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1. 发明授权

US09466320B1 Thermal assisted magnetic recording light delivery waveguide circuit for reduced stray light induced writer protrusion 有权
标题翻译：热辅助磁记录光传输波导电路用于减少杂散光引起的写入器突出
公开(公告)号：US09466320B1
公开(公告)日：2016-10-11
申请号：US14918627
申请日：2015-10-21
申请人： Headway Technologies, Inc.
发明人： Matteo Staffaroni , Xuhui Jin , Weihao Xu , Luc Chung
IPC分类号： G11B5/127 , G11B11/00 , G11B5/02 , G11B5/48 , G11B5/60 , G11B5/31 , G11B5/00
CPC分类号： G11B5/314 , G11B5/3116 , G11B5/3136 , G11B5/6088 , G11B2005/0021
摘要： A thermally assisted magnetic recording head is disclosed with a light delivery waveguide circuit wherein a middle section of the primary waveguide (WG) has a curved portion. In one embodiment, the curved portion connects to a front WG section at the air bearing surface (ABS) and is offset in a cross-track direction from the laser diode to prevent stray light from heating metal parts proximate to the front section and undesirable writer protrusion. Optionally, a reflective blocker is inserted between the WG spot size converter and ABS. In a second embodiment, the laser diode, spot size converter, and front WG section are all aligned along a center slider plane. The curved portion has at least one 180° bend to bend light around the blocker that is between the spot size converter and WG front section. The blocker is tilted to prevent reflected light from returning to the laser diode.
摘要翻译：公开了一种热辅助磁记录头，其具有光传输波导电路，其中初级波导（WG）的中间部分具有弯曲部分。在一个实施例中，弯曲部分连接到空气轴承表面（ABS）处的前部WG部分，并且在与激光二极管的横向方向上偏移以防止杂散光加热接近前部的金属部件和不期望的作者突出。可选地，反射阻挡剂插入在WG点尺寸转换器和ABS之间。在第二实施例中，激光二极管，光斑尺寸转换器和前部WG部分都沿着中心滑块平面排列。弯曲部分具有至少一个180°的弯曲以弯曲位于光斑尺寸转换器和WG前部之间的阻挡件周围的光。阻挡器被倾斜以防止反射光返回到激光二极管。

2. 发明授权

US11315597B1 Near-field transducer with separated bottom Au layer 有权
公开(公告)号：US11315597B1
公开(公告)日：2022-04-26
申请号：US17156920
申请日：2021-01-25
申请人： Headway Technologies, Inc.
发明人： Koji Shimazawa , Weihao Xu , Ken Fujii
IPC分类号： G11B11/105 , G11B13/08 , G11B5/012 , G11B5/00 , G11B5/60 , G11B5/48
摘要： A plasmon generator (PG) is formed between a waveguide and main pole, and has a front portion (Au/Rh bilayer) wherein the upper Rh layer has a peg shape at an air bearing surface (ABS), and a tapered backside that is separated from a PG back portion by a dielectric spacer. The lower Au layer has a front side recessed from the ABS and curved sides self-aligned with the Rh layer sides. A key feature is that the back section of lower Au layer curved side forms a smaller angle with a plane aligned orthogonal to the ABS than a front section thereof thereby selectively enabling a deformation of the back end of the Au layer during a heat treatment to >300° C. at the wafer level. Accordingly, the front end of the lower Au layer is densified and provides an improved heat sink to improve reliability and area density capability (ADC).

3. 发明授权

US10262683B2 Self-aligned hybrid Au—Rh near field transducer for enhanced reliability 有权
公开(公告)号：US10262683B2
公开(公告)日：2019-04-16
申请号：US15011892
申请日：2016-02-01
申请人： Headway Technologies, Inc.
发明人： Matteo Staffaroni , Xuhui Jin , Weihao Xu , Cherng-Chyi Han , Weisheng Hu , Shengyuan Wang
IPC分类号： G11B5/00 , G11B5/31 , G11B5/60
摘要： A near field transducer (NFT) is formed between a waveguide and main pole layer at an air bearing surface (ABS). The NFT includes a resonator body layer made of Au, for example, with a front side at a first plane that is recessed a first distance from the ABS and a back side that is at a second plane formed parallel to the ABS and first plane. The NFT also has a peg layer with a rectangular peg portion between the ABS and first plane, and a larger back portion between the first and second planes that overlays directly above the resonator body layer. The peg layer is preferably made of Rh to improve mechanical stability of the NFT without significantly degrading overall optical efficiency of the NFT. A blocker may be formed between the ABS and waveguide to prevent light not coupled to the NFT from reaching the ABS.

4. 发明授权

US09852752B1 Plasmon generator with metallic waveguide blocker for TAMR 有权
公开(公告)号：US09852752B1
公开(公告)日：2017-12-26
申请号：US15235171
申请日：2016-08-12
申请人： Headway Technologies, Inc.
发明人： Tsutomu Chou , Kouji Shimazawa , Tobias Maletzky , Weihao Xu , Shinji Hara , Yoshihiro Tsuchiya , Yiming Wang , Cherng-Chyi Han , Xuhui Jin
IPC分类号： G11B11/00 , G11B5/48 , G11B5/60 , G11B5/31 , G11B5/00 , G11B11/105
CPC分类号： G11B5/4866 , G11B5/1278 , G11B5/3106 , G11B5/3136 , G11B5/314 , G11B5/3163 , G11B5/6082 , G11B5/6088 , G11B11/10506 , G11B11/1051 , G11B2005/0021
摘要： A TAMR (thermal assisted magnetic recording) write head has a metal blocker formed against a distal end of a waveguide. The waveguide focuses optical radiation on an adjacent plasmon generator where it excites plasmon modes that heat the recording medium. Although the plasmon generator typically heats the recording medium using the plasmon near field to supply the required Joule heating, an unblocked waveguide would also send optical radiation to the medium and surrounding structures producing unwanted heating and device unreliability. The role of the blocker is to block the unwanted optical radiation and, thereby, to limit the heating to that supplied by the plasmon near field.

5. 发明授权

US11011192B1 Method of building self-aligned optical side shield structure 有权
公开(公告)号：US11011192B1
公开(公告)日：2021-05-18
申请号：US16800036
申请日：2020-02-25
申请人： Headway Technologies, Inc.
发明人： Weihao Xu , Ittetsu Kitajima , Cherng-Chyi Han , Xuhui Jin , Weisheng Hu , Ethan Lo
IPC分类号： G11B5/39 , G11B5/60 , G11B5/00
摘要： An optically shielded (thermally assisted magnetic recording (TAMR) head comprises a perpendicular magnetic recording (PMR) write head and a near-field transducer (NFT) having an emerging peg at the air-bearing surface (ABS). Self-aligned optical side shields (SA-OSS) are formed using a self-aligning process that positions the shields symmetrically relative to the emergent peg of the NFT. As a result of the symmetric positioning the down-track and cross-track near-field and near-field gradients are significantly sharpened.

6. 发明申请

US20180096702A1 THERMALLY-ASSISTED MAGNETIC RECORDING HEAD HAVING SYMMETRIC OPTICAL SIDE SHIELDS 审中-公开
公开(公告)号：US20180096702A1
公开(公告)日：2018-04-05
申请号：US15285721
申请日：2016-10-05
申请人： Headway Technologies, Inc.
发明人： Matteo Staffaroni , Tobias Maletzky , Xuhui Jin , Weihao Xu , Kenichi Takano
IPC分类号： G11B5/48 , G11B5/39 , G11B5/31
CPC分类号： G11B5/4866 , G11B5/3116 , G11B5/3133 , G11B5/3143 , G11B5/3169 , G11B5/3906 , G11B5/6088 , G11B7/135 , G11B7/22 , G11B2005/0021
摘要： An optically shielded TAMR (thermally assisted magnetic recording) write head has a metal waveguide blocker formed against a distal end of a waveguide and a pair of symmetrically disposed optical side shields formed to either side of a plasmon generator formed above the waveguide. The waveguide focuses optical radiation on the adjacent plasmon generator where it excites plasmon modes that heat the recording medium with near-field energy and the waveguide blocker prevents excess optical radiation from blurring the spot on the recording region. The optical side shields further restrict loosely coupled optical radiation from reaching the recording region and blurring the optical spot and improves down-track and cross-track thermal gradients.

7. 发明申请

US20170221505A1 Self-Aligned Hybrid Au-Rh Near Field Transducer for Enhanced Reliability 审中-公开
公开(公告)号：US20170221505A1
公开(公告)日：2017-08-03
申请号：US15011892
申请日：2016-02-01
申请人： Headway Technologies, Inc.
发明人： Matteo Staffaroni , Xuhui Jin , Weihao Xu , Cherng-Chyi Han , Weisheng Hu , Shengyuan Wang
IPC分类号： G11B5/31 , G11B5/60 , G11B5/127 , G11B5/48
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： A near field transducer (NFT) is formed between a waveguide and main pole layer at an air bearing surface (ABS). The NFT includes a resonator body layer made of Au, for example, with a front side at a first plane that is recessed a first distance from the ABS and a back side that is at a second plane formed parallel to the ABS and first plane. The NFT also has a peg layer with a rectangular peg portion between the ABS and first plane, and a larger back portion between the first and second planes that overlays directly above the resonator body layer. The peg layer is preferably made of Rh to improve mechanical stability of the NFT without significantly degrading overall optical efficiency of the NFT. A blocker may be formed between the ABS and waveguide to prevent light not coupled to the NFT from reaching the ABS.

8. 发明授权

US10586560B1 Rhodium film with thin template layer and its application to a thermally assisted magnetic recording (TAMR) writer 有权
公开(公告)号：US10586560B1
公开(公告)日：2020-03-10
申请号：US16292457
申请日：2019-03-05
申请人： Headway Technologies, Inc.
发明人： Shengyuan Wang , Weihao Xu , Cherng-Chyi Han , Xuhui Jin , Min Li , Kunliang Zhang
IPC分类号： G11B5/127 , G11B5/64 , G11B5/31 , G11B5/00
摘要： A PMR (perpendicular magnetic recording) head is configured for thermally assisted magnetic recording (TAMR). The thermal energy is supplied by the near-fields of plasmons and the near-fields are directed to a magnetic recording medium by a PPG layer. The PPG layer is Rhodium (Rh) whose small-grained crystal structure normally makes it subject to thermal deformations and other weaknesses. By growing the PPG layer on a thin template layer (TTL), the portion of the PPG layer adjacent to the air-bearing surface (ABS) develops a larger grain size and stronger forces between its atomic constituents which makes it resistant to those deformations.

9. 发明授权

US10186288B1 Method of fabricating single Rh layer optical field enhancer with pre-focusing structures 有权
公开(公告)号：US10186288B1
公开(公告)日：2019-01-22
申请号：US15966179
申请日：2018-04-30
申请人： Headway Technologies, Inc.
发明人： Weihao Xu , Cherng-Chyi Han , Weisheng Hu , Shengyuan Wang , Wen-Ding Huang , Ittetsu Kitajima
IPC分类号： G11B5/127 , G11B11/05 , G11B5/48 , C23F4/00 , C23C16/50 , C23C16/56 , C23C16/455 , G11B19/20 , G11B5/00
摘要： A method of forming a TAMR (thermally assisted magnetic recording) write head that uses weakly plasmonic materials that are mechanically strong and thermally stable to create plasmon near field energy. The replacement of highly plasmonic materials like Au with a weakly plasmonic material like Rh avoids the thermal deformations of softer metals like Au. To maintain the performance of the head, it includes pre-focusing structures that concentrate plasmon energy as it moves towards the air bearing surface (ABS). A waveguide blocker at the distal end of the waveguide enhances the plasmons at the interface between the blocker and the dielectric material at the distal end of the waveguide. A pair of symmetrically disposed optical side shields (OSS) are formed to either side of the pole tip and a weakly plasmonic optical field enhancer of sharply defined line-width further strengthens the optical field at its point of application. The resulting structure can be effectively used in a magnetic recording apparatus such as a hard disk drive.

10. 发明授权

US10152991B2 Method for manufacturing thermally-assisted magnetic recording head with waveguide blocker 有权
公开(公告)号：US10152991B2
公开(公告)日：2018-12-11
申请号：US15837205
申请日：2017-12-11
申请人： Headway Technologies, Inc.
发明人： Tsutomu Chou , Kouji Shimazawa , Tobias Maletzky , Weihao Xu , Shinji Hara , Yoshihiro Tsuchiya , Yiming Wang , Cherng-Chyi Han , Xuhui Jin
IPC分类号： G11B11/00 , G11B5/48 , G11B5/31 , G11B5/60 , G11B5/127 , G11B5/00 , G11B11/105
摘要： A method for manufacturing a TAMR (thermal assisted magnetic recording) write head. The write head has a metal blocker formed against a distal end of a waveguide. The waveguide focuses optical radiation on an adjacent plasmon generator where it excites plasmon modes that heat the recording medium. Although the plasmon generator typically heats the recording medium using the plasmon near field to supply the required Joule heating, an unblocked waveguide would also send optical radiation to the medium and surrounding structures producing unwanted heating and device unreliability. The role of the blocker is to block the unwanted optical radiation and, thereby, to limit the heating to that supplied by the plasmon near field.

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