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    • 6. 发明授权
    • Electrostatic actuator including a switching circuit which selectively sets one of a moving mode and first and second holding modes and driving method therefor
    • 该静电致动器包括选择性地设置移动模式和第一和第二保持模式之一的开关电路及其驱动方法
    • US07482728B2
    • 2009-01-27
    • US11233091
    • 2005-09-23
    • Akihiro KogaMasayuki SekimuraToshikatsu Akiba
    • Akihiro KogaMasayuki SekimuraToshikatsu Akiba
    • H02N1/00G02B7/04G02B7/08
    • H02N1/004H04N5/23287
    • The present invention provides an electrostatic actuator having a small power consumption and also provides a driving method thereof. The electrostatic actuator comprises first and second substrates having first and second stator electrodes formed thereon, respectively, and a movable section arranged between the first and second stator electrodes. The movable section has first and second surfaces that are positioned to face the first and second stator electrodes, respectively. In first and second moving modes, the movable section is slightly moved between the first and second substrates in response to the signal voltage from the driving circuit. Also, in the holding mode, the movable section is held by one of the first and second stator electrodes and, under this condition, at least one of the stator electrode holding the movable section and the movable section held by the stator electrode is left electrically floating.
    • 本发明提供了具有小功耗的静电致动器,并且还提供了其驱动方法。 静电致动器包括分别形成有第一和第二定子电极的第一和第二基板以及布置在第一和第二定子电极之间的可动部分。 可移动部分具有分别定位成面对第一和第二定子电极的第一和第二表面。 在第一和第二移动模式中,响应于来自驱动电路的信号电压,可移动部分在第一和第二基板之间稍微移动。 此外,在保持模式中,可移动部分由第一和第二定子电极中的一个保持,并且在该状态下,将保持可动部分的定子电极和由定子电极保持的可动部分中的至少一个保持电 浮动