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    • 7. 发明授权
    • Schottky barrier diode having a trench structure
    • 具有沟槽结构的肖特基势垒二极管
    • US08957461B2
    • 2015-02-17
    • US13952741
    • 2013-07-29
    • Fuji Electric Co., Ltd.
    • Tomonori MizushimaMichio Nemoto
    • H01L29/872H01L29/06H01L29/40
    • H01L29/872H01L29/0661H01L29/402H01L29/407H01L29/8725
    • A TMBS diode is disclosed. In an active portion and voltage withstanding structure portion of the diode, an end portion trench surrounds active portion trenches. An active end portion which is an outer circumferential side end portion of an anode electrode is in contact with conductive polysilicon inside the end portion trench. A guard trench is separated from the end portion trench and surrounds it. A field plate provided on an outer circumferential portion of the anode electrode is separated from the anode electrode, and contacts both part of a surface of n-type drift layer in a mesa region between the end portion trench and the guard trench and the conductive polysilicon formed inside the guard trench. The semiconductor device has high withstand voltage without injection of minority carriers, and relaxed electric field intensity of the trench formed in an end portion of an active portion.
    • 公开了TMBS二极管。 在二极管的有效部分和耐电压结构部分中,端部沟槽围绕有源部分沟槽。 作为阳极电极的外周侧端部的活性端部与端部槽内的导电性多晶硅接触。 保护沟槽与端部沟槽分离并将其包围。 设置在阳极电极的外周部上的场板与阳极分离,并且在端部沟槽和保护沟槽之间的台面区域中与n型漂移层的表面的两部分接触,并且导电多晶硅 形成在防护沟内。 半导体器件具有高耐压而不注入少数载流子,并且在有源部分的端部形成沟槽的松弛电场强度。