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1. 发明授权

US09921251B2 Microfabricated calorimeter for RF power measurement 有权
公开(公告)号：US09921251B2
公开(公告)日：2018-03-20
申请号：US14185298
申请日：2014-02-20
申请人： Bird Technologies Group Inc. , The Research Foundation of the State University of New York
发明人： Joel D. Meltzer , Albert H. Titus , Bilel Neji , Jing Xu
IPC分类号： G01R21/02 , G01K17/08
CPC分类号： G01R21/02 , G01K17/08
摘要： Disclosed is a radio frequency (RF) power calorimeter having a load electrically coupled to a RF input, a variable low-frequency power source electrically coupled to the load and configured to apply low-frequency bias to the load. The RF power calorimeter includes a thermal medium thermally coupled to the load. Additionally, the RF power calorimeter includes an outlet temperature sensor thermally coupled to the thermal medium, the outlet temperature sensor being positioned to measure the temperature of the thermal medium due to heating by the load. The RF power calorimeter also has circuitry configured to use temperature measurements of the thermal medium in thermal contact with an RF load in combination with the low-frequency bias to measure average power of an RF source electrically coupled to the RF input. Also disclosed in a method of measuring RF power using the RF power calorimeter.

2. 发明申请

US20140239940A1 MICROFABRICATED CALORIMETER FOR RF POWER MEASUREMENT 有权
标题翻译：用于RF功率测量的微波加热器
公开(公告)号：US20140239940A1
公开(公告)日：2014-08-28
申请号：US14185298
申请日：2014-02-20
申请人： The Research Foundation of the State University of New York , Bird Technologies Group Inc.
发明人： Joel D. Meltzer , Albert H. Titus , Bilel Neji , Jing Xu
IPC分类号： G01R21/02
CPC分类号： G01R21/02 , G01K17/08
摘要： Disclosed is a radio frequency (RF) power calorimeter having a load electrically coupled to a RF input, a variable low-frequency power source electrically coupled to the load and configured to apply low-frequency bias to the load. The RF power calorimeter includes a thermal medium thermally coupled to the load. Additionally, the RF power calorimeter includes an outlet temperature sensor thermally coupled to the thermal medium, the outlet temperature sensor being positioned to measure the temperature of the thermal medium due to heating by the load. The RF power calorimeter also has circuitry configured to use temperature measurements of the thermal medium in thermal contact with an RF load in combination with the low-frequency bias to measure average power of an RF source electrically coupled to the RF input. Also disclosed in a method of measuring RF power using the RF power calorimeter.
摘要翻译：公开了一种具有电耦合到RF输入的负载的射频（RF）功率量热计，电耦合到负载并被配置为向负载施加低频偏置的可变低频电源。 RF功率量热计包括热耦合到负载的热介质。此外，RF功率量热计包括热耦合到热介质的出口温度传感器，出口温度传感器被定位成通过负载加热来测量热介质的温度。 RF功率量热计还具有电路，其被配置为使用与RF负载热接触的热介质的温度测量结合低频偏置来测量与RF输入电耦合的RF源的平均功率。还在使用RF功率量热计测量RF功率的方法中公开。

3. 发明授权

US10168365B2 Microfabricated calorimeter for RF power measurement 有权
公开(公告)号：US10168365B2
公开(公告)日：2019-01-01
申请号：US14769798
申请日：2014-02-20
申请人： Bird Technologies Group Inc. , The Research Foundation of the State University of New York
发明人： Joel D. Meltzer , Albert H. Titus , Bilel Neji , Jing Xu
IPC分类号： G01R21/02 , G01K17/08
摘要： Disclosed is a radio frequency (RF) power calorimeter having a load electrically coupled to a RF input, a variable low-frequency power source electrically coupled to the load and configured to apply low-frequency bias to the load. The RF power calorimeter includes a thermal medium thermally coupled to the load. Additionally, the RF power calorimeter includes an outlet temperature sensor thermally coupled to the thermal medium, the outlet temperature sensor being positioned to measure the temperature of the thermal medium due to heating by the load. The RF power calorimeter also has circuitry configured to use temperature measurements of the thermal medium in thermal contact with an RF load in combination with the low-frequency bias to measure average power of an RF source electrically coupled to the RF input. Also disclosed in a method of measuring RF power using the RF power calorimeter.

4. 发明授权

US09891251B2 Microfabricated calorimeter for RF power measurement 有权
公开(公告)号：US09891251B2
公开(公告)日：2018-02-13
申请号：US14185298
申请日：2014-02-20
申请人： Bird Technologies Group Inc. , The Research Foundation of the State University of New York
发明人： Joel D. Meltzer , Albert H. Titus , Bilel Neji , Jing Xu
IPC分类号： G01R21/02 , G01K17/08
摘要： Disclosed is a radio frequency (RF) power calorimeter having a load electrically coupled to a RF input, a variable low-frequency power source electrically coupled to the load and configured to apply low-frequency bias to the load. The RF power calorimeter includes a thermal medium thermally coupled to the load. Additionally, the RF power calorimeter includes an outlet temperature sensor thermally coupled to the thermal medium, the outlet temperature sensor being positioned to measure the temperature of the thermal medium due to heating by the load. The RF power calorimeter also has circuitry configured to use temperature measurements of the thermal medium in thermal contact with an RF load in combination with the low-frequency bias to measure average power of an RF source electrically coupled to the RF input. Also disclosed in a method of measuring RF power using the RF power calorimeter.

5. 发明申请

US20160025783A1 MICROFABRICATED CALORIMETER FOR RF POWER MEASUREMENT 审中-公开
标题翻译：用于RF功率测量的微波加热器
公开(公告)号：US20160025783A1
公开(公告)日：2016-01-28
申请号：US14769798
申请日：2014-02-20
申请人： THE RESEARCH FOUNDATION OF THE STATE UNIVERSITY OF NEW YORK , BIRD TECHNOLOGIES GROUP INC.
发明人： Joel D. Meltzer , Albert H. Titus , Bilel Neji , Jing Xu
IPC分类号： G01R21/02
CPC分类号： G01R21/02 , G01K17/08
摘要： Disclosed is a radio frequency (RF) power calorimeter having a load electrically coupled to a RF input, a variable low-frequency power source electrically coupled to the load and configured to apply low-frequency bias to the load. The RF power calorimeter includes a thermal medium thermally coupled to the load. Additionally, the RF power calorimeter includes an outlet temperature sensor thermally coupled to the thermal medium, the outlet temperature sensor being positioned to measure the temperature of the thermal medium due to heating by the load. The RF power calorimeter also has circuitry configured to use temperature measurements of the thermal medium in thermal contact with an RF load in combination with the low-frequency bias to measure average power of an RF source electrically coupled to the RF input. Also disclosed in a method of measuring RF power using the RF power calorimeter.
摘要翻译：公开了一种具有电耦合到RF输入的负载的射频（RF）功率量热计，电耦合到负载并被配置为向负载施加低频偏置的可变低频电源。 RF功率量热计包括热耦合到负载的热介质。此外，RF功率量热计包括热耦合到热介质的出口温度传感器，出口温度传感器被定位成通过负载加热来测量热介质的温度。 RF功率量热计还具有电路，其被配置为使用与RF负载热接触的热介质的温度测量结合低频偏置来测量与RF输入电耦合的RF源的平均功率。还在使用RF功率量热计测量RF功率的方法中公开。

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