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1. 发明申请

US20120003748A1 Chemical Ionization Reaction or Proton Transfer Reaction Mass Spectrometry 失效
标题翻译：化学电离反应或质子转移反应质谱法
公开(公告)号：US20120003748A1
公开(公告)日：2012-01-05
申请号：US12026799
申请日：2008-02-06
申请人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： G01N33/00
CPC分类号： G01N27/62 , G01N33/497 , H01J49/105 , Y10T436/24
摘要： A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.
摘要翻译：描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。试剂离子进入诸如漂移室的室以与流体样品相互作用。电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子种类的质量和峰值强度值。

2. 发明申请

US20110204265A1 Laser-Driven Light Source 有权
标题翻译：激光光源
公开(公告)号：US20110204265A1
公开(公告)日：2011-08-25
申请号：US13099823
申请日：2011-05-03
申请人： Donald K. Smith , William M. Holber , Jeffrey A. Casey
发明人： Donald K. Smith , William M. Holber , Jeffrey A. Casey
IPC分类号： H05B31/26
CPC分类号： H01J65/04 , B82Y10/00 , G03F7/70033 , H05B41/382 , H05G2/001 , H05G2/003 , H05G2/008 , Y02B20/204
摘要： An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.
摘要翻译：一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。

3. 发明申请

US20090032740A1 LASER-DRIVEN LIGHT SOURCE 有权
标题翻译：激光驱动的光源
公开(公告)号：US20090032740A1
公开(公告)日：2009-02-05
申请号：US12166918
申请日：2008-07-02
申请人： Donald K. Smith , William M. Holber , Jeffrey A. Casey
发明人： Donald K. Smith , William M. Holber , Jeffrey A. Casey
IPC分类号： G01J1/00 , G01J3/10
CPC分类号： H01J65/04 , B82Y10/00 , G03F7/70033 , H05B41/382 , H05G2/001 , H05G2/003 , H05G2/008 , Y02B20/204
摘要： An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.
摘要翻译：一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。

4. 发明授权

US06552296B2 Toroidal low-field reactive gas source 有权
公开(公告)号：US06552296B2
公开(公告)日：2003-04-22
申请号：US09953763
申请日：2001-09-17
申请人： Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
发明人： Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
IPC分类号： B23K1000
CPC分类号： H01J37/32009 , H01J27/16 , H01J37/321 , H01J37/32357 , H01J37/32862
摘要： An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.

5. 发明授权

US5625259A Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube 失效
标题翻译：微波等离子体施加器，其中包括微波透明放电管的螺旋流体冷却通道
公开(公告)号：US5625259A
公开(公告)日：1997-04-29
申请号：US389243
申请日：1995-02-16
申请人： William M. Holber , Donald K. Smith , Matthew M. Besen , Matthew P. Fitzner , Eric J. Georgelis
发明人： William M. Holber , Donald K. Smith , Matthew M. Besen , Matthew P. Fitzner , Eric J. Georgelis
IPC分类号： H05H1/28 , H05H1/46
CPC分类号： H05H1/46 , H05H1/28
摘要： A fluid-cooled plasma applicator for microwave absorbing fluids is described. The applicator includes a discharge tube substantially transparent to microwave energy and a cooling member surrounding the tube defining a channel and a medium. The channel is formed along an inner surface of the member and it encircles an outer surface of the tube for transporting a microwave absorbing cooling fluid over the outer surface of the tube. The medium adjacent to the channel allows an electric field to enter the tube and sustain a plasma in the tube while the fluid is flowing through the channel.
摘要翻译：描述了用于微波吸收流体的流体冷却等离子体施加器。施加器包括对微波能量基本上透明的放电管和围绕限定通道和介质的管的冷却构件。通道沿着构件的内表面形成，并且其环绕管的外表面，用于将微波吸收冷却流体输送到管的外表面上。与通道相邻的介质允许电场进入管并且在流体流过通道时在管中维持等离子体。

6. 发明授权

US5568015A Fluid-cooled dielectric window for a plasma system 失效
标题翻译：用于等离子体系统的流体冷却介质窗
公开(公告)号：US5568015A
公开(公告)日：1996-10-22
申请号：US389250
申请日：1995-02-16
申请人： William M. Holber , Donald K. Smith , Matthew M. Besen , Matthew P. Fitzner , Eric J. Georgelis
发明人： William M. Holber , Donald K. Smith , Matthew M. Besen , Matthew P. Fitzner , Eric J. Georgelis
IPC分类号： H05H1/28 , H05H1/46 , H01P1/08 , H05H1/34
CPC分类号： H05H1/46 , H05H1/28
摘要： A fluid-cooled dielectric window for a microwave plasma system which uses microwave absorbing fluids is described. The window includes a dielectric window and a cooling member in contact with an outer surface of the window which defines a channel and a medium adjacent to the channel. The channel transports a microwave absorbing cooling fluid over the outer surface of the window. The medium allows an electric field to enter through the window and sustain a plasma in a chamber while the fluid is flowing through the channel.
摘要翻译：描述了一种使用微波吸收液体的微波等离子体系统的流体冷却介质窗。窗口包括介电窗口和与窗口的外表面接触的冷却构件，其限定通道和邻近通道的介质。通道将微波吸收冷却流体传送到窗口的外表面上。介质允许电场通过窗口进入并且在流体流过通道时在腔室中维持等离子体。

7. 发明授权

US5302266A Method and apparatus for filing high aspect patterns with metal 失效
标题翻译：用金属填充高方向图案的方法和装置
公开(公告)号：US5302266A
公开(公告)日：1994-04-12
申请号：US951924
申请日：1992-09-25
申请人： Henry J. Grabarz , Alfred Grill , William M. Holber , Joseph S. Logan , James T. C. Yeh
发明人： Henry J. Grabarz , Alfred Grill , William M. Holber , Joseph S. Logan , James T. C. Yeh
IPC分类号： C23C14/34 , C23C14/04 , C23C14/32 , C23C14/35 , H01J37/32 , H01L21/285 , H01L21/768 , H05H1/18
CPC分类号： C23C14/046 , C23C14/32 , C23C14/357 , H01J37/32009 , H01J37/32623 , H01J37/32678 , H01L21/76877 , H01J2237/3327
摘要： An electron cyclotron resonance plasma heating apparatus system and process in which microwave energy is transmitted directly in an axial direction through an evacuated chamber to generate energetic electrons. These energetic electrons spiral around the magnetic field lines formed by the solenoid and spiral substantially parallel to the axis. A metal atom vapor source transmits the metal atom vapor into the chamber through a housing port in the chamber wall. The metal atom vapor source in the housing is out of the line of sight of the substrate. The metal atoms are ionized by the energized electrons, and these ionized metal atoms are confined to the plasma column substantially free of neutral atoms as such ionized metal approaches and contacts the substrate in said evacuated chamber. In this way, the ionized metal atoms substantially avoid contact with the wall of chamber. A sputter target of a second metal may be placed in the plane of the substrate and a bias voltage applied to the target. Atoms of the second metal are then sputtered off and ionized by the plasma and are deposited on the substrate with the first metal ions.
摘要翻译：电子回旋共振等离子体加热装置系统和微波能量通过真空室沿轴向直接传递以产生高能电子的过程。这些高能电子围绕由螺线管形成的磁场线与螺旋线基本平行。金属原子蒸汽源通过室壁中的壳体端口将金属原子蒸气传输到室中。壳体中的金属原子蒸汽源不在衬底的视线之内。金属原子被激发电子电离，这些离子化的金属原子被限制在基本上不含中性原子的等离子体柱上，因为这样的电离金属靠近并接触所述真空室中的衬底。以这种方式，电离金属原子基本上避免与室的壁接触。可以将第二金属的溅射靶放置在基板的平面中，并将偏置电压施加到靶。然后将第二金属的原子溅射并通过等离子体离子化，并用第一金属离子沉积在基底上。

8. 发明授权

US5263776A Multi-wavelength optical thermometry 失效
标题翻译：多波长光学测温
公开(公告)号：US5263776A
公开(公告)日：1993-11-23
申请号：US951280
申请日：1992-09-25
申请人： David W. Abraham , William M. Holber , Joseph S. Logan , Hemantha K. Wickramasinghe
发明人： David W. Abraham , William M. Holber , Joseph S. Logan , Hemantha K. Wickramasinghe
IPC分类号： G01K11/00 , G01J3/427 , G01J3/45
CPC分类号： G01K11/00
摘要： Multi-wavelength optical thermometry provides for non-contact measurement of the temperature of a sample where the front surface and the back surface of the sample are used in a interferometer to measure changes in optical path length. Laser beams at two different wavelengths are used and the beam phase of the two resultant interference signals is used to unambiguously measure the path length change over a broad temperature range.
摘要翻译：多波长光学温度测量提供样品的温度的非接触式测量，其中样品的前表面和背面用于干涉仪中以测量光程长度的变化。使用两个不同波长的激光束，并且使用两个合成的干涉信号的光束相位来明确地测量在宽的温度范围内的路径长度变化。

9. 发明授权

US08779322B2 Method and apparatus for processing metal bearing gases 失效
标题翻译：处理金属轴承气体的方法和装置
公开(公告)号：US08779322B2
公开(公告)日：2014-07-15
申请号：US13336616
申请日：2011-12-23
申请人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
发明人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
IPC分类号： B23K10/00 , H01H1/34
CPC分类号： H01J37/32174 , H01J37/321
摘要： A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
摘要翻译：用于处理金属轴承气体的方法和装置涉及在等离子体室中产生环形等离子体。将金属轴承气体引入到等离子体室中以与环形等离子体反应。环形等离子体和金属承载气体之间的相互作用产生金属材料，金属氧化物材料或金属氮化物材料中的至少一种。

10. 发明申请

US20120160059A1 Method and Apparatus for Processing Metal Bearing Gases 失效
标题翻译：金属轴承气体加工方法与装置
公开(公告)号：US20120160059A1
公开(公告)日：2012-06-28
申请号：US13336616
申请日：2011-12-23
申请人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
发明人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
IPC分类号： C22B4/00 , B01J19/08
CPC分类号： H01J37/32174 , H01J37/321
摘要： A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
摘要翻译：用于处理金属轴承气体的方法和装置涉及在等离子体室中产生环形等离子体。将金属轴承气体引入到等离子体室中以与环形等离子体反应。环形等离子体和金属承载气体之间的相互作用产生金属材料，金属氧化物材料或金属氮化物材料中的至少一种。

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