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    • 1. 发明申请
    • MODELING RANDOM DOPANT FLUCTUATIONS IN SEMICONDUCTOR DEVICES
    • 建立半导体器件中的随机多普勒波动
    • US20150186575A1
    • 2015-07-02
    • US14146114
    • 2014-01-02
    • International Business Machines Corporation
    • Samarth AgarwalAbhisek DixitJeffrey B. Johnson
    • G06F17/50G06F17/18
    • G06F17/5018
    • In one embodiment, the invention comprises: defining a first volume in a layer of a semiconductor device; calculating a probability of finding at least one dopant atom in the first volume, based on a dopant distribution of the layer; in the case that the calculated probability is equal to or greater than a pre-determined threshold, defining at least one additional volume in the layer substantially equal to the first volume; and in the case that the calculated probability is less than the pre-determined threshold: aggregating the first volume with a second volume adjacent the first volume, the second volume being substantially equal to the first volume; and recalculating a probability of finding at least one dopant atom in the aggregated first and second volumes, based on the dopant distribution of the layer.
    • 在一个实施例中,本发明包括:在半导体器件的层中限定第一体积; 基于所述层的掺杂剂分布计算在所述第一体积中发现至少一种掺杂剂原子的概率; 在所计算的概率等于或大于预定阈值的情况下,在所述层中限定基本上等于所述第一体积的至少一个附加体积; 并且在所计算的概率小于所述预定阈值的情况下:将所述第一体积与邻近所述第一体积的第二体积聚集,所述第二体积基本上等于所述第一体积; 以及基于所述层的掺杂剂分布重新计算在聚集的第一和第二体积中发现至少一个掺杂剂原子的概率。