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    • 2. 发明申请
    • Rotary Evaporation Source Apparatus for OLED Evaporation
    • 用于OLED蒸发的旋转蒸发源装置
    • US20160258052A1
    • 2016-09-08
    • US14653995
    • 2014-10-11
    • BOE TECHNOLOGY GROUP CO., LTD.
    • Lu WANG
    • C23C14/24H01L51/00H01L51/56
    • C23C14/243C23C14/24H01L51/001H01L51/56
    • The present disclosure discloses a rotary evaporation source apparatus for OLED evaporation, comprising a crucible for containing evaporation material, an evaporation source body for heating the crucible, a rotary disk for rotating the crucible, and a driving source member for driving the rotary disk to rotate; wherein the evaporation source body is provided with a receiving space for receiving the crucible therein, a through hole is disposed on the rotary disk, the rotary disk is movably laid over the evaporation source body, the crucible passes through the through hole disposed on the rotary disk and is placed in the receiving space, the crucible and the rotary disk are disposed in a relatively stationary manner; the driving source member is disposed at outside of the evaporation source body and drives the rotary disk to rotate about a central axis of the evaporation source body, the crucible rotates about the central axis of the evaporation source body along with the rotary disk.
    • 本公开公开了一种用于OLED蒸发的旋转蒸发源装置,包括用于容纳蒸发材料的坩埚,用于加热坩埚的蒸发源体,用于旋转坩埚的旋转盘,以及用于驱动旋转盘旋转的驱动源部件 ; 其特征在于,所述蒸发源主体设置有容纳所述坩埚的容纳空间,所述旋转盘上设置有通孔,所述旋转盘可移动地设置在所述蒸发源体上,所述坩埚通过设置在所述旋转体 并且放置在接收空间中,坩埚和旋转盘以相对静止的方式设置; 驱动源构件设置在蒸发源体的外侧并驱动旋转盘围绕蒸发源体的中心轴线旋转,坩埚与旋转盘一起围绕蒸发源体的中心轴线旋转。
    • 3. 发明申请
    • EVAPORATION COATING APPARATUS
    • 蒸发涂装装置
    • US20160251751A1
    • 2016-09-01
    • US14768587
    • 2014-12-29
    • BOE Technology Group Co., Ltd.
    • Dejiang ZHAOLu WANGSeiji FUJINO
    • C23C14/24
    • C23C14/243C23C14/26
    • An evaporation coating apparatus comprising a heating unit (3) and a cylindrical member (1) disposed within the heating unit (3), wherein the cylindrical member (1) comprises a hollow sleeve (13) and a barrel (12) disposed at an inner side of the hollow sleeve (13) in a fitting manner; wherein a top end area of the hollow sleeve (13) is provided with a first evaporation hole (131), and an external surface of the hollow sleeve (13) is provided with an internal heater strip (4) connected to a control unit ; wherein an external surface of the barrel (12) is provided with a groove (1′) extending along an axial central line of the barrel (12), the groove (1′) is provided with a plurality of compartments (11) arranged at interval space, and each of the compartments (11) is provided with a crucible (2); wherein the crucible (2) comprises a main body (21) which is disposed within the compartment (11) and sealed all around with one side opened, and a cover (22) which is connected to the main body (21) in a fitting manner and provided with a second evaporation hole (221) corresponding to the first evaporation hole (131); and wherein the heating unit (3) has a hollow columnar structure, and an external surface of the heating unit (3) is provided with an external heater strip (5) and a nozzle (31) which is corresponding to the first evaporation hole (131). The evaporation coating apparatus is mainly configured to manufacture large-sized displays and can improve the uniformity of film-forming with organic material on the surface of the substrate.
    • 一种蒸发涂覆装置,包括加热单元(3)和设置在加热单元(3)内的圆柱形构件(1),其中圆柱形构件(1)包括中空套筒(13)和设置在加热单元 中空套筒(13)的内侧配合; 其中,所述中空套筒(13)的顶端区域设置有第一蒸发孔(131),并且所述中空套管(13)的外表面设置有连接到控制单元的内部加热条(4) 其特征在于,所述筒体(12)的外表面设置有沿所述筒体(12)的轴向中心线延伸的槽(1'),所述槽(1')设置有多个隔室(11) 间隔空间,并且每个隔室(11)设置有坩埚(2); 其特征在于,所述坩埚(2)包括主体(21),所述主体(21)设置在所述隔室(11)内并且一侧开口的全封闭,以及盖(22),其与所述主体 并且设置有与第一蒸发孔对应的第二蒸发孔(221)。 并且其中所述加热单元(3)具有中空柱状结构,并且所述加热单元(3)的外表面设置有对应于所述第一蒸发孔的外部加热条(5)和喷嘴(31) 131)。 蒸发涂布装置主要构造成制造大尺寸显示器,并且可以在基板的表面上提高有机材料的成膜均匀性。