm , Stefan Wiesner , Dieter Kraus
发明人： Severin Waldis , Florian Bach , Daniel Benz , Armin Werber , Wilfried Noell , Dirk Heinrich Ehm , Stefan Wiesner , Dieter Kraus
IPC分类号： G03B27/52
CPC分类号： G02B7/1815 , G02B5/0808 , G02B5/0891 , G03F7/70825 , G03F7/70891
摘要： A mirror serves for guiding a radiation bundle. The mirror has a basic body and a coating of a reflective surface of the basic body, the coating increasing the reflectivity of the mirror. A heat dissipating device serves for dissipating heat deposited in the coating. The heat dissipating device has at least one Peltier element. The coating is applied directly on the Peltier element. A temperature setting apparatus has at least one temperature sensor for a temperature of the reflective surface. A regulating device of the Temperature setting apparatus can be connected to the at least one Peltier element and is signal-connected to the at least one temperature sensor. The result is a mirror in which a heat dissipating capacity of the heat dissipating device is improved.
摘要翻译：反射镜用于引导辐射束。反射镜具有基体和基体的反射表面的涂层，涂层增加了反射镜的反射率。散热装置用于消散沉积在涂层中的热量。散热装置具有至少一个珀耳帖元件。涂层直接施加在珀耳帖元件上。温度设定装置具有至少一个用于反射表面的温度的温度传感器。温度设定装置的调节装置可以连接到至少一个珀耳帖元件，并且与至少一个温度传感器信号连接。结果是提供了散热装置的散热能力的反射镜。

4. 发明申请

US20120044474A1 OPTICAL MODULE FOR GUIDING A RADIATION BEAM 审中-公开
标题翻译：用于引导辐射束的光学模块
公开(公告)号：US20120044474A1
公开(公告)日：2012-02-23
申请号：US13075929
申请日：2011-03-30
申请人： Markus Hauf , Severin Waldis , Wilfried Noell , Yves Petremend , Marco Jassman , Lothar Kulzer , Caglar Ataman
发明人： Markus Hauf , Severin Waldis , Wilfried Noell , Yves Petremend , Marco Jassman , Lothar Kulzer , Caglar Ataman
IPC分类号： G03B27/54 , G03B27/32 , G02B7/182
CPC分类号： G03F7/7015 , G02B7/1815 , G02B26/0816 , G02B26/0833 , G03F7/70075 , G03F7/70116 , G03F7/70291 , G03F7/70891
摘要： An optical module is used to guide an EUV radiation beam. The optical module has a chamber that can be evacuated and at least one mirror accommodated in the chamber. The mirror has a plurality of individual mirrors, the reflection faces of which complement one another to form an overall mirror reflection face. A support structure is in each case mechanically connected via a thermally conductive portion to a mirror body of the respective individual mirror. At least some of the mirror bodies have an associated actuator for the predetermined displacement of the mirror body relative to the support structure in at least one degree of freedom. The thermally conductive portions are configured to dissipate a thermal power density of at least 1 kW/m2 absorbed by the mirror bodies to the support structure. In one aspect of the optical module, an integrated electronic displacement circuit is associated with each of the displaceable individual mirrors in spatial proximity, and a central control device has a signal connection with the integrated electronic displacement circuits of the displaceable individual mirrors. The result is an optical module, with which an illumination optical system can be constructed, which, even with a non-negligible thermal load on the individual mirrors, ensures a high EUV radiation throughput.
摘要翻译：光学模块用于引导EUV辐射束。光学模块具有能够抽真空的腔室和容纳在腔室中的至少一个反射镜。反射镜具有多个单独的反射镜，其反射面相互补充以形成整体的镜面反射面。在每种情况下，支撑结构通过导热部分机械连接到各个反射镜的镜体。至少一些镜体具有相关联的致动器，用于在至少一个自由度中相对于支撑结构预定位移镜体。导热部分被配置为将由镜体吸收的至少1kW / m 2的热功率密度消散到支撑结构。在光学模块的一个方面，集成电子位移电路与空间接近的每个可移动的独立反射镜相关联，并且中央控制装置具有与可移动的各个反射镜的集成电子位移电路的信号连接。结果是可以构造照明光学系统的光学模块，其甚至在各个反射镜上具有不可忽视的热负载，确保高的EUV辐射通量。

5. 发明授权

US07575369B2 Assembly element including two series of elastic structures and timepiece fitted with the same 有权
标题翻译：组装元件包括两个系列的弹性结构和配有其的钟表
公开(公告)号：US07575369B2
公开(公告)日：2009-08-18
申请号：US11937789
申请日：2007-11-09
申请人： Roland Bitterli , Wilfried Noell , Fabien Blondeau , Lionel Paratte , Toralf Scharf , Pierre-André Meister , André Zanetta
发明人： Roland Bitterli , Wilfried Noell , Fabien Blondeau , Lionel Paratte , Toralf Scharf , Pierre-André Meister , André Zanetta
IPC分类号： G04B29/00 , G04B31/00
CPC分类号： G04B19/042 , G04B13/022 , G04D3/0046
摘要： Assembly element (18) made in a plate of brittle material, including an aperture (32) provided for the axial insertion of an arbour (26). The inner wall (33) of the aperture (32) includes elastic structures (34), which are etched into the plate and which each include at least one support surface (36) for gripping the arbour (26) radially in order to secure the assembly element (18) relative to the arbour (26). The assembly element (18) includes a first series (S1) of elastic structures (34) etched in a top layer (39) of the plate and a second series (S2) of elastic structures (34) etched in a bottom layer (41) of the plate.A timepiece may be fitted with this assembly element.
摘要翻译：制成在易碎材料板中的组装元件（18），包括设置用于心轴（26）的轴向插入的孔（32）。孔（32）的内壁（33）包括弹性结构（34），其被蚀刻到板中，并且每个包括至少一个用于径向夹持心轴（26）的支撑表面（36），以便固定组件元件（18）相对于心轴（26）。组装元件（18）包括蚀刻在板的顶层（39）中的弹性结构（34）的第一系列（S1）和蚀刻在底层（41）中的弹性结构（34）的第二系列（S2））的板。一个钟表可以装配这个装配元件。

6. 发明授权

US07447119B2 Drive module comprising an MEMS micromotor, process for the production of this module and timepiece fitted with this module 有权
标题翻译：驱动模块包括MEMS微电机，用于生产该模块的过程和配有该模块的钟表
公开(公告)号：US07447119B2
公开(公告)日：2008-11-04
申请号：US11939166
申请日：2007-11-13
申请人： Lionel Paratte , André Zanetta , Pierre-André Meister , Yves Petremand , Nicolas Golay , Fabien Blondeau , Wilfried Noell
发明人： Lionel Paratte , André Zanetta , Pierre-André Meister , Yves Petremand , Nicolas Golay , Fabien Blondeau , Wilfried Noell
IPC分类号： G04F5/00 , G04B19/02 , H02N1/00 , H02K5/00
CPC分类号： G04C3/12 , H02N1/008 , Y10T29/49579 , Y10T74/1503
摘要： The invention proposes a drive module intended to engage with a clock wheel having a plate made of crystalline or amorphous material comprising a lower layer, which forms a substrate, and an upper layer, into which an MEMS type of micromotor is etched, wherein the micromotor has at least one actuator rotatably driving a rotor, characterized in that a pinion arranged coaxially to the rotor is rotatably connected to the rotor and disposed above the rotor, said pinion being provided to engage with the clock wheel in an engagement zone located close to an outer peripheral edge of the plate, that the rotor is disposed on the plate in order to minimize the distance between the outer peripheral edge of the rotor and the outer peripheral edge of the plate corresponding to the engagement zone, and that the diameter of the pinion is larger than that of the rotor so as to protrude relative to the plate into the engagement zone.The invention also proposes a process for the production of this module and a timepiece comprising such a module.
摘要翻译：本发明提出了一种驱动模块，其旨在与具有由晶体或非晶材料制成的板的钟轮接合，所述板由形成基板的下层和上层，MEMS型微电机被蚀刻到其中，其中，微电机具有可转动地驱动转子的至少一个致动器，其特征在于，与所述转子同轴布置的小齿轮可旋转地连接到所述转子并且设置在所述转子上方，所述小齿轮设置成与所述钟轮接合在位于接近板的外周边缘，转子设置在板上，以便最小化转子的外周缘与对应于接合区的板的外周边缘之间的距离，并且小齿轮的直径大于转子的角度，以便相对于板突出到接合区域中。本发明还提出了一种用于生产该模块的方法和包括这种模块的钟表。

7. 发明授权

US07438465B2 Assembly element including two superposed strip shaped elastic structures and timepiece fitted with the same 有权
标题翻译：组装元件包括两个叠置的带状弹性结构和配有其的钟表
公开(公告)号：US07438465B2
公开(公告)日：2008-10-21
申请号：US11937738
申请日：2007-11-09
申请人： Roland Bitterli , Wilfried Noell , Fabien Blondeau , Lionel Paratte , Toralf Scharf , Pierre-André Meister , André Zanetta
发明人： Roland Bitterli , Wilfried Noell , Fabien Blondeau , Lionel Paratte , Toralf Scharf , Pierre-André Meister , André Zanetta
IPC分类号： G04B29/00 , G04B31/00 , F16H49/00
CPC分类号： G04B19/042 , G04B13/021 , G04D3/0046 , Y10T74/19 , Y10T428/24273
摘要： Assembly element (18) made in a plate of brittle material, including an aperture (32) provided for the axial insertion of an arbour (26), the inner wall (33) of the aperture (32) including elastic structures (34), which are etched into the plate to grip the arbour (26) radially. Each elastic structure (34) includes a first rectilinear elastic strip (L1) which extends along a tangential direction relative to the arbour (26). According to the invention, each elastic structure (34) is formed by a radial stack of several parallel elastic strips.
摘要翻译：包括脆性材料板的组装元件（18），包括设置用于心轴（26）的轴向插入的孔（32），所述孔（32）的内壁（33）包括弹性结构（34），其被蚀刻到板中以径向地夹持心轴（26）。每个弹性结构（34）包括沿着相对于心轴（26）的切线方向延伸的第一直线弹性带（L1'）。根据本发明，每个弹性结构（34）由几个平行的弹性带的径向叠层形成。

8. 发明申请

US20100261120A1 MIRROR FOR GUIDING A RADIATION BUNDLE 有权
标题翻译：用于指导辐射器的镜子
公开(公告)号：US20100261120A1
公开(公告)日：2010-10-14
申请号：US12707783
申请日：2010-02-18
申请人： Severin Waldis , Florian Bach , Daniel Benz , Armin Werber , Wilfried Noell , Dirk Heinrich Ehm , Stefan Wiesner , Dieter Kraus
发明人： Severin Waldis , Florian Bach , Daniel Benz , Armin Werber , Wilfried Noell , Dirk Heinrich Ehm , Stefan Wiesner , Dieter Kraus
IPC分类号： G03F7/20 , G03B27/72 , G02B7/192
CPC分类号： G02B7/1815 , G02B5/0808 , G02B5/0891 , G03F7/70825 , G03F7/70891
摘要： A mirror serves for guiding a radiation bundle. The mirror has a basic body and a coating of a reflective surface of the basic body, the coating increasing the reflectivity of the mirror. A heat dissipating device serves for dissipating heat deposited in the coating. The heat dissipating device has at least one Peltier element. The coating is applied directly on the Peltier element. A temperature setting apparatus has at least one temperature sensor for a temperature of the reflective surface. A regulating device of the Temperature setting apparatus can be connected to the at least one Peltier element and is signal-connected to the at least one temperature sensor. The result is a mirror in which a heat dissipating capacity of the heat dissipating device is improved.
摘要翻译：反射镜用于引导辐射束。反射镜具有基体和基体的反射表面的涂层，涂层增加了反射镜的反射率。散热装置用于消散沉积在涂层中的热量。散热装置具有至少一个珀耳帖元件。涂层直接施加在珀耳帖元件上。温度设定装置具有至少一个用于反射表面的温度的温度传感器。温度设定装置的调节装置可以连接到至少一个珀耳帖元件，并且与至少一个温度传感器信号连接。结果是提供了散热装置的散热能力的反射镜。

9. 发明申请

US20080303781A1 Shutter Device For Pixel Element and Pixel Arrangement 审中-公开
标题翻译：用于像素元素和像素排列的快门设备
公开(公告)号：US20080303781A1
公开(公告)日：2008-12-11
申请号：US11816286
申请日：2006-02-17
申请人： Juan Manuel Teijido , Wilfried Noell , Michael Zickar , Nicolaas F. De Rooij
发明人： Juan Manuel Teijido , Wilfried Noell , Michael Zickar , Nicolaas F. De Rooij
IPC分类号： G09G3/34
CPC分类号： H04N5/2254 , H04N5/7416
摘要： A micro electromechanical shutter device and a pixel arrangement in which respective shutter elements are configured to controllably take a first geometrical state open and a second geometrical state closed by different degrees of actuation, and wherein the first geometrical state of the shutter element is configured to correspond to a non-actuated rest state of the shutter element.
摘要翻译：微机电快门装置和像素装置，其中相应的快门元件被配置为可控制地采取不同程度的致动闭合的第一几何状态和第二几何状态，并且其中快门元件的第一几何状态被配置为对应到快门元件的非致动静止状态。

10. 发明申请

US20080204879A1 Miniature Lamellar Grating Interferometer Based on Silicon Technology 审中-公开
标题翻译：基于硅技术的微型层状光栅干涉仪
公开(公告)号：US20080204879A1
公开(公告)日：2008-08-28
申请号：US11630872
申请日：2005-06-22
申请人： Omar Manzardo , Felix Schadelin , Hans Peter Herzig , Wilfried Noell , Nicolaas De Rooij , Steeve Buhler , Christoph Meier
发明人： Omar Manzardo , Felix Schadelin , Hans Peter Herzig , Wilfried Noell , Nicolaas De Rooij , Steeve Buhler , Christoph Meier
IPC分类号： G02B27/44
CPC分类号： G01B9/02051 , G01B9/02007 , G01J3/4532
摘要： A lamellar grating interferometer is described, in which the light beams are collimated and focused onto the grating by means of mirror 9, which at the same time serves for collecting the light reflected from the grating. In this case, the light beam of a white light source 1 is first collimated by means of first lens 2, and subsequently passed through a sample cuvette 3. The transmitted light beam is subsequentlyy focused and coupled by another lens 2 into a fibre 17. The light to this fibre 17 is subsequentlyy directed towards a mirror 9, reflected from this mirror 9 onto a grating 11, which forms part of a lamellar grating interferometer which is realised by means of a micro electro mechanical device MEMS 7, which is mounted on a MEMS holder 6, as is the fibre 17. The light reflected from this grating 11 is reflected onto the same mirror 9, and focused and coupled by this same mirror 9 into a second multimode fibre 18, which is also fastened to the holder 6. The light guided by this second multimode fibre 18 is subsequently fed into a detection device 4.
摘要翻译：描述了一种层状光栅干涉仪，其中光束被准直并通过反射镜9聚焦到光栅上，反射镜9同时用于收集从光栅反射的光。在这种情况下，白光源1的光束首先通过第一透镜2准直，然后通过样本比色杯3.透射光束随后聚焦并被另一透镜2耦合到光纤17中。到这个光纤17的光随后被引向反射镜9，反射镜9从该反射镜9反射到光栅11上，光栅11形成了薄片光栅干涉仪的一部分，该干涉仪通过微机电装置MEMS 7实现， MEMS保持器6，光纤17一样。从该光栅11反射的光被反射到相同的反射镜9上，并被该相同的反射镜9聚焦并耦合到第二多模光纤18中，第二多模光纤18也被固定到保持器6 由第二多模光纤18引导的光随后被馈送到检测装置4中。

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