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    • 10. 发明申请
    • PHOTODIODE ARRAY
    • 光斑阵列
    • US20170033137A1
    • 2017-02-02
    • US15293784
    • 2016-10-14
    • HAMAMATSU PHOTONICS K.K.
    • Kazuhisa YAMAMURAKenichi SATO
    • H01L27/144H01L31/107H01L27/146
    • H01L27/1446H01L27/14H01L27/14603H01L27/14605H01L27/14636H01L31/107
    • A photodiode array has a plurality of photodetector channels formed on an n-type substrate having an n-type semiconductor layer, with a light to be detected being incident to the photodetector channels. The array comprises: a p−-type semiconductor layer on the n-type semiconductor layer of the substrate; resistors is provided to each of the photodetector channels and is connected to a signal conductor at one end thereof; and an n-type separating part between the plurality of photodetector channels. The p−-type semiconductor layer forms a pn junction at the interface between the substrate, and comprises a plurality of multiplication regions for avalanche multiplication of carriers produced by the incidence of the light to be detected so that each of the multiplication regions corresponds to each of the photodetector channels.
    • 光电二极管阵列具有形成在具有n型半导体层的n型衬底上的多个光电检测器通道,待检测的光入射到光电检测器通道。 阵列包括:衬底的n型半导体层上的p型半导体层; 电阻器被提供到每个光电检测器通道并且在其一端连接到信号导体; 以及在所述多个光电检测器通道之间的n型分离部。 p型半导体层在衬底之间的界面处形成pn结,并且包括用于由待检测的光的入射产生的载流子的雪崩乘法的多个乘法区域,使得每个乘法区域对应于每个 的光电检测器通道。