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    • 10. 发明申请
    • SPECTROSCOPIC SENSOR
    • 光谱传感器
    • US20150138560A1
    • 2015-05-21
    • US14400702
    • 2013-05-08
    • HAMAMATSU PHOTONICS K.K.
    • Takashi KasaharaKatsumi Shibayama
    • G01J3/26G01J3/45
    • G01J3/26G01J3/0213G01J3/2803G01J3/45G01J2003/1234
    • A spectroscopic sensor 1A comprises an interference filter unit 20A having a cavity layer 21 and first and second mirror layers 22, 23 and a light detection substrate 30 having a light-receiving surface 32a for receiving light transmitted through the interference filter unit 20A. The interference filter unit 20A has a first filter region 24 corresponding to the light-receiving surface 32a and a ring-shaped second filter region 25 surrounding the first filter region 24. The light detection substrate 30 has a plurality of pad units 33a contained in the second filter region 25, while the second filter region 25 is formed with through holes 6 for exposing the pad units 33a to the outside.
    • 分光传感器1A包括具有空腔层21和第一和第二镜层22,23的干涉滤光器单元20A和具有用于接收透过干涉滤光器单元20A的光的光接收表面32a的光检测基板30。 干涉滤光器单元20A具有对应于受光面32a的第一滤光区域24和围绕第一滤光区域24的环状的第二滤光器区域25.光检测基板30具有包含在第一滤光区域 第二过滤器区域25,而第二过滤器区域25形成有用于将焊盘单元33a暴露于外部的通孔6。