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    • 3. 发明授权
    • High sensitivity scanning probe system
    • 高灵敏度扫描探针系统
    • US07230719B2
    • 2007-06-12
    • US10726276
    • 2003-12-02
    • Tuck Wah NgHui Tong ChuaOsami Sasaki
    • Tuck Wah NgHui Tong ChuaOsami Sasaki
    • G01B11/02G01B9/02
    • G01Q20/02
    • The present invention provides a hybrid optical and interferometric atomic force microscope system (40) for monitoring a cantilever probe (46). A light source (42) provides a light beam which is focussed on the back of the cantilever probe (46). The light reflected off the probe is split into two beams of different path lengths and are recombined to form an interference beam (58). This interference beam (58) is passed through a grating (102) having substantially the same period and orientation as the interference beam pattern. The light transmitted through the grating (102) illuminates a photodetector (122) to give a signal according to the intensity of the light falling on the photodetector. The photodetector output signal is sent to a positioning system (126), which in turn gives a signal to the piezoelectric system (54) so that the probe (46) follows the sample (50) surface. This signal is integrated as a function of position across the scanned area to represent a characteristic of the sample surface. An array of light beams, cantilever probes and photodetectors are also provided, and a plurality of characteristics may be obtained by performing a single scan on the sample surface. Actuators are also provided on the grating (102) and mirrors in the interferometer (60, 60a, 60b) to modulate the fringes of the interference beam (58) and cancel out noise in the microscope system (40).
    • 本发明提供一种用于监测悬臂探头(46)的混合光学和干涉原子力显微镜系统(40)。 光源(42)提供聚焦在悬臂探头(46)背面的光束。 从探头反射的光被分成不同路径长度的两个光束,并且被重组以形成干涉光束(58)。 该干涉光束(58)通过具有与干涉光束图案基本相同的周期和取向的光栅(102)。 透过光栅(102)的光照射光电检测器(122),以根据落在光电检测器上的光的强度给出信号。 光电检测器输出信号被发送到定位系统(126),该定位系统又向压电系统(54)提供信号,使得探头(46)跟随样品(50)表面。 该信号作为穿过扫描区域的位置的函数被积分,以表示样品表面的特征。 还提供了一组光束,悬臂探针和光电检测器,并且可以通过在样品表面上执行单次扫描来获得多个特性。 激光器还设置在光栅(102)和干涉仪(60,60a,60b)中的反射镜上,以调制干涉光束(58)的边缘并消除显微镜系统(40)中的噪声。