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1. 发明授权

US11226536B2 Wavelength conversion system and processing method 有权
公开(公告)号：US11226536B2
公开(公告)日：2022-01-18
申请号：US16987972
申请日：2020-08-07
申请人： Gigaphoton Inc. , The University of Tokyo
发明人： Chen Qu , Yohei Kobayashi , Zhigang Zhao , Hironori Igarashi
IPC分类号： G03B27/54 , G02F1/35 , G02F1/355 , G03F7/20
摘要： A wavelength conversion system including: A. a first nonlinear optical crystal to which first pulsed laser light having a first polarization state and a first wavelength and second pulsed laser light having a second polarization state and a second wavelength are inputted and which is configured to output in response to the input the second pulsed laser light and first sum frequency light having the second polarization state and a third wavelength produced by sum frequency mixing of the first wavelength with the second wavelength; and B. a second nonlinear optical crystal to which the first sum frequency light and the second pulsed laser light outputted from the first nonlinear optical crystal are inputted and which is configured to output in response to the input third pulsed laser light having a fourth wavelength.

2. 发明授权

US11350515B2 Laser system 有权
公开(公告)号：US11350515B2
公开(公告)日：2022-05-31
申请号：US16919216
申请日：2020-07-02
申请人： Gigaphoton Inc. , The University of Tokyo
发明人： Hironori Igarashi , Kouji Kakizaki , Yohei Kobayashi , Shuntaro Tani
IPC分类号： H05G2/00
摘要： A laser system includes A. a laser apparatus configured to output pulsed laser light; B. a rare gas chamber; C. a light focusing optical system configured to focus the pulsed laser light in the rare gas chamber to excite the rare gas; D. a filter chamber configured to selectively transmit EUV light contained in harmonic light produced in the rare gas chamber; E. an exhauster connected to the filter chamber; F. at least one through hole disposed in the optical path between the rare gas chamber and the filter chamber; G. a rare gas supplier; H. a flow rate control valve configured to control the flow rate of the rare gas flowing from the rare gas supplier into the rare gas chamber; I. a first pressure sensor configured to detect the pressure of the rare gas in the rare gas chamber; J. a first controller configured to control the flow rate control valve in such a way that the pressure detected with the first pressure sensor falls within a reference range; and K. a second controller configured to control the pulse energy of the pulsed laser light outputted from the laser apparatus based at least on the pressure detected with the first pressure sensor.

3. 发明授权

US10095084B2 Solid-state laser system and excimer laser system 有权
公开(公告)号：US10095084B2
公开(公告)日：2018-10-09
申请号：US15912004
申请日：2018-03-05
申请人： The University of Tokyo , GIGAPHOTON INC.
发明人： Yohei Kobayashi , Shinji Ito
IPC分类号： G02F1/37 , H01S3/30 , H01S3/067 , G02F1/35
摘要： A solid-state laser system may include: a solid-state laser unit configured to output first pulsed laser light with a first wavelength and second pulsed laser light with a second wavelength; a first solid-state amplifier configured to receive the first pulsed laser light, and output third pulsed laser light with the first wavelength; a wavelength converter configured to receive the third pulsed laser light, and output harmonic light with a third wavelength; a second solid-state amplifier configured to receive the second pulsed laser light, and output fourth pulsed laser light with the second wavelength; a Raman laser unit configured to receive the fourth pulsed laser light, and output Stokes light with a fourth wavelength; and a wavelength conversion system configured to receive the harmonic light and the Stokes light, and output fifth pulsed laser light with a fifth wavelength converted in wavelength from the third wavelength and the fourth wavelength.

4. 发明授权

US09594253B2 Spectral apparatus, detection apparatus, light source apparatus, reaction apparatus, and measurement apparatus 有权
标题翻译：光谱仪，检测装置，光源装置，反应装置及测定装置
公开(公告)号：US09594253B2
公开(公告)日：2017-03-14
申请号：US14294480
申请日：2014-06-03
申请人： CANON KABUSHIKI KAISHA , The University of Tokyo
发明人： Takashi Sukegawa , Yohei Kobayashi , Akira Ozawa , Mamoru Endo , Makoto Gonokami
IPC分类号： G01N21/00 , G02B27/10 , G01J3/28 , G01J3/18 , G01N21/75 , G02B5/18 , G01J3/02 , G01J1/04 , G01J3/22
CPC分类号： G02B27/1086 , G01J1/0411 , G01J1/0414 , G01J1/0425 , G01J3/0208 , G01J3/021 , G01J3/0218 , G01J3/0221 , G01J3/0291 , G01J3/18 , G01J3/1804 , G01J3/22 , G01J3/2823 , G01J2003/1861 , G01N21/75 , G02B5/18 , G02B2005/1804
摘要： The present invention provides a spectral apparatus for spectrally separating light including a predetermined wavelength, including a slit that the light enters, a first optical system configured to collimate the light from the slit, a transmissive type diffraction element configured to diffract the light from the first optical system, and a second optical system including a first mirror configured to reflect the light diffracted by the transmissive type diffraction element, and a second mirror configured to reflect the light reflected by the first mirror and diffracted by the transmissive type diffraction element, and configured to make the light reciprocally travel between the first mirror and the second mirror via the transmissive type diffraction element.
摘要翻译：本发明提供了一种用于光谱分离包括光入射的狭缝的预定波长的光的光谱装置，被配置为准直来自狭缝的光的第一光学系统，被配置为衍射来自第一光学系统，以及第二光学系统，包括被配置为反射由透射型衍射元件衍射的光的第一反射镜，以及被配置为反射由第一反射镜反射并被透射型衍射元件衍射的光的第二反射镜，以使光通过透射型衍射元件在第一反射镜和第二反射镜之间往复行进。

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