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    • 2. 发明申请
    • MEMBRANE MEMS ACTUATOR INCLUDING FLUIDIC IMPEDANCE STRUCTURE
    • 膜式MEMS致动器,其中包括流体阻抗结构
    • US20140307032A1
    • 2014-10-16
    • US13859804
    • 2013-04-10
    • Yonglin XieJames A. Katerberg
    • Yonglin XieJames A. Katerberg
    • B41J2/04
    • B41J2/14064B41J2202/11B41J2202/12
    • A liquid dispenser includes a first liquid chamber including a nozzle and a second liquid chamber. A flexible membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber. A heater is associated with the second liquid chamber. A liquid supply channel is in fluid communication with the second chamber. A liquid return channel is in fluid communication with the second chamber. A liquid supply provides a liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply. A fluidic impedance structure is positioned in the second liquid chamber between the heater and the liquid return channel.
    • 液体分配器包括包括喷嘴和第二液体室的第一液体室。 定位柔性膜以分离和流体密封第一液体室和第二液体室。 加热器与第二液体室相连。 液体供应通道与第二腔室流体连通。 液体返回通道与第二腔室流体连通。 液体供应提供从液体供应通过液体供应通道通过第二液体室通过液体返回通道连续流动并返回到液体供应的液体。 流体阻抗结构位于加热器和液体返回通道之间的第二液体室中。
    • 3. 发明授权
    • Corrugated membrane MEMS actuator fabrication method
    • 波纹膜MEMS致动器制造方法
    • US08835195B2
    • 2014-09-16
    • US13552721
    • 2012-07-19
    • Yonglin XieWeibin Zhang
    • Yonglin XieWeibin Zhang
    • H01L21/00
    • B41J2/1601B41J2/1607B41J2/1628B41J2/1631B41J2/1639B41J2/1645B81B2201/032B81B2201/052B81C1/00158
    • A MEMS device fabrication method includes providing a substrate and a chamber wall material layer on a first surface of the substrate, the chamber wall material layer including a chamber cavity having a sacrificial material located therein. A mask material is deposited on the chamber wall material layer and the sacrificial material and patterned to form a mask pattern including a plurality of discrete portions. The mask material and some of the sacrificial material are removed to transfer the mask pattern including the plurality of discrete portions to the sacrificial material. A membrane material layer is deposited on the chamber wall material layer and the sacrificial material that includes the transferred mask pattern including the plurality of discrete portions. Some of the substrate and the sacrificial material are removed to release the membrane material layer using at least one process initiated from a second surface of the substrate.
    • MEMS器件制造方法包括在衬底的第一表面上提供衬底和室壁材料层,室壁材料层包括具有位于其中的牺牲材料的腔室腔。 掩模材料沉积在室壁材料层和牺牲材料上并被图案化以形成包括多个离散部分的掩模图案。 去除掩模材料和一些牺牲材料以将包括多个离散部分的掩模图案转移到牺牲材料。 膜材料层沉积在室壁材料层和牺牲材料上,该牺牲材料包括包含多个离散部分的转印掩模图案。 使用从衬底的第二表面引发的至少一种工艺,去除一些衬底和牺牲材料以释放膜材料层。
    • 4. 发明授权
    • Liquid dispenser including passive pre-stressed flexible membrane
    • 液体分配器包括被动预应力柔性膜
    • US08733903B2
    • 2014-05-27
    • US13552752
    • 2012-07-19
    • Zhanjun GaoYonglin Xie
    • Zhanjun GaoYonglin Xie
    • B41J2/05
    • B41J2/14064B41J2002/14177B41J2202/12
    • A liquid dispenser includes first and second liquid chambers. The second liquid chamber is in fluid communication with liquid supply and liquid return channels. A flexible membrane separates and fluidically seals the first and second liquid chambers from each other. The flexible membrane, residing in a first position, includes a residual compressive stress that exceeds an onset buckling stress of the flexible membrane. A heater, associated with the second liquid chamber, is selectively actuated to create a pressure pulse in a liquid that causes the flexible membrane to move from the first position to a second position to eject liquid through a nozzle of the first liquid chamber. In one embodiment, a liquid supply provides liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply during a drop dispensing operation.
    • 液体分配器包括第一和第二液体室。 第二液体室与液体供应和液体返回通道流体连通。 柔性膜将第一和第二液体室彼此分离并流体密封。 位于第一位置的柔性膜包括超过柔性膜的起始屈曲应力的残余压应力。 与第二液体室相关联的加热器被选择性地致动以在液体中产生压力脉冲,其使柔性膜从第一位置移动到第二位置,以将液体喷射通过第一液体室的喷嘴。 在一个实施例中,液体供应提供液体,其在液滴分配操作期间通过液体返回通道从液体供应通过液体供应通道连续流过第二液体室并返回到液体供应。
    • 5. 发明授权
    • Membrane MEMS actuator with moving working fluid
    • 具有移动工作流体的膜MEMS致动器
    • US08727501B2
    • 2014-05-20
    • US13552735
    • 2012-07-19
    • Yonglin XieQing Yang
    • Yonglin XieQing Yang
    • B41J2/05
    • B41J2/14064B41J2002/14177
    • A liquid dispenser includes a first liquid chamber and a second liquid chamber. The first liquid chamber includes a nozzle. A liquid supply channel is in fluid communication with the second chamber. A liquid return channel is in fluid communication with the second chamber. A heater is associated with the second liquid chamber. A flexible membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber relative to each other. A liquid supply provides a liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply.
    • 液体分配器包括第一液体室和第二液体室。 第一液体室包括喷嘴。 液体供应通道与第二腔室流体连通。 液体返回通道与第二腔室流体连通。 加热器与第二液体室相连。 定位柔性膜以相对于彼此分离并流体地密封第一液体室和第二液体室。 液体供应提供从液体供应通过液体供应通道通过第二液体室通过液体返回通道连续流动并返回到液体供应的液体。
    • 6. 发明申请
    • LIQUID DISPENSER INCLUDING PASSIVE PRE-STRESSED FLEXIBLE MEMBRANE
    • 液体分配器,包括被动预应力柔性膜
    • US20140022308A1
    • 2014-01-23
    • US13552752
    • 2012-07-19
    • Zhanjun GaoYonglin Xie
    • Zhanjun GaoYonglin Xie
    • B41J2/04
    • B41J2/14064B41J2002/14177B41J2202/12
    • A liquid dispenser includes first and second liquid chambers. The second liquid chamber is in fluid communication with liquid supply and liquid return channels. A flexible membrane separates and fluidically seals the first and second liquid chambers from each other. The flexible membrane, residing in a first position, includes a residual compressive stress that exceeds an onset buckling stress of the flexible membrane. A heater, associated with the second liquid chamber, is selectively actuated to create a pressure pulse in a liquid that causes the flexible membrane to move from the first position to a second position to eject liquid through a nozzle of the first liquid chamber. In one embodiment, a liquid supply provides liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply during a drop dispensing operation.
    • 液体分配器包括第一和第二液体室。 第二液体室与液体供应和液体返回通道流体连通。 柔性膜将第一和第二液体室彼此分离并流体密封。 位于第一位置的柔性膜包括超过柔性膜的起始屈曲应力的残余压应力。 与第二液体室相关联的加热器被选择性地致动以在液体中产生压力脉冲,其使柔性膜从第一位置移动到第二位置,以将液体喷射通过第一液体室的喷嘴。 在一个实施例中,液体供应提供液体,其在液滴分配操作期间通过液体返回通道从液体供应通过液体供应通道连续流过第二液体室并返回到液体供应。
    • 7. 发明授权
    • Liquid dispenser including vertical outlet opening wall
    • 液体分配器,包括垂直出口开口壁
    • US08628180B2
    • 2014-01-14
    • US12911779
    • 2010-10-26
    • Yonglin XieQing Yang
    • Yonglin XieQing Yang
    • B41J2/18B41J2/14
    • B41J2/1404B41J2/14B41J2/18B41J2002/14403B41J2002/14475B41J2202/12
    • A liquid dispenser includes a liquid supply channel, a liquid return channel, and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. The outlet opening includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is perpendicular to the surface of the wall of the liquid dispensing channel. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
    • 液体分配器包括液体供应通道,液体返回通道和液体分配通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口。 出口开口包括相对于流过液体分配通道的液体流动方向的下游边缘。 下游边缘垂直于液体分配通道的壁的表面。 液体供应液体从液体供应通道通过液体分配通道流到液体返回通道。 分流器构件选择性地将流动的液体的一部分转过液体分配通道的出口。