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1. 发明授权

US10473500B2 System and method for improved indicated flow in mass flow controllers 有权
公开(公告)号：US10473500B2
公开(公告)日：2019-11-12
申请号：US14159152
申请日：2014-01-20
申请人： Hitachi Metals, Ltd.
发明人： Alexei V. Smirnov
IPC分类号： G05D7/06 , G01F1/684
摘要： A mass flow controller and associated methods for providing indicated flow from the mass flow controller are disclosed. The method may include obtaining a measured flow signal indicative of a mass flow rate of a fluid that is controlled by the mass flow controller and filtering the measured flow signal to generate indicated flow that provides a representation of the actual mass flow rate of the fluid. The indicated flow is provided to an operator of the mass flow controller, and a rate of change of the mass flow rate of the fluid is determined based upon samples of the measured flow signal. A time constant used in connection with the filtering is then adjusted based upon the rate of change of the mass flow rate.

2. 发明授权

US10041825B2 On-tool mass flow controller diagnostic systems and methods 有权
公开(公告)号：US10041825B2
公开(公告)日：2018-08-07
申请号：US15843747
申请日：2017-12-15
申请人： Hitachi Metals, Ltd.
发明人： Alexei V. Smirnov , Patrick Albright
IPC分类号： G01F25/00 , G01F1/684 , G05D7/06
摘要： Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnostics are disclosed. A mass flow controller includes a differential voltage processing component to provide a first output that is indicative of a differential voltage between second and fourth nodes of a bridge circuit and a top voltage processing component provides a second output indicative of a top voltage between the first node and the third node of the bridge circuit. Top-and-differential voltage reference data stored in non-volatile memory defines a characteristic curve relating top voltage reference values to corresponding differential voltage reference values. A sensor analysis component obtains a top and differential voltage pair and assesses whether the top and differential voltage pair deviates from the characteristic curve to determine whether the sensing element circuit has changed since the top-and-differential voltage reference data was stored in the non-volatile memory.

3. 发明申请

US20170185091A1 GAS INSENSITIVE MASS FLOW CONTROL SYSTEMS AND METHODS 审中-公开
公开(公告)号：US20170185091A1
公开(公告)日：2017-06-29
申请号：US15386183
申请日：2016-12-21
申请人： Hitachi Metals, Ltd.
发明人： Ryan Johnson , Alexei V. Smirnov , Patrick Albright , Cy Jordan , Arun Nagarajan
IPC分类号： G05D7/06 , G01F25/00
CPC分类号： G05D7/0635 , G01F25/0007 , G01F25/0038
摘要： Gas insensitive systems and methods for controlling the mass flow rate of a gas through a primary conduit are disclosed. The method includes producing, in a secondary conduit, an assessment flow that has a changing pressure; calculating a first measure of a flow rate of the assessment flow based upon a rate-of-change of the pressure of the assessment flow; and measuring the assessment flow with a mass flow meter that is affected by the composition of the gas to produce a second measure of the assessment flow. An adjustment signal is generated based upon a difference between the first measure and the second measure, and a gas-corrected flow signal is generated by adjusting a measured-flow signal of a mass flow controller with the adjustment signal. The gas-corrected flow signal is used by the mass flow controller to control a flow rate of the gas through the primary conduit.

4. 发明授权

US09146563B2 Mass flow controller and method for improved performance across fluid types 有权
标题翻译：质量流量控制器和改善流体类型性能的方法
公开(公告)号：US09146563B2
公开(公告)日：2015-09-29
申请号：US13782714
申请日：2013-03-01
申请人： Hitachi Metals, Ltd.
发明人： Alexei V. Smirnov
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , G05D7/0629 , Y10T137/0368 , Y10T137/7759 , Y10T137/776
摘要： A system and method for improving the control of a flow of a variety of fluid types is described. The method includes selecting a process gas type for the process gas that will be controlled and obtaining molecular mass information for the selected processed gas type. General characterization data is obtained that includes, for each of a plurality of flow and pressure value pairs, a corresponding control signal value and operating characterization data is generated by modifying the flow values in the general characterization data according to the equation Fadj=Fcal*(Mcal/Mpr)k, wherein Fadj is an adjusted flow value Fcal is the calibrated flow value, Mpr is the molecular mass for the selected process gas type, and Mcal is a molecular mass for the calibration gas. The operating characterization data is then used to operate a valve of the mass flow controller in open loop control mode.
摘要翻译：描述了用于改善各种流体类型的流动的控制的系统和方法。该方法包括选择待控制的工艺气体的工艺气体类型，并获得所选择的加工气体类型的分子量信息。获得一般表征数据，其包括对于多个流量和压力值对中的每一个，通过根据等式Fadj = Fcal *（...）来修改一般表征数据中的流量值来生成相应的控制信号值和操作表征数据 Mcal / Mpr）k，其中Fadj是调节的流量值，Fcal是校准流量值，Mpr是所选工艺气体类型的分子量，而Mcal是校准气体的分子量。然后，操作特征数据用于在开环控制模式下操作质量流量控制器的阀。

5. 发明申请

US20140260513A1 ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS 有权
标题翻译：工具质量流量控制器诊断系统和方法
公开(公告)号：US20140260513A1
公开(公告)日：2014-09-18
申请号：US14211804
申请日：2014-03-14
申请人： Hitachi Metals, Ltd.
发明人： Alexei V. Smirnov , Arun Nagarajan
IPC分类号： G01F25/00
CPC分类号： G01F25/0007 , G01F1/684 , G01F5/00 , G05D7/0635
摘要： Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnosis of mass flow controllers are disclosed herein. One disclosed method includes providing current to two heating-sensing elements of a mass flow sensor and modifying current through at least one of the heating-sensing elements. Reference data is obtained that characterizes proper operation of the mass flow sensor, and one or more flow sensor signals from the mass flow sensor are analyzed in connection with the reference data to assess whether the mass flow sensor is operating properly.
摘要翻译：本文公开了具有工具诊断功能的质量流量控制器和用于质量流量控制器的工具诊断的方法。一种公开的方法包括向质量流量传感器的两个加热感测元件提供电流并且修改通过至少一个加热感测元件的电流。获得表征质量流量传感器的正确操作的参考数据，并且结合参考数据分析来自质量流量传感器的一个或多个流量传感器信号，以评估质量流量传感器是否正常运行。

6. 发明申请

US20210190575A1 MULTI-GAS MASS FLOW CONTROLLER AND METHOD 有权
公开(公告)号：US20210190575A1
公开(公告)日：2021-06-24
申请号：US16720891
申请日：2019-12-19
申请人： Hitachi Metals, Ltd.
发明人： Alexei V. Smirnov
IPC分类号： G01F25/00 , G05D7/06 , G01F1/86
摘要： Mass flow controllers and methods for controlling mass flow controllers are disclosed. One method includes providing a process gas through a flow sensor of the mass flow controller, obtaining a gas-adjusted sensitivity coefficient for the flow sensor, and obtaining gas-adjusted nonlinearity data for the flow sensor. The method also includes producing gas-adjusted characterization data for the flow sensor using the gas-adjusted sensitivity coefficient and the gas-adjusted nonlinearity data. A flow value from the gas-adjusted characterization data is obtained using a flow sensor signal from the flow sensor, and the flow value is used along with a setpoint signal to control a valve of the mass flow controller.

7. 发明申请

US20210064067A1 PARASITIC FLOW CORRECTION METHOD AND APPARATUS 有权
公开(公告)号：US20210064067A1
公开(公告)日：2021-03-04
申请号：US16550742
申请日：2019-08-26
申请人： Hitachi Metals, Ltd.
发明人： Alexei V. Smirnov
IPC分类号： G05D7/06 , G01F1/696
摘要： Mass flow controllers and methods for correcting flow inconsistencies associated with parasitic flow of a fluid in mass flow controllers are disclosed. A method includes obtaining a pressure measurement signal of the fluid generated by a pressure sensor and receiving a flow sensor signal of the fluid generated by a flow sensor. An estimated parasitic flow signal is generated using the pressure measurement signal, and the flow sensor signal is accelerated to produce an accelerated flow sensor signal with a bandwidth that is comparable to that of the estimated parasitic flow signal. A corrected flow signal is generated using the accelerated flow sensor signal and the estimated parasitic flow signal to control the mass flow controller.

8. 发明授权

US09898013B2 Mass flow controller for improved performance across fluid types 有权
公开(公告)号：US09898013B2
公开(公告)日：2018-02-20
申请号：US14837344
申请日：2015-08-27
申请人： Hitachi Metals, Ltd.
发明人： Alexei V. Smirnov
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , G05D7/0629 , Y10T137/0368 , Y10T137/7759 , Y10T137/776
摘要： Mass flow controllers and methods for improving the control of a flow of a variety of fluid types are described. The method includes selecting a process gas type for the process gas that will be controlled and obtaining molecular mass information for the selected processed gas type. General characterization data is obtained that includes, for each of a plurality of flow and pressure value pairs, a corresponding control signal value and operating characterization data is generated by modifying the flow values in the general characterization data based upon the molecular mass for the selected process gas type. The operating characterization data is then used to operate a valve of the mass flow controller in open loop control mode.

9. 发明授权

US09846073B2 On-tool mass flow controller diagnostic systems and methods 有权
公开(公告)号：US09846073B2
公开(公告)日：2017-12-19
申请号：US15459838
申请日：2017-03-15
申请人： Hitachi Metals, Ltd.
发明人： Alexei V. Smirnov , Arun Nagarajan
IPC分类号： G01F25/00 , G01F1/684 , G05D7/06
CPC分类号： G01F25/0007 , G01F1/68 , G01F1/684 , G01F5/00 , G01F25/0092 , G05D7/0635
摘要： Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnosis of mass flow controllers are disclosed herein. One method includes opening a control valve to a fixed position and closing an upstream valve to produce a flow rate that decreases from a high flow rate, across a range of flow rates, to a low flow rate. A pressure signal is generated that is indicative of a pressure of the fluid within a volume between the upstream valve and a sensor tube, and a flow sensor signal is provided with the mass flow sensor that is indicative of a mass flow rate of the fluid through the main flow path. Ratio curves are produced that relate, across the range of flow rates, a rate of change of the pressure signal to the flow sensor signal and comparing a test ratio curve to a previously generated baseline ratio curve.

10. 发明授权

US11327510B2 Multi-chamber rate-of-change system for gas flow verification 有权
公开(公告)号：US11327510B2
公开(公告)日：2022-05-10
申请号：US16395723
申请日：2019-04-26
申请人： Hitachi Metals, Ltd.
发明人： Alexei V. Smirnov
IPC分类号： G05D7/06 , G01F1/34 , G01F25/10 , G01F25/17 , G01F15/04 , G01F1/684
摘要： A multi-chamber rate-of-change flow meter system and methods for operating the same are disclosed. The multi-chamber rate-of-change flow meter system includes a collection of N chambers, means for drawing a gas into or out of the collection of N chambers, N pressure sensors corresponding one of the N chambers, and means for redistributing the gas among the chambers. A measurement module is coupled to the pressure sensors to obtain a rate of change of pressure in each of the chambers due to the redistribution of the gas and calculate a flow rate of the gas flowing into or out of the collection of N chambers based upon the rate of change of pressure in each of the chambers.

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