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    • 1. 发明申请
    • DYNAMIC RANGE PARTITIONING
    • 动态范围划分
    • US20160055192A1
    • 2016-02-25
    • US14463060
    • 2014-08-19
    • Christian BensbergJochen BeckerCarsten MuellerAndreas Thumfart
    • Christian BensbergJochen BeckerCarsten MuellerAndreas Thumfart
    • G06F17/30
    • G06F17/30339
    • A system includes generation of a definition of a table including a partitioning column of the table and a threshold size, allocation of a first memory partition for the table, determination that a size of the records of the table in the first memory partition is greater than the threshold size, and, in response to the determination that the size of the records of the table in the first memory partition is greater than the threshold size, determination that a maximum value of the partitioning column in the records of the table in the first memory partition, determination of a minimum value of the partitioning column in the records of the table in the first memory partition, generation of metadata indicating that records of the table in which the value of the partitioning column is in a range between and including the minimum value and the maximum value are stored in the first memory partition, and allocation of a second memory partition for the table.
    • 系统包括生成包括表的分区列和阈值大小的表的定义,用于表的第一存储器分区的分配,确定第一存储器分区中的表的记录的大小大于 阈值大小,并且响应于第一存储器分区中的表的记录的大小大于阈值大小的确定,确定在第一存储器分区中的表的记录中的分区列的最大值 存储器分区,确定第一存储器分区中的表的记录中的分区列的最小值,生成表示分区列的值在其中包括最小值的范围内的表的记录的元数据 值和最大值存储在第一个内存分区中,并为表分配第二个内存分区。
    • 9. 发明授权
    • Optical arrangement having improved temperature distribution within an optical element
    • 在光学元件内具有改善的温度分布的光学布置
    • US06521877B1
    • 2003-02-18
    • US09721451
    • 2000-11-22
    • Werner Müller-RissmannHubert HoldererRudolf Von BünauChristian WagnerJochen BeckerStefan XalterWolfgang Hummel
    • Werner Müller-RissmannHubert HoldererRudolf Von BünauChristian WagnerJochen BeckerStefan XalterWolfgang Hummel
    • G01J120
    • G03F7/70891
    • An optical arrangement, in particular a microlithographic projection printing installation, has in particular a slot-shaped image field or rotationally non-symmetrical illumination. A refractive optical element, e.g. a lens (2), is heated by the rotationally non-symmetrical radiated impingement (3) of a light source. At least one electric heating element is coupled to the optical element. Said heating element comprises a resistance heating coating carried by the optical element. In the region of the surface (3) of the optical element acted upon by the radiation of the light source the resistance heating coating is substantially optically transparent. It comprises a plurality of parallel, electrically mutually insulated coating strips (5 to 10). A heating current source (17 to 19) is additionally part of the heating element. By virtue of the combined heating of the optical element by the radiated impingement (3) and the resistance heating, a correction of imaging defects induced by illumination in the optical element is achieved by means of a symmetrical and/or homogeneous temperature and refractive index distribution.
    • 光学布置,特别是微光刻投影印刷装置,特别地具有槽形图像场或旋转非对称照明。 折射光学元件,例如 透镜(2)被光源的旋转非对称辐射冲击(3)加热。 至少一个电加热元件耦合到光学元件。 所述加热元件包括由光学元件承载的电阻加热涂层。 在由光源的辐射作用的光学元件的表面(3)的区域中,电阻加热涂层基本上是光学透明的。 它包括多个平行的,电互相绝缘的涂层条(5至10)。 加热电流源(17〜19)是加热元件的另外一部分。 由于通过辐射冲击(3)和电阻加热对光学元件的组合加热,通过对称和/或均匀的温度和折射率分布来实现由光学元件中的照明引起的成像缺陷的校正 。