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1. 发明授权

US11307072B2 Physical quantity detection device 有权
公开(公告)号：US11307072B2
公开(公告)日：2022-04-19
申请号：US17047468
申请日：2019-02-14
申请人： Hitachi Automotive Systems, Ltd.
发明人： Binti Haridan Fatin Farhanah , Takayuki Yogo , Noboru Tokuyasu , Akira Uenodan , Takahiro Miki , Hiroaki Hoshika
IPC分类号： G01F1/684 , G01F1/692 , G01F15/14
摘要： A compact physical quantity detecting device is provided since it is possible to lower the mounting height of a chip package by accommodating the chip package in a notched board. In the physical quantity detecting device of the present invention, a part in a thickness direction of a support body on which a flow rate detection unit and a processing unit are mounted is accommodated in a notch provided in a printed board.

2. 发明授权

US09970800B2 Thermal flow meter with bypass passage including an outer circumference path and an inner circumference path 有权
公开(公告)号：US09970800B2
公开(公告)日：2018-05-15
申请号：US14406821
申请日：2013-05-31
申请人： Hitachi Automotive Systems, Ltd.
发明人： Takeshi Morino , Shinobu Tashiro , Noboru Tokuyasu , Keiji Hanzawa , Atsushi Inoue , Akira Uenodan
IPC分类号： G01F1/684 , G01F1/692 , G01F1/696
CPC分类号： G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01F1/696 , G01F1/6965
摘要： The present invention aims to provide a thermal flow meter capable of avoiding pollutants guided to an outer circumference side of the bypass passage by virtue of a centrifugal force or particle or liquid pollutants that are not centrifugally separated from reaching a heat transfer surface of an air flow sensing portion and obtaining high measurement accuracy. In the thermal flow meter of the present invention, the bypass passage has an upstream side curved path 390 formed in a curved shape along an unique plane at least in an upstream side from an air flow sensing portion 602 in a flow direction of the measurement target gas 30, and a branching wall 378 formed from a downstream side of the upstream side curved path 390 to a downstream side of the air flow sensing portion 602. The bypass passage of the downstream side of the upstream side curved path 390 is branched by the branching wall 378 into a main flow path 377 that fluidly communicates with an outer wall side of the upstream side curved path 390 and a branching path 388 that fluidly communicates with an inside wall side of the upstream side curved path 390. The air flow sensing portion 602 is arranged inside the main flow path 377 such that the heat transfer surface exposing portion 436 is in parallel with the unique plane of the upstream side curved path 390.

3. 发明授权

US09933292B2 Thermal flow meter 有权
公开(公告)号：US09933292B2
公开(公告)日：2018-04-03
申请号：US15653360
申请日：2017-07-18
申请人： Hitachi Automotive Systems, Ltd.
发明人： Shinobu Tashiro , Keiji Hanzawa , Noboru Tokuyasu , Takeshi Morino , Ryosuke Doi , Akira Uenodan
IPC分类号： G01F1/684 , G01F15/18 , F02D41/18 , G01F1/696 , G01F1/698 , G01F1/699 , G01F5/00 , G01F15/00 , G01F15/02 , G01F15/04 , G01F15/14
CPC分类号： G01F1/684 , F02D41/187 , G01F1/6842 , G01F1/6845 , G01F1/696 , G01F1/6965 , G01F1/698 , G01F1/699 , G01F5/00 , G01F15/006 , G01F15/02 , G01F15/04 , G01F15/043 , G01F15/14 , G01F15/185
摘要： The present invention provides a thermal flow meter 300 which reduces a stress applied from a fixing portion 3721, which is used to hold and fix a circuit package 400 with respect to a housing 302, to the circuit package 400 and has high reliability. In the thermal flow meter of the invention, the circuit package 400 embedded with a flow rate measurement circuit is formed through a first resin molding process, the fixing portion 3721 is formed along with the housing 302 through a second resin molding process, and the circuit package 400 is enveloped by the fixing portion 3721, whereby the circuit package 400 is held by and fixed to the housing 302. In order to reduce the influence of a stress, generated based on a temperature change of the fixing portion 3721, on the circuit package 400, the fixing portion 3721 is constituted of a thick portion 4714 and a thin portion 4710. Since thickness of a resin of the thin portion 4710 is small, the stress to be generated is small, and a force applied to the circuit package 400 can be reduced.

4. 发明授权

US09810560B2 Thermal flow meter with temperature detection element positioned on protrusion of circuit package 有权
公开(公告)号：US09810560B2
公开(公告)日：2017-11-07
申请号：US14407663
申请日：2013-05-15
申请人： Hitachi Automotive Systems, Ltd.
发明人： Noboru Tokuyasu , Keiji Hanzawa , Takeshi Morino , Ryosuke Doi , Akira Uenodan , Shinobu Tashiro
IPC分类号： G01F1/69 , G01F1/696 , G01F1/684 , G01F15/14 , G01F5/00
CPC分类号： G01F1/69 , G01F1/6842 , G01F1/6845 , G01F1/6965 , G01F5/00 , G01F15/14
摘要： In order to provide a thermal flow meter for improving workability of a flow rate measurement device having a temperature measurement function for the measurement target gas and measurement accuracy for measuring a temperature, the thermal flow meter is structured such that a flow rate measurement circuit package having a protrusion for measuring a gas temperature is formed through resin molding. An inlet port opened to the upstream side of the measurement target gas is formed, a protrusion is arranged inside the inlet port, an inlet port and an outlet port are formed in the front and rear covers along the protrusion, and the measurement target gas received from the inlet port flows along the protrusion. Since the measurement target gas subjected to the measurement flows along the protrusion, it is possible to reduce influence of the heat from other heat resources and improve measurement accuracy.

5. 发明授权

US09709428B2 Thermal flow meter with a protrusion having an orifice surface and recovery surface provided on a wall surface of a bypass passage 有权
公开(公告)号：US09709428B2
公开(公告)日：2017-07-18
申请号：US14407785
申请日：2013-05-31
申请人： Hitachi Automotive Systems, Ltd.
发明人： Takeshi Morino , Shinobu Tashiro , Noboru Tokuyasu , Keiji Hanzawa , Atsushi Inoue , Akira Uenodan
IPC分类号： G01F1/68 , G01F1/684 , G01F1/696 , G01F15/14 , G01F5/00
CPC分类号： G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/696 , G01F1/6965 , G01F5/00 , G01F15/14
摘要： To improve measurement accuracy of a thermal flow meter. The present invention provides a thermal flow meter, in which a protrusion 356 having an orifice surface 503 and a recovery surface 505 is provided on a wall surface 501 of a bypass passage, an intersection line 506 between the orifice surface 503 and the wall surface 501 is arranged in an upstream side from an upstream side end 401 of a circuit package 400, an intersection line 507 between the recovery surface 505 and the wall surface 501 is arranged in a downstream side from a downstream side end 402 of the circuit package 400, and an apex 504 of the protrusion 356 is arranged in a downstream side from a heat transfer surface of an air flow sensing portion 602 and in an upstream side from the downstream side end 402 of the circuit package 400.

6. 发明授权

US09658094B2 Thermal flow meter 有权
公开(公告)号：US09658094B2
公开(公告)日：2017-05-23
申请号：US14363002
申请日：2012-11-19
申请人： Hitachi Automotive Systems, Ltd.
发明人： Noboru Tokuyasu , Shinobu Tashiro , Keiji Hanzawa , Takeshi Morino , Ryosuke Doi
IPC分类号： G01F5/00 , G01F1/692 , F02D41/18 , G01F1/684 , G01F15/04
CPC分类号： G01F1/692 , F01N11/002 , F01N2560/07 , F02D41/187 , G01F1/684 , G01F5/00 , G01F15/04
摘要： In order to provide a thermal-type flowmeter highly accurate, with high reliability, and simple in construction, while being available at a lower price, a thermal-type flowmeter as proposed includes a sub-path that takes in a fluid under measurement; a sensor element that measures a flow-rate of the fluid under measurement in the sub-path; a temperature detection element that detects a temperature of the fluid under measurement; a drive circuit that controls a heating temperature of the sensor element; and a protection circuit that protects the drive circuit from noise, a cavity being formed on a substrate of the sensor element, an exothermic resistor being provided on a thin-film part on the cavity through the intermediary of an electrically insulating film, and a flow rate being detected on the basis of temperature distribution in the thin-film part.

7. 发明授权

US09580303B2 Flow sensor and method for manufacturing the same 有权
标题翻译：流量传感器及其制造方法
公开(公告)号：US09580303B2
公开(公告)日：2017-02-28
申请号：US14391782
申请日：2013-04-11
申请人： Hitachi Automotive Systems, Ltd.
发明人： Tsutomu Kono , Keiji Hanzawa , Noboru Tokuyasu , Shinobu Tashiro
IPC分类号： B81C1/00 , H01L21/56 , G01F1/684 , G01F1/698 , G01F1/692 , H01L23/31 , H01L23/00 , H01L23/495
CPC分类号： B81C1/00309 , B81C2203/0118 , B81C2203/0154 , G01F1/6845 , G01F1/692 , G01F1/698 , H01L21/565 , H01L21/566 , H01L23/3107 , H01L23/49575 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/92 , H01L2224/04042 , H01L2224/05554 , H01L2224/2919 , H01L2224/32245 , H01L2224/45144 , H01L2224/48091 , H01L2224/48247 , H01L2224/48257 , H01L2224/73265 , H01L2224/92247 , H01L2924/10158 , H01L2924/10161 , H01L2924/181 , H01L2924/1815 , H01L2924/00012 , H01L2924/00
摘要： A technique capable of suppressing performance variation of every flow sensor and achieving performance improvement is provided. For example, in an arbitrary cross-sectional surface in parallel to a moving direction of a gas flowing on an exposed flow detecting unit FDU which is formed in a semiconductor chip CHP1, a sealing body is released from the lower mold BM by thrusting up, from a lower mold BM, an ejection pin EJPN arranged in an outer region of the semiconductor chip CHP1 so as not to overlap with the semiconductor chip CHP1 arranged in the vicinity of the center part. Thus, according to the first embodiment, the deformation applied to the sealing body at the time of mold releasing can be smaller than that in a case in which the sealing body is released from the lower mold BM by arranging the ejection pin EJPN in a region overlapping with the semiconductor chip CHP1.
摘要翻译：提供了能够抑制每个流量传感器的性能变化并实现性能改进的技术。例如，在形成在半导体芯片CHP1中的露出流动检测部FDU上流动的气体的移动方向上平行的任意的截面中，通过向下方突出而将密封体从下模BM释放，从下模具BM，排列在半导体芯片CHP1的外部区域中的喷射销EJPN，以便不与布置在中心部分附近的半导体芯片CHP1重叠。因此，根据第一实施例，在脱模时施加到密封体的变形可以小于通过将排出销EJPN布置在区域中而从密封体从下模BM释放的情况下的变形与半导体芯片CHP1重叠。

8. 发明授权

US09523595B2 Method of manufacturing thermal flow meter 有权
标题翻译：制造热流量计的方法
公开(公告)号：US09523595B2
公开(公告)日：2016-12-20
申请号：US14899567
申请日：2014-02-07
申请人： Hitachi Automotive Systems, Ltd.
发明人： Norio Ishitsuka , Masatoshi Ogata , Tsutomu Kono , Tsubasa Watanabe , Shinobu Tashiro , Noboru Tokuyasu
IPC分类号： G01F1/684 , G01F1/692
CPC分类号： G01F1/692 , G01F1/684 , G01F5/00
摘要： An objective of the present invention is, in a thermal flow meter having a structure including a resin portion formed in the vicinity of a diaphragm structural portion using a mold, to prevent destruction of the diaphragm structural portion at the time of pressing the mold, in a method of manufacturing the thermal flow meter, including: supporting a gas flow measurement element 200 on support members 102b and 111, the gas flow measurement element 200 including a cavity portion 202 surrounded by a substrate inclined portion 202a inclined to a substrate surface, a diaphragm 201 that covers the cavity portion, and an electrical resistive element formed in the diaphragm 201; and covering the gas flow measurement element 200 and the support members 102b and 111 with the resin portion 104 formed with the mold, to set the mold 14 such that an acting portion of pressure force by the mold that molds the resin portion 104 is positioned outside the substrate inclined portion 202a in the entire periphery of the diaphragm 201.
摘要翻译：本发明的目的在于，在具有使用模具形成在隔膜结构部附近的树脂部的结构的热流量计中，为了防止压模时的膜结构部的破坏，一种制造热流量计的方法，包括：将气流测量元件200支撑在支撑构件102b和111上，气流测量元件200包括由倾斜于衬底表面的衬底倾斜部分202a包围的空腔部分202，覆盖空腔部分的隔膜201和形成在隔膜201中的电阻元件; 并用形成有模具的树脂部分104覆盖气体流量测量元件200和支撑构件102b和111，以将模具14设置成使得模制树脂部分104的模具的压力作用部分位于外部基板倾斜部分202a在隔膜201的整个周边。

9. 发明申请

US20150187708A1 Thermal Flow Meter 有权
标题翻译：热流量计
公开(公告)号：US20150187708A1
公开(公告)日：2015-07-02
申请号：US14407123
申请日：2013-05-31
申请人： Hitachi Automotive Systems, Ltd.
发明人： Shinobu Tashiro , Keiji Hanzawa , Noboru Tokuyasu , Takeshi Morino , Ryosuke Doi , Akira Uenodan
IPC分类号： H01L23/00 , G01F1/684 , G01M15/10 , H01L23/10
CPC分类号： H01L23/564 , F02D41/187 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/696 , G01F1/6965 , G01F1/698 , G01F1/699 , G01F5/00 , G01F15/006 , G01F15/02 , G01F15/04 , G01F15/043 , G01F15/14 , G01F15/185 , G01M15/10 , H01L23/10 , H01L2224/45144 , H01L2224/48091 , H01L2224/48137 , H01L2224/73265 , H01L2924/00 , H01L2924/00014
摘要： Provided is a thermal flow meter that can be prevented from being eroded due to adhesion of water or like to a cut end portion of the lead exposed from the mold resin of the circuit package. A thermal flow meter 300 of the present invention is a thermal flow meter having a circuit package 400 formed by mounting a detection element 518 on leads 544 and 545 supported by a support frame 512, sealing with a mold resin, and cutting off the support frame 512, wherein cut end portions 544a and 545a of the leads 544 and 545 exposed from the mold resin of the circuit package 400 by cutting off the support frame 512 is covered by a covering portion 371.
摘要翻译：提供了一种热流量计，其可以防止由于水等粘附到从电路封装的模制树脂露出的引线的切割端部而被侵蚀。本发明的热流量计300是具有电路封装件400的热流量计，该电路封装件400通过将检测元件518安装在由支撑框架512支撑的引线544和545上，用模制树脂密封，并且将支撑框架 512，其中通过切断支撑框架512从电路封装400的模制树脂暴露的引线544和545的切割端部544a和545a被覆盖部分371覆盖。

10. 发明申请

US20150177043A1 Thermal Flow Meter 有权
标题翻译：热流量计
公开(公告)号：US20150177043A1
公开(公告)日：2015-06-25
申请号：US14363002
申请日：2012-11-19
申请人： Hitachi Automotive Systems, Ltd.
发明人： Noboru Tokuyasu , Shinobu Tashiro , Keiji Hanzawa , Takeshi Morino , Ryosuke Doi
IPC分类号： G01F5/00 , G01F1/684
CPC分类号： G01F1/692 , F01N11/002 , F01N2560/07 , F02D41/187 , G01F1/684 , G01F5/00 , G01F15/04
摘要： In order to provide a thermal-type flowmeter highly accurate, with high reliability, and simple in construction, while being available at a lower price, a thermal-type flowmeter as proposed includes a sub-path that takes in a fluid under measurement; a sensor element that measures a flow-rate of the fluid under measurement in the sub-path; a temperature detection element that detects a temperature of the fluid under measurement; a drive circuit that controls a heating temperature of the sensor element; and a protection circuit that protects the drive circuit from noise, a cavity being formed on a substrate of the sensor element, an exothermic resistor being provided on a thin-film part on the cavity through the intermediary of an electrically insulating film, and a flow rate being detected on the basis of temperature distribution in the thin-film part.
摘要翻译：为了提供高精度，高可靠性，结构简单的热式流量计，同时以较低的价格提供，所提出的热式流量计包括：测量流体的子路径; 传感器元件，其测量在所述子路径中测量的流体的流量; 温度检测元件，其检测被测量的流体的温度; 控制传感器元件的加热温度的驱动电路; 以及保护电路，其保护驱动电路免受噪声，空腔形成在传感器元件的基板上，放热电阻器通过电绝缘膜设置在空腔上的薄膜部分上，流体基于薄膜部分中的温度分布来检测速率。

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