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    • 5. 发明申请
    • OPTICAL MODULATOR
    • 光学调制器
    • US20110181936A1
    • 2011-07-28
    • US12938064
    • 2010-11-02
    • Yong-Chul CHOYong-Tak LEEYong-Hwa PARKByung-Hoon NAKwang-Mo PARKChang-Soo PARK
    • Yong-Chul CHOYong-Tak LEEYong-Hwa PARKByung-Hoon NAKwang-Mo PARKChang-Soo PARK
    • G02F1/017B82Y20/00
    • G02F1/017B82Y20/00G02F1/218G02F2001/0155G02F2201/307G02F2203/12
    • Optical modulator having wide bandwidth based on Fabry-Perot resonant reflection is disclosed. The optical modulator includes: a bottom Distributed Bragg Reflector (DBR) layer; a top DBR layer including at least one layer, and a modified layer; and an active layer disposed between bottom and top DBR layers, wherein the at least one layer includes at least one pair of a first refractive index layer having a first refractive index and a second refractive index layer having a second refractive index, the modified layer includes at least one pair of a third refractive index layer having a third refractive index and a fourth refractive index layer having a fourth refractive index, the third and the fourth refractive indexes being different, and at least one of the third and the fourth refractive index layers has a second optical thickness that is not λ/4 or that is not an odd multiple thereof.
    • 公开了基于法布里 - 珀罗共振反射的具有宽带宽的光调制器。 光调制器包括:底部分布布拉格反射器(DBR)层; 包括至少一个层的顶部DBR层和修饰层; 以及设置在底部和顶部DBR层之间的有源层,其中所述至少一层包括至少一对具有第一折射率的第一折射率层和具有第二折射率的第二折射率层,所述改性层包括 至少一对具有第三折射率的第三折射率层和具有第四折射率的第四折射率层,第三和第四折射率不同,并且第三和第四折射率层中的至少一个 具有不是λ/ 4的第二光学厚度,或者不是其奇数倍。
    • 6. 发明申请
    • Method of Fabricating Antireflective Grating Pattern and Method of Fabricating Optical Device Integrated with Antireflective Grating Pattern
    • 制造防反射光栅图案的方法和与抗反射光栅图案集成的光学器件的制造方法
    • US20110092007A1
    • 2011-04-21
    • US12999148
    • 2009-12-22
    • Yong Tak LeeYoung Min Song
    • Yong Tak LeeYoung Min Song
    • H01L33/44G03F7/00
    • G02B5/1857G03F7/0005
    • A method of fabricating an antireflective grating pattern and a method of fabricating an optical device integrated with an antireflective grating pattern are provided. The method of fabricating the antireflective grating pattern includes forming a photoresist (PR) pattern on a substrate using a hologram lithography process, forming a PR lens pattern having a predetermined radius of curvature by reflowing the PR pattern, and etching the entire surface of the substrate including the PR lens pattern to form a wedge-type or parabola-type antireflective subwavelength grating (SWG) pattern having a pointed tip on a top surface of the substrate. In this method, a fabrication process is simplified, the reflection of light caused by a difference in refractive index between the air and a semiconductor material can be minimized, and the antireflective grating pattern can be easily applied to optical devices.
    • 提供了制造抗反射光栅图案的方法和制造与抗反射光栅图案集成的光学器件的方法。 制造抗反射光栅图案的方法包括使用全息光刻工艺在基板上形成光致抗蚀剂(PR)图案,通过回流PR图案形成具有预定曲率半径的PR​​透镜图案,并蚀刻基板的整个表面 包括PR透镜图案以形成在基板的顶表面上具有尖尖的楔形或抛物线型抗反射亚波长光栅(SWG)图案。 在该方法中,简化了制造工艺,可以将由空气和半导体材料之间的折射率差引起的光的反射最小化,并且可以将抗反射光栅图案容易地应用于光学器件。
    • 7. 发明授权
    • Ferroelectric memory device and method of fabricating the same
    • 铁电存储器件及其制造方法
    • US06649955B2
    • 2003-11-18
    • US10199455
    • 2002-07-19
    • Yong-Tak Lee
    • Yong-Tak Lee
    • H01L31119
    • H01L27/11502H01L21/76802H01L21/76895H01L27/11507H01L28/55
    • A ferroelectric memory device and a method of fabricating the same are disclosed. Four interlayer dielectric layers are stacked on cell array and peripheral circuit regions on a semiconductor substrate. A gate contact pad and a source/drain contact pad are connected to a gate electrode and a source/drain of the peripheral circuit transistor through the first interlayer dielectric layer. A gate contact plug and a source/drain contact plug are respectively connected to the gate contact pad and the source/drain contact pad through the second interlayer dielectric layer. First via holes expose the gate contact plug and the source contact plug through the third interlayer dielectric layer. A first interconnection extends between the third and fourth interlayer dielectric layers, covering the sidewalls of the first via holes and connected to at least one of the gate contact plug and the source/drain contact plug.
    • 公开了铁电存储器件及其制造方法。 在半导体衬底上的单元阵列和外围电路区域上层叠四层电介质层。 栅极接触焊盘和源极/漏极接触焊盘通过第一层间介质层连接到外围电路晶体管的栅极电极和源极/漏极。 栅极接触插塞和源极/漏极接触插塞分别通过第二层间介质层连接到栅极接触焊盘和源极/漏极接触焊盘。 第一通孔通过第三层间介电层露出栅极接触插塞和源极接触插塞。 第一互连在第三和第四层间电介质层之间延伸,覆盖第一通孔的侧壁并连接到栅极接触插塞和源极/漏极接触插塞中的至少一个。
    • 10. 发明授权
    • Method of fabricating antireflective grating pattern and method of fabricating optical device integrated with antireflective grating pattern
    • 制造抗反射光栅图案的方法和制造与抗反射光栅图案集成的光学装置的方法
    • US08647903B2
    • 2014-02-11
    • US12999148
    • 2009-12-22
    • Yong Tak LeeYoung Min Song
    • Yong Tak LeeYoung Min Song
    • H01L21/00
    • G02B5/1857G03F7/0005
    • A method of fabricating an antireflective grating pattern and a method of fabricating an optical device integrated with an antireflective grating pattern are provided. The method of fabricating the antireflective grating pattern includes forming a photoresist (PR) pattern on a substrate using a hologram lithography process, forming a PR lens pattern having a predetermined radius of curvature by reflowing the PR pattern, and etching the entire surface of the substrate including the PR lens pattern to form a wedge-type or parabola-type antireflective subwavelength grating (SWG) pattern having a pointed tip on a top surface of the substrate. In this method, a fabrication process is simplified, the reflection of light caused by a difference in refractive index between the air and a semiconductor material can be minimized, and the antireflective grating pattern can be easily applied to optical devices.
    • 提供了制造抗反射光栅图案的方法和制造与抗反射光栅图案集成的光学器件的方法。 制造抗反射光栅图案的方法包括使用全息光刻工艺在基板上形成光致抗蚀剂(PR)图案,通过回流PR图案形成具有预定曲率半径的PR​​透镜图案,并蚀刻基板的整个表面 包括PR透镜图案以形成在基板的顶表面上具有尖尖的楔形或抛物线型抗反射亚波长光栅(SWG)图案。 在该方法中,简化了制造工艺,可以将由空气和半导体材料之间的折射率差引起的光的反射最小化,并且可以将抗反射光栅图案容易地应用于光学器件。