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    • 10. 发明授权
    • Semiconductor devices and methods for fabricating the same
    • 半导体器件及其制造方法
    • US08012836B2
    • 2011-09-06
    • US11528405
    • 2006-09-28
    • Kuo-Chyuan TzengJian-Yu ShenKuo-Chi TuKuo-Ching HuangChin-Yang Chang
    • Kuo-Chyuan TzengJian-Yu ShenKuo-Chi TuKuo-Ching HuangChin-Yang Chang
    • H01L27/108H01L21/8242
    • H01L27/10894
    • Semiconductor devices and methods for fabricating the same are provided. An exemplary embodiment of a semiconductor device comprises a substrate with a plurality of isolation structures formed therein, defining first and second areas over the substrate. A transistor is formed on a portion of the substrate in the first and second areas, respectively, wherein the transistor in the second area is formed with merely a pocket doping region in the substrate adjacent to a drain region thereof. A first dielectric layer is formed over the substrate, covering the transistor formed in the first and second areas. A plurality of first contact plugs is formed through the first dielectric layer, electrically connecting a source region and a drain region of the transistor in the second area, respectively. A second dielectric layer is formed over the first dielectric layer with a capacitor formed therein, wherein the capacitor electrically connects one of the first contact plugs.
    • 提供半导体器件及其制造方法。 半导体器件的示例性实施例包括在其中形成有多个隔离结构的衬底,其在衬底上限定第一和第二区域。 晶体管分别形成在第一和第二区域中的衬底的一部分上,其中第二区域中的晶体管仅在与衬底的漏极区相邻的衬底中仅形成一个凹坑掺杂区域。 第一电介质层形成在衬底上,覆盖形成在第一和第二区域中的晶体管。 通过第一介电层形成多个第一接触插塞,分别在第二区域中电连接晶体管的源极区域和漏极区域。 在第一电介质层上形成第二电介质层,其中形成有电容器,其中电容器电连接第一接触插塞之一。