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    • 1. 发明申请
    • WAFER CARRIER AND EPITAXY MACHINE USING THE SAME
    • 使用它的波浪载体和外延机
    • US20100101496A1
    • 2010-04-29
    • US12648849
    • 2009-12-29
    • CHIH CHING CHENGTZONG-LIANG TSAI
    • CHIH CHING CHENGTZONG-LIANG TSAI
    • C23C16/00
    • C23C16/4585C30B25/12
    • A wafer carrier comprises a base and a shielding plate positioned on the top surface of the base in a disassembled manner. The top surface of the base is configured to retain a plurality of wafers, and the shielding plate has a plurality of openings exposing the wafers. In particular, the shielding plate shields one portion of the base other than the other portions occupied by the wafers to prevent the reaction gases from conducting the chemical reaction to generate the reactant directly on the surface of the base. Consequently, the base is isolated from the chemical reaction, and it is not necessary to replace the base before conducting the next fabrication process or to clean the reactants on the surface of the base by thermal baking or etching.
    • 晶片载体包括基部和屏蔽板,其以拆卸的方式定位在基部的顶表面上。 基座的顶表面构造成保持多个晶片,并且屏蔽板具有暴露晶片的多个开口。 特别地,屏蔽板屏蔽除了晶片占据的其它部分之外的基底的一部分,以防止反应气体进行化学反应,直接在基底的表面上产生反应物。 因此,基底与化学反应隔离,在进行下一个制造工艺之前不需要更换基底,也不需要通过热烘烤或蚀刻来清洁基底表面上的反应物。
    • 3. 发明申请
    • WAFER CARRIER AND EPITAXY MACHINE USING THE SAME
    • 使用它的波浪载体和外延机
    • US20090308319A1
    • 2009-12-17
    • US12194013
    • 2008-08-19
    • CHIH CHING CHENGTZONG-LIANG TSAI
    • CHIH CHING CHENGTZONG-LIANG TSAI
    • C23C16/00
    • C23C16/4585C30B25/12
    • A wafer carrier comprises a base and a shielding plate positioned on the top surface of the base in a disassembled manner. The top surface of the base is configured to retain a plurality of wafers, and the shielding plate has a plurality of openings exposing the wafers. In particular, the shielding plate shields one portion of the base other than the other portions occupied by the wafers to prevent the reaction gases from conducting the chemical reaction to generate the reactant directly on the surface of the base. Consequently, the base is isolated from the chemical reaction, and it is not necessary to replace the base before conducting the next fabrication process or to clean the reactants on the surface of the base by thermal baking or etching.
    • 晶片载体包括以分解的方式定位在基座的顶表面上的基座和屏蔽板。 基座的顶表面构造成保持多个晶片,并且屏蔽板具有暴露晶片的多个开口。 特别地,屏蔽板屏蔽除了晶片占据的其它部分之外的基底的一部分,以防止反应气体进行化学反应,直接在基底的表面上产生反应物。 因此,基底与化学反应隔离,在进行下一个制造工艺之前不需要更换基底,也不需要通过热烘烤或蚀刻来清洁基底表面上的反应物。