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    • 1. 发明授权
    • Apparatus for detecting displacement of electromagnetic actuator
    • 用于检测电磁执行器位移的装置
    • US08773114B2
    • 2014-07-08
    • US13071832
    • 2011-03-25
    • Yoshinori HayashiAkihiko Komatsu
    • Yoshinori HayashiAkihiko Komatsu
    • G01B7/14
    • H01F7/1844G01B7/003G01D5/2046H01F7/1607H01F7/1653H01F2007/1684H01F2007/1692H01F2007/185H01F2007/1888
    • A displacement detecting apparatus of an electromagnetic actuator, including: an electromagnetic actuator including: a movable core; a drive coil which causes a displacement of the movable core; and a detection coil disposed at a position where a mutual coupling coefficient with the drive coil changes with the displacement, the actuator transmitting a drive force of the movable core to a mechanical system; a drive portion for supplying a drive current to the drive coil on the basis of a pulse width modulation signal; and a displacement detecting portion to which an output voltage of the detection coil is inputted, for outputting a displacement detection signal, wherein the displacement detecting portion includes: a sampling-signal generating portion for generating a sampling signal in synchronism with the pulse width modulation signal; and a synchronous sampling portion for outputting the displacement detection signal by sampling the output voltage in synchronism with the sampling signal.
    • 一种电磁致动器的位移检测装置,包括:电磁致动器,包括:可动芯; 驱动线圈,其使所述可动铁芯移位; 以及检测线圈,其设置在与所述驱动线圈的相互耦合系数随位移而变化的位置,所述致动器将所述可动芯的驱动力传递到机械系统; 驱动部分,用于根据脉宽调制信号向驱动线圈提供驱动电流; 以及位移检测部分,其输入检测线圈的输出电压,用于输出位移检测信号,其中位移检测部分包括:采样信号产生部分,用于产生与脉宽调制信号同步的采样信号 ; 以及同步采样部分,用于通过与采样信号同步地对输出电压进行采样来输出位移检测信号。
    • 3. 发明授权
    • Inspection device for disk-shaped substrate
    • 盘状基板检查装置
    • US08488867B2
    • 2013-07-16
    • US12738760
    • 2008-10-22
    • Yoshinori HayashiHiroshi WakabaYoko OnoKoichi MiyazonoHideki Mori
    • Yoshinori HayashiHiroshi WakabaYoko OnoKoichi MiyazonoHideki Mori
    • G06K9/00
    • H01L22/20G01N21/9503H01L22/12
    • An inspection apparatus to precisely quantitatively inspect positions of formation of film layers formed on the surface of a disk-shaped substrate. It generates captured image data expressing a captured image corresponding to a field of vie based on image signals successively output from an image capturing unit capturing an image of a predetermined surface at an outer circumference part of the disk-shaped substrate and generates film layer edge position information expressing longitudinal direction positions at corresponding positions along the circumferential direction of an edge line of a film layer image pan corresponding to the film layer on the surface image with reference to, from the captured image data, longitudinal direction positions at the different positions along the circumferential direction of a boundary line between a surface image part corresponding to the predetermined surface on the captured image and its outer image part.
    • 一种精确定量检查形成在盘状基板的表面上的膜层的形成位置的检查装置。 基于在从圆盘状基板的外周部拍摄预定面的图像的图像拍摄单元连续地输出的图像信号,生成表示对应于视野的拍摄图像的拍摄图像数据,并且生成胶片层边缘位置 参照来自拍摄图像数据的沿着沿着图像数据的不同位置的纵向位置的表面图像上对应于胶片层的胶片层图像的边缘线的圆周方向的相应位置处的纵向位置的信息, 在与捕获图像上的预定表面相对应的表面图像部分与其外部图像部分之间的边界线的圆周方向。
    • 4. 发明授权
    • Surface roughness inspection system
    • 表面粗糙度检测系统
    • US08433102B2
    • 2013-04-30
    • US12086081
    • 2006-12-05
    • Yoshinori HayashiHideki Mori
    • Yoshinori HayashiHideki Mori
    • G06K9/00
    • G01B11/303G01N21/9501
    • [Problem] To provide a surface roughness inspection system enabling suitable inspection even when the surface of the object being inspected is curved.[Means for Solution] A system having an imaging unit 20 having a line sensor 22 and scanning the surface of an object being inspected 101 in a direction perpendicular to the direction of extension of the line sensor 22 and outputting a density signal for each pixel from the line sensor 22 and a processing unit 50 processing the density signal from the line sensor 22 of the imaging unit 20, the processing unit 50 having a means for acquiring a pixel density value based on a density signal from the line sensor 22 (S2) and a density state generating means for generating a density state information Pf showing the density state in the scan direction of the object surface based on all of the pixel density values acquired for the object surface 101 being inspected (S7).
    • [问题]提供一种表面粗糙度检查系统,即使被检查物体的表面弯曲,也能够进行适当的检查。 [解决方案]具有成像单元20的系统具有线传感器22,并且在垂直于线传感器22的延伸方向的方向上扫描被检查物体101的表面,并输出每个像素的浓度信号 线传感器22和处理单元50处理来自成像单元20的线传感器22的浓度信号,处理单元50具有用于基于来自线传感器22的密度信号获取像素密度值的装置(S2) 密度状态产生装置,用于基于对被检测物体表面101获得的所有像素密度值,生成表示物体表面的扫描方向上的浓度状态的浓度状态信息Pf(S7)。
    • 5. 发明授权
    • Rotor for electric rotary machine
    • 电动旋转机转子
    • US08283833B2
    • 2012-10-09
    • US12588757
    • 2009-10-27
    • Koji KondoYoshinori Hayashi
    • Koji KondoYoshinori Hayashi
    • H02K1/28
    • H02K21/044H02K15/022Y10T29/49012
    • A rotor for an electric rotary machine and a method of manufacturing the same are disclosed wherein none of permanent magnets is fixed to a magnetic supporting segment of a magnet support ring in advance and each permanent magnet is assembled separately of the magnet support ring. Prior to the assembling of the permanent magnets, the magnet support ring is preliminarily located on claw-shaped magnetic poles at inner peripheral sides thereof under a state combined with a pair of field iron cores, after which the permanent magnets are inserted to magnet insertion spaces in longitudinal directions. The rotor includes positioning and restricting means for precluding the occurrence of positional displacement of each permanent magnet with respect to each magnet supporting segment of the magnet support ring.
    • 公开了一种用于电动旋转机械的转子及其制造方法,其中永磁体预先没有固定到磁体支撑环的磁性支撑部分上,并且每个永磁体与磁体支撑环分开组装。 在永磁体的组装之前,磁体支撑环预先位于与一对场铁芯组合的状态下的内周侧的爪形磁极上,然后将永磁体插入磁体插入空间 在纵向上。 转子包括定位和限制装置,用于排除每个永磁体相对于磁体支撑环的每个磁体支撑段的位置偏移的发生。
    • 7. 发明申请
    • OPTICAL SCANNING DEVICE AND IMAGE FORMING APPARATUS
    • 光学扫描装置和图像形成装置
    • US20120182373A1
    • 2012-07-19
    • US13349250
    • 2012-01-12
    • Yoshinori HAYASHI
    • Yoshinori HAYASHI
    • B41J2/435G02B26/08
    • B41J2/473B41J2/455G02B26/123H04N1/50
    • An optical scanning device for an image forming apparatus includes plurality light sources, a deflecting unit that deflects light beams from the light sources with a common deflecting reflection surface, a scanning optical system that guides the light beams deflected from the common deflecting reflection surface of the deflecting unit onto the optical scanning portions on stations different for each light source in order to form an optical spot with each light beam, monitoring units that monitor light intensities of the light beams from the light sources, and a splitting unit that splits each light beam into a split light beam toward one monitoring unit. The light beams enter the monitoring unit at different timings and enter the deflecting unit at different incident angles.
    • 用于图像形成装置的光学扫描装置包括多个光源,偏转单元,其以共同的偏转反射面偏转来自光源的光束;扫描光学系统,其引导从所述光源的共同偏转反射面偏转的光束 偏转单元到不同于每个光源的站上的光学扫描部分上,以便形成每个光束的光点,监视来自光源的光束的光强度的监视单元,以及分割单元,其将每个光束 朝向一个监控单元的分束光束。 光束以不同的时间进入监控单元,并以不同的入射角进入偏转单元。
    • 10. 发明授权
    • Surface inspection apparatus
    • 表面检查装置
    • US08023111B2
    • 2011-09-20
    • US12595699
    • 2008-04-25
    • Yoshinori HayashiMasao KawamuraHideki Mori
    • Yoshinori HayashiMasao KawamuraHideki Mori
    • G01N21/88
    • G01N21/9503
    • A semiconductor wafer inspection apparatus for inspecting an outer circumference edge part of a semiconductor wafer. The apparatus has a camera lens arranged facing an outer circumference edge part of a semiconductor wafer, an imaging surface arranged facing an outer circumference end face of a semiconductor wafer via the camera lens, a mirror forming an image of a first outer circumference bevel surface of the semiconductor wafer on the imaging surface via the camera lens, a mirror forming an image of a second outer circumference bevel surface of the semiconductor wafer on the imaging surface via the camera lens, a correction lens forming an image of an outer circumference end face of the semiconductor wafer on the imaging surface via the center part of the camera lens, and an illumination light guide lamp part illuminating the surfaces. With use of the apparatus the first outer circumference bevel surface and second outer circumference bevel surface become brighter compared with the outer circumference end face.
    • 一种用于检查半导体晶片的外周边缘部分的半导体晶片检查装置。 该装置具有面向半导体晶片的外周缘部的相机透镜,经由照相机透镜与半导体晶片的外周端面相对配置的摄像面,形成第一外周斜面的图像的反射镜 通过照相机镜头在成像表面上的半导体晶片,通过照相机镜头在成像表面上形成半导体晶片的第二外圆周斜面的图像的镜;校正透镜,其形成外周端面的图像 通过照相机镜头的中心部分的成像表面上的半导体晶片和照亮该表面的照明光导灯部分。 通过使用该装置,与外周端面相比,第一外周斜面和第二外圆周斜面变得更亮。