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1. 发明授权

US10574259B2 Continuous-time sensing apparatus 有权
公开(公告)号：US10574259B2
公开(公告)日：2020-02-25
申请号：US15723814
申请日：2017-10-03
申请人： InvenSense, Inc.
发明人： Du Chen , Vadim Tsinker , Stanley Bo-Ting Wang
IPC分类号： H03M5/02 , H03K17/96 , G06F3/044 , H03M11/10 , H03M11/02
摘要： A system includes a sensor device, a circuit driving he sensor device at a drive frequency, a receiver, and a low pass filter. The sensor device is configured to change its electrical characteristics in response to external stimuli. The sensor device generates a modulated signal proportional to the external stimuli. The receiver is configured to receive the modulated signal and further configured to demodulate the modulated signal to generate a demodulated signal. The demodulation signal has a guard band. The receiver consumes power responsive to receiving the modulated signal. The low pass filter is configured to receive the demodulated signal and further configured to generate a sensor output.

2. 发明授权

US11548780B2 Systems and methods for operating a MEMS device based on sensed temperature gradients 有权
公开(公告)号：US11548780B2
公开(公告)日：2023-01-10
申请号：US17516245
申请日：2021-11-01
申请人： INVENSENSE, INC.
发明人： David deKoninck , Varun Subramaniam Kumar , Matthew Julian Thompson , Vadim Tsinker , Logeeswaran Veerayah Jayaraman , Sarah Nitzan , Houri Johari-Galle , Jongwoo Shin , Le Jin
IPC分类号： G01L19/04 , G01K1/20 , B81B7/00 , G01L9/00
摘要： An exemplary microelectromechanical device includes a MEMS layer, portions of which respond to an external force in order to measure the external force. A substrate layer is located below the MEMS layer and an anchor couples the substrate layer and MEMS layer to each other. A plurality of temperature sensors are located within the substrate layer to identify a temperature gradient being experienced by the MEMS device. Compensation is performed or operations of the MEMS device are modified based on temperature gradient.

3. 发明授权

US11186479B2 Systems and methods for operating a MEMS device based on sensed temperature gradients 有权
公开(公告)号：US11186479B2
公开(公告)日：2021-11-30
申请号：US16547257
申请日：2019-08-21
申请人： INVENSENSE, INC.
发明人： David deKoninck , Varun Subramaniam Kumar , Matthew Julian Thompson , Vadim Tsinker , Logeeswaran Veerayah Jayaraman , Sarah Nitzan , Houri Johari-Galle , Jongwoo Shin , Le Jin
IPC分类号： G01L19/04 , G01K1/20 , B81B7/00 , G01L9/00
摘要： An exemplary microelectromechanical device includes a MEMS layer, portions of which respond to an external force in order to measure the external force. A substrate layer is located below the MEMS layer and an anchor couples the substrate layer and MEMS layer to each other. A plurality of temperature sensors are located within the substrate layer to identify a temperature gradient being experienced by the MEMS device. Compensation is performed or operations of the MEMS device are modified based on temperature gradient.

4. 发明申请

US20200300887A1 MEASURING A NOISE LEVEL OF AN ACCELEROMETER 审中-公开
公开(公告)号：US20200300887A1
公开(公告)日：2020-09-24
申请号：US16824161
申请日：2020-03-19
申请人： INVENSENSE, INC.
发明人： Sriraman Dakshinamurthy , Matthew Julian Thompson , Vadim Tsinker
IPC分类号： G01P21/00 , G01P15/08 , G01P15/125
摘要： A method of measuring noise of an accelerometer can comprise exposing the accelerometer comprising a micro-electro-mechanical system (MEMS) component coupled to an application specific integrated circuit component (ASIC), to an external environmental input, with the MEMS component being configured to provide a first output to the ASIC based on the external environmental input. The method can further comprise estimating a first noise generated by operation of the MEMS component, and replacing the first output provided to the ASIC from the MEMS component, with a second output generated by a MEMS emulator component, with the second output comprising the first noise. Further, the method can include generating an output of the accelerometer based on the second output processed by the ASIC.

5. 发明授权

US08884711B2 MEMS device oscillator loop with amplitude control 有权
标题翻译：具有幅度控制的MEMS器件振荡器回路
公开(公告)号：US08884711B2
公开(公告)日：2014-11-11
申请号：US13625690
申请日：2012-09-24
申请人： InvenSense, Inc.
发明人： Vadim Tsinker
IPC分类号： H03B5/04 , H03B5/30 , H03L1/00
CPC分类号： H03B5/30 , H03B5/04 , H03B2202/042 , H03L1/00
摘要： A MEMS device and method for amplitude regulation of a MEMS device are disclosed. In a first aspect, the MEMS device comprises a MEMS resonator, a limiter coupled to the MEMS resonator, and a regulator coupled to the limiter. The MEMS device includes an amplitude control circuit coupled to the MEMS resonator. The amplitude control circuit controls a supply of the limiter via the regulator to regulate oscillation loop amplitude of the MEMS device. In a second aspect, the method includes coupling a regulator to the limiter, coupling an amplitude control circuit to the MEMS resonator, and controlling a supply of the limiter via the regulator to regulate oscillation loop amplitude of the MEMS device.
摘要翻译：公开了一种用于MEMS器件的幅度调节的MEMS器件和方法。在第一方面，MEMS器件包括MEMS谐振器，耦合到MEMS谐振器的限幅器和耦合到限幅器的调节器。 MEMS器件包括耦合到MEMS谐振器的幅度控制电路。幅度控制电路通过调节器控制限幅器的供应，以调节MEMS装置的振荡环路振幅。在第二方面，该方法包括将调节器耦合到限幅器，将振幅控制电路耦合到MEMS谐振器，以及通过调节器控制限幅器的供应以调节MEMS装置的振荡环路振幅。

6. 发明授权

US11174153B2 Package level thermal gradient sensing 有权
公开(公告)号：US11174153B2
公开(公告)日：2021-11-16
申请号：US16547275
申请日：2019-08-21
申请人： INVENSENSE, INC.
发明人： Ilya Gurin , Matthew Julian Thompson , Vadim Tsinker
IPC分类号： B81B7/00
摘要： A microelectromechanical (MEMS) device may be coupled to a dielectric material at an upper planar surface or lower planar surface of the MEMS device. One or more temperature sensors may be attached to the dielectric material layer. Signals from the one or more temperature sensors may be used to determine a thermal gradient along on axis that is normal to the upper planar surface and the lower planar surface. The thermal gradient may be used to compensate for values measured by the MEMS device.

7. 发明申请

US20200264210A1 HIGH PERFORMANCE ACCELEROMETER 审中-公开
公开(公告)号：US20200264210A1
公开(公告)日：2020-08-20
申请号：US16794952
申请日：2020-02-19
申请人： INVENSENSE, INC.
发明人： Sriraman Dakshinamurthy , Vadim Tsinker , Matthew Julian Thompson
IPC分类号： G01P15/13 , G01P15/08
摘要： A MEMS accelerometer includes a suspended spring-mass system that has a frequency response to accelerations experienced over a range of frequencies. The components of the suspended spring-mass system such as the proof masses respond to acceleration in a substantially uniform manner at frequencies that fall within a designed bandwidth for the MEMS accelerometer. Digital compensation circuitry compensates for motion of the proof masses outside of the designed bandwidth, such that the functional bandwidth of the MEMS accelerometer is significantly greater than the designed bandwidth.

8. 发明授权

US11073531B2 Vertical thermal gradient compensation in a z-axis MEMS accelerometer 有权
公开(公告)号：US11073531B2
公开(公告)日：2021-07-27
申请号：US16547268
申请日：2019-08-21
申请人： INVENSENSE, INC.
发明人： David deKoninck , Varun Subramaniam Kumar , Matthew Julian Thompson , Vadim Tsinker , Logeeswaran Veerayah Jayaraman , Sarah Nitzan , Houri Johari-Galle , Jongwoo Shin , Le Jin
IPC分类号： G01P1/00 , G01P15/125
摘要： A microelectromechanical (MEMS) accelerometer has a proof mass and a fixed electrode. The fixed electrode is located relative to the proof mass such that a capacitance formed by the fixed electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The MEMS accelerometer is exposed to heat sources that produce a z-axis thermal gradient in MEMS accelerometer and an in-plane thermal gradient in the X-Y plane of the MEMS accelerometer. The z-axis thermal gradient is sensed with a plurality of thermistors located relative to anchoring regions of a CMOS layer of the MEMS accelerometer. The configuration of the thermistors within the CMOS layer measures the z-axis thermal gradient while rejecting other lateral thermal gradients. Compensation is performed at the accelerometer based on the z-axis thermal gradient.

9. 发明申请

US20210055321A1 VERTICAL THERMAL GRADIENT COMPENSATION IN A Z-AXIS MEMS ACCELEROMETER 有权
公开(公告)号：US20210055321A1
公开(公告)日：2021-02-25
申请号：US16547268
申请日：2019-08-21
申请人： INVENSENSE, INC.
发明人： David deKoninck , Varun Subramaniam Kumar , Matthew Julian Thompson , Vadim Tsinker , Logeeswaran Veerayah Jayaraman , Sarah Nitzan , Houri Johari-Galle , Jongwoo Shin , Le Jin
IPC分类号： G01P1/00 , G01P15/125
摘要： A microelectromechanical (MEMS) accelerometer has a proof mass and a fixed electrode. The fixed electrode is located relative to the proof mass such that a capacitance formed by the fixed electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The MEMS accelerometer is exposed to heat sources that produce a z-axis thermal gradient in MEMS accelerometer and an in-plane thermal gradient in the X-Y plane of the MEMS accelerometer. The z-axis thermal gradient is sensed with a plurality of thermistors located relative to anchoring regions of a CMOS layer of the MEMS accelerometer. The configuration of the thermistors within the CMOS layer measures the z-axis thermal gradient while rejecting other lateral thermal gradients. Compensation is performed at the accelerometer based on the z-axis thermal gradient.

10. 发明申请

US20190190535A1 SENSING AN EXTERNAL STIMULUS USING A GROUP OF CONTINUOUS-TIME NYQUIST RATE ANALOG-TO-DIGITAL CONVERTERS IN A ROUND-ROBIN MANNER 审中-公开
公开(公告)号：US20190190535A1
公开(公告)日：2019-06-20
申请号：US16219812
申请日：2018-12-13
申请人： INVENSENSE, INC.
发明人： Vadim Tsinker
IPC分类号： H03M3/00 , H03M1/12 , H03M1/34 , H03M1/50
CPC分类号： H03M3/496 , H03M1/124 , H03M1/34 , H03M1/50 , H03M2201/2344
摘要： Facilitating a reduction in sensor system latency, circuit size, and current draw utilizing a group of continuous-time Nyquist rate analog-to-digital converters (ADCs) in a round-robin manner is presented herein. A sensor system can comprise a group of sensors that generate respective sensor output signals based on an external excitation of the sensor system; a multiplexer that facilitates a selection, based on a sensor selection input, of a sensor output signal of the respective sensor output signals corresponding to a sensor of the group of sensors; a sense amplifier comprising a charge or voltage sensing circuit that converts the sensor output signal to an analog output signal; and a continuous-time Nyquist rate analog-to-digital converter of the group of continuous-time Nyquist rate ADCs that converts the analog output signal to a digital output signal representing at least a portion of the external excitation of the sensor system.

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