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    • 9. 发明申请
    • SYSTEM AND METHOD FOR ADJUSTING BRIGHTNESS OF LIGHT SOURCE OF CRITICAL DIMENSION MEASURING DEVICE
    • 用于调节关键尺寸测量装置的光源亮度的系统和方法
    • US20170026561A1
    • 2017-01-26
    • US15123920
    • 2015-08-12
    • BOE TECHNOLOGY GROUP CO., LTD.HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    • Dezhi XuCheng ChenLei Wang
    • H04N5/235G06T7/00
    • H04N5/2354G01B11/00G03F7/70625G06T7/0006G06T2207/30148G06T2207/30208H01L27/1214H04N5/2351H05B41/38
    • The present disclosure provides a system and a method for adjusting brightness of a light source of a critical dimension measuring device. The system for adjusting brightness of the light source comprises: a calibration mark unit which is formed on a display panel by photolithography and is provided with a plurality of marks; a mark pattern acquiring unit which is configured to acquire patterns of the plurality of marks; a mark data collecting unit which is configured to obtain actual line widths and actual line spaces of the plurality of marks based on the patterns of the plurality of marks, and to calculate a ratio of a sum of an average value of the actual line width and an average value of the actual line space to a sum of a predefined line width and a predefined line space; a mark data determining unit which is configured to determine whether the ratio is within a predefined range; and a unit for automatically adjusting brightness of light source which is configured to generate a brightness adjusting signal of the light source to adjust a driving voltage of the light source if the mark data determining unit determines that the ratio is outside of the predefined range. The accuracy of the critical dimension measuring is improved by properly adjusting the brightness of the light source.
    • 本公开提供了一种用于调节临界尺寸测量装置的光源的亮度的系统和方法。 用于调整光源亮度的系统包括:校准标记单元,其通过光刻形成在显示面板上并且设置有多个标记; 标记图案获取单元,被配置为获取所述多个标记的图案; 标记数据收集单元,其被配置为基于所述多个标记的图案获得所述多个标记的实际线宽和实际线间距,并且计算所述实际线宽的平均值和 实际行空间的平均值与预定行宽和预定义行空间的和的平均值; 标记数据确定单元,被配置为确定所述比率是否在预定范围内; 以及用于自动调整光源亮度的单元,其被配置为如果所述标记数据确定单元确定所述比率在所述预定范围之外,则生成所述光源的亮度调整信号以调整所述光源的驱动电压。 通过适当调整光源的亮度,提高临界尺寸测量的精度。