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    • 1. 发明授权
    • Imaging apparatus and method
    • 成像设备及方法
    • US07804069B2
    • 2010-09-28
    • US11228353
    • 2005-09-19
    • William R. Tribe
    • William R. Tribe
    • G01J1/10G01J3/00
    • G01N21/3581
    • A method for imaging a sample, the method comprising the steps of: (a) irradiating the surface of a sample with a source of coherent substantially continuous radiation with a frequency in the range 25 GHz to 100 THz; (b) detecting said radiation reflected from or transmitted by the sample; (c) providing and detecting a probe beam having a phase related to that of the radiation leaving the source; (d) analysing the detected radiation for at least one characteristic feature within the radiation and monitoring any change in phase of such at least one feature in order to derive structural information about the sample as a function of depth from the surface of the sample.
    • 一种用于对样品进行成像的方法,所述方法包括以下步骤:(a)用频率在25GHz至100THz的频率照射具有相干基本连续辐射源的样品表面; (b)检测由样品反射或透射的所述辐射; (c)提供和检测具有与离开所述源的辐射的相位相关的相位的探针束; (d)分析用于辐射内的至少一个特征特征的检测到的辐射,并监测这种至少一个特征的任何相位变化,以便导出关于样品的结构信息作为来自样品表面的深度的函数。