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    • 1. 发明授权
    • Variable capacitance device
    • 可变电容器件
    • US09224536B2
    • 2015-12-29
    • US13568172
    • 2012-08-07
    • Akira KumadaTeruhisa ShibaharaKenji Tanaka
    • Akira KumadaTeruhisa ShibaharaKenji Tanaka
    • H01G5/00H01G7/00H01G7/06H01H57/00G01R27/26H01G5/16H03J3/20
    • H01G5/16H03J3/20H03J2200/19
    • A variable capacitance device that achieves a desired capacitance even when factors causing varied capacitances are generated is configured such that a capacitance detection pulse signal is applied from a capacitance detection signal generation unit to a driving capacitor and a reference capacitor of a MEMS mechanical unit. The device voltage of the driving capacitor based on the capacitance detection signal and a driving voltage is applied to the inverting input terminal of a comparator. The device voltage of the reference capacitor based on the capacitance detection signal and the driving voltage is applied to the non-inverting input terminal of the comparator. The comparator generates a comparison output signal including “Hi” and “Low” values from the difference between these device voltages, and applies the output signal to a driving voltage generation unit. The driving voltage generation unit increases or decreases the driving voltage based on the comparison output signal.
    • 即使产生导致变化的电容的因素,实现期望的电容的可变电容器件被配置为使得电容检测脉冲信号从电容检测信号生成单元施加到MEMS机械单元的驱动电容器和参考电容器。 基于电容检测信号的驱动电容器的器件电压和驱动电压被施加到比较器的反相输入端。 基于电容检测信号和驱动电压的参考电容器的器件电压被施加到比较器的非反相输入端。 比较器从这些器件电压之间的差产生包括“Hi”和“Low”值的比较输出信号,并将输出信号施加到驱动电压产生单元。 驱动电压产生单元根据比较输出信号来增大或减小驱动电压。
    • 2. 发明申请
    • Balanced acoustic wave filter
    • 平衡声波滤波器
    • US20060181369A1
    • 2006-08-17
    • US11354536
    • 2006-02-15
    • Teruhisa Shibahara
    • Teruhisa Shibahara
    • H03H9/64
    • H03H9/0071H03H9/0085H03H9/02748H03H9/14588
    • In an acoustic wave filter device, first and second surface acoustic wave filter sections implemented by longitudinally coupled resonators are arranged on a piezoelectric substrate. The first and second surface acoustic wave filter sections include first to third interdigital transducers and fourth to sixth interdigital transducers, respectively, arranged in a direction of propagation of surface waves. The first, third, fourth, and sixth interdigital transducers are connected to an unbalanced terminal. The second and fifth interdigital transducers are connected to first and second balanced terminals, respectively. Each of the second and fifth interdigital transducers has first and second interdigital transducer segments divided in the direction of propagation of acoustic waves. The first and second interdigital transducer segments are connected in series with each other.
    • 在声波滤波器装置中,通过纵向耦合的谐振器实现的第一和第二声表面波滤波器部分布置在压电基片上。 第一和第二表面声波滤波器部分分别包括布置在表面波传播方向上的第一至第三叉指式换能器和第四至第六叉指式换能器。 第一,第三,第四和第六叉指换能器连接到不平衡终端。 第二和第五叉指换能器分别连接到第一和第二平衡端子。 第二和第五叉指换能器中的每一个具有在声波传播方向上划分的第一和第二叉指换能器段。 第一和第二叉指换能器段彼此串联连接。
    • 4. 发明授权
    • Boundary acoustic wave filter device
    • 边界声波滤波装置
    • US07623009B2
    • 2009-11-24
    • US11951869
    • 2007-12-06
    • Hajime KandoNorihiko NakahashiTeruhisa Shibahara
    • Hajime KandoNorihiko NakahashiTeruhisa Shibahara
    • H03H9/64
    • H03H9/0222H03H9/02559
    • A boundary acoustic wave filter device capable of increasing an out-of-band attenuation includes a dielectric film formed on a piezoelectric substrate, at least one longitudinally coupled resonator boundary acoustic wave filter having a plurality of IDTs disposed along a boundary between the piezoelectric substrate and the dielectric film, and at least two one-terminal-pair boundary acoustic wave resonators. At least one boundary acoustic wave resonator is connected in series to the longitudinally coupled resonator boundary acoustic wave filter, and at least remaining one boundary acoustic wave resonator is connected in parallel to the longitudinally coupled resonator boundary acoustic wave filter. An anti-resonant frequency of the serially connected boundary acoustic wave resonator is located in a higher frequency range than a passband of the boundary acoustic wave filter device, and a resonant frequency of the parallel-connected boundary acoustic wave resonator is equal to or higher than the anti-resonant frequency of the serially connected boundary acoustic wave resonator.
    • 能够增加带外衰减的边界声波滤波器装置包括形成在压电基板上的电介质膜,至少一个纵向耦合的谐振器边界弹性波滤波器,其具有沿着压电基板与压电基板之间的边界设置的多个IDT 电介质膜和至少两个单端对对边界声波谐振器。 至少一个边界声波谐振器与纵向耦合的谐振器边界声波滤波器串联连接,并且至少剩余的一个声界面波谐振器与纵向耦合的谐振器边界声波滤波器并联连接。 串联连接的声弹性谐振器的反谐振频率位于比边界弹性波滤波器装置的通带更高的频率范围内,并联连接的声弹性谐振器的谐振频率等于或高于 串联连接的声弹性谐振器的反谐振频率。
    • 6. 发明授权
    • Balanced acoustic wave filter
    • 平衡声波滤波器
    • US07429905B2
    • 2008-09-30
    • US11759403
    • 2007-06-07
    • Teruhisa Shibahara
    • Teruhisa Shibahara
    • H03H9/64
    • H03H9/14532H03H9/0038H03H9/0071H03H9/02748H03H9/14591
    • An acoustic wave filter device includes a piezoelectric substrate and a longitudinally coupled resonator surface acoustic wave filter unit provided on the piezoelectric substrate. The surface acoustic wave filter unit includes first to fifth IDTs arranged in a surface wave propagation direction. The first, third, and fifth IDTs are connected to an unbalanced terminal, while the second and fourth IDTs are connected to first and second balanced terminals, respectively. The second IDT includes first and second sub-IDT portions obtained by dividing the second IDT and arranged in a crossing width direction, and the fourth IDT includes first and second sub-IDT portions obtained by dividing the fourth IDT and arranged in the crossing width direction. The first and second sub-IDT portions are connected in series. The first and second sub-IDT portions are also connected in series.
    • 声波滤波器装置包括设置在压电基板上的压电基板和纵向耦合的谐振器表面声波滤波器单元。 表面声波滤波器单元包括布置在表面波传播方向上的第一至第五IDT。 第一,第三和第五IDT连接到不平衡端子,而第二和第四IDT分别连接到第一和第二平衡端子。 第二IDT包括通过划分第二IDT并沿交叉宽度方向布置而获得的第一和第二子IDT部分,并且第四IDT包括通过划分第四IDT而获得的第一和第二子IDT部分,并且以交叉宽度方向 。 第一和第二子IDT部分串联连接。 第一和第二子IDT部分也是串联连接的。
    • 7. 发明授权
    • Surface acoustic wave filter with split center IDT and specific weighting and communication apparatus
    • 具有分离中心IDT和特定加权和通信装置的表面声波滤波器
    • US06853270B2
    • 2005-02-08
    • US10646287
    • 2003-08-22
    • Teruhisa Shibahara
    • Teruhisa Shibahara
    • H03H9/25H03H9/00H03H9/145H03H9/64
    • H03H9/0038H03H9/02748H03H9/14532H03H9/14547H03H9/14582H03H9/14588
    • A surface acoustic wave filter includes a first reflector, a first IDT, a second IDT, a third IDT, and a second reflector arranged in that order on a piezoelectric substrate. The first IDT and the third IDT, connected in parallel, are together also connected to an unbalanced signal terminal. The second IDT includes two separate comb-like electrodes arranged in the direction of propagation of a surface acoustic wave, and electrically connected in series to each other at a serial junction. The comb-like electrodes are respectively connected to balanced signal terminals. The outermost electrode finger of the first IDT is connected to the unbalanced signal terminal, and the outermost electrode finger of the third IDT is grounded. The first IDT only or both the first IDT and the third IDT are weighted so that the number of excitation regions of the surface acoustic wave between the second IDT and the first IDT becomes equal to the number of excitation regions of the surface acoustic wave between the second IDT and the third IDT.
    • 表面声波滤波器包括在压电基板上依次布置的第一反射器,第一IDT,第二IDT,第三IDT和第二反射器。 并联连接的第一IDT和第三IDT一起也连接到不平衡信号端子。 第二IDT包括在声表面波的传播方向上布置的两个单独的梳状电极,并且在串联连接处彼此串联电连接。 梳状电极分别连接到平衡信号端子。 第一IDT的最外面的电极指连接到不平衡信号端子,第三IDT的最外面的电极指接地。 加权第一IDT和第一IDT和第三IDT的第一IDT,使得第二IDT与第一IDT之间的表面声波的激发区域的数量等于第二IDT与第一IDT之间的声表面波的激励区域的数量 第二IDT和第三IDT。
    • 8. 发明授权
    • Process of making an acceleration detecting element
    • 制作加速度检测元件的处理
    • US06786094B2
    • 2004-09-07
    • US09846861
    • 2001-05-01
    • Yoshihiro KonakaTakahiro OguchiTeruhisa Shibahara
    • Yoshihiro KonakaTakahiro OguchiTeruhisa Shibahara
    • G01P904
    • G01C19/5719
    • A vibrator includes: a vibrating body; a driving unit for causing the vibrating body to vibrate in a predetermined vibrating direction; and a driving monitoring unit for detecting vibration displacement in a driving direction of the vibrating body. Stabilization of vibration in the driving direction of the vibrating body is achieved by applying positive feedback control to the driving unit based on the state of the vibration displacement in the driving direction of the vibrating body detected by this driving monitoring unit. The driving monitoring unit is constructed and arranged so as to be provided in a barycentric region of the vibrating body to detect the vibration displacement in the driving direction of the barycentric region of the vibrating body.
    • 振动器包括:振动体; 驱动单元,用于使振动体在预定的振动方向上振动; 以及驱动监视单元,用于检测振动体的驱动方向上的振动位移。 基于由该驱动监视单元检测到的振动体的驱动方向上的振动位移的状态,对振动体的振动的稳定化进行振动体的驱动方向的振动。 驱动监视单元被构造和布置成设置在振动体的重心区域中,以检测振动体的重心区域的驱动方向上的振动位移。
    • 9. 发明授权
    • Probe array and method of manufacturing the same
    • 探头阵列及其制造方法
    • US08110817B2
    • 2012-02-07
    • US12494736
    • 2009-06-30
    • Teruhisa Shibahara
    • Teruhisa Shibahara
    • G01J1/58
    • G01N21/6452Y10T156/10
    • A probe array includes a probe-carrying substrate and a base member. The probe-carrying substrate has first and second principal surfaces extending parallel to each other, and a plurality of probe carriers carrying probe molecules. The base member has a reference surface extending parallel to a fluorescence-receiving surface, and a seating surface supporting the probe-carrying substrate and extending in a direction other than a direction parallel to the reference surface. The probe carriers each have a plurality of surfaces forming different angles with respect to the fluorescence-receiving surface, the plurality of surfaces including a bottom surface and uprising surfaces extending from the bottom surface. Accordingly, the plurality of surfaces have different sensitivities, realizing a wide dynamic range.
    • 探针阵列包括探针承载衬底和基底构件。 探针承载衬底具有彼此平行延伸的第一和第二主表面和携带探针分子的多个探针载体。 基部构件具有平行于荧光接收表面延伸的参考表面和支撑探针承载基底并沿除了与基准表面平行的方向以外的方向延伸的座面。 探针载体各自具有相对于荧光接收表面形成不同角度的多个表面,所述多个表面包括从底表面延伸的底表面和起始表面。 因此,多个表面具有不同的灵敏度,实现了宽的动态范围。
    • 10. 发明授权
    • Acoustic wave filter device utilizing filters having different acoustic wave propagation directions
    • 使用具有不同声波传播方向的滤波器的声波滤波器装置
    • US07804384B2
    • 2010-09-28
    • US11995208
    • 2006-05-23
    • Teruhisa Shibahara
    • Teruhisa Shibahara
    • H03H9/64
    • H03H9/0076H03H9/0085H03H9/02748H03H9/02834H03H9/14594H03H9/6476
    • An acoustic wave filter device having a balanced-to-unbalanced conversion function, in which the signal balance between a pair of balanced terminals is improved, has, on a piezoelectric substrate, one end of at least one longitudinally coupled resonator type acoustic wave filter and one end of at least one second longitudinally coupled resonator type acoustic wave filter among the rest of acoustic wave filters are commonly connected and connected to an unbalanced terminal, and the other ends of the longitudinally coupled resonator type acoustic wave filters are electrically connected to first and second balanced terminals, respectively, and in which a propagation direction of an acoustic wave in the longitudinally coupled resonator type acoustic wave filter and a propagation direction of an acoustic wave in the second longitudinally coupled resonator type acoustic filter are different from each other.
    • 具有平衡不平衡转换功能的声波滤波器装置,其中改善了一对平衡端子之间的信号平衡,在压电基板上具有至少一个纵向耦合的谐振器型声波滤波器的一端和 其余的声波滤波器中的至少一个第二纵向耦合的谐振器型声波滤波器的一端共同连接并连接到不平衡端子,并且纵向耦合的谐振器型声波滤波器的另一端电连接到第一和 第二平衡端子,并且其中纵向耦合谐振器型声波滤波器中的声波的传播方向和第二纵向耦合谐振器型声学滤波器中的声波的传播方向彼此不同。