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    • 5. 发明授权
    • Offset correction techniques for positioning substrates within a processing chamber
    • 用于将衬底定位在处理室内的偏移校正技术
    • US08135485B2
    • 2012-03-13
    • US12237155
    • 2008-09-24
    • Jack ChenAndrew D. Bailey, IIIBen MooringStephen J Cain
    • Jack ChenAndrew D. Bailey, IIIBen MooringStephen J Cain
    • H01L21/00G06F19/00G05B19/418G05B15/00B44C1/22G06K9/00
    • H01L21/681H01L21/68
    • A method for aligning a substrate to a process center of a support mechanism is provided. The method includes determining substrate thickness after substrate processing at a plurality of orientations and at a plurality of radial distances from a geometric center of the substrate. The method also includes deriving a set of process rate values from substrate thickness and process duration. The method further includes creating for a process rate an off-centered plot, which represents a substantially concentric circle whose points are a circumference of the off-centered plot having substantially the first process rate. The method yet also includes applying a curve-fitting equation to the off-centered plot to determine a set of parameters. The method yet further includes teaching a set of robot arms the set of parameters, thereby enabling the set of robot arms to align another substrate that is supported by the support mechanism with the process center.
    • 提供了一种将基板对准支撑机构的处理中心的方法。 该方法包括在基板处理之后确定基板厚度,该基板在多个取向并且距离基板的几何中心的多个径向距离处。 该方法还包括从衬底厚度和工艺持续时间导出一组工艺速率值。 该方法还包括为处理速率创建偏心图,其表示基本上同心的圆,其点是具有基本上第一处理速率的偏心图的圆周。 该方法还包括将曲线拟合方程应用于偏心图以确定一组参数。 该方法还包括向一组机器人手臂提供一组参数,从而使得该组机器人臂将由支撑机构支撑的另一个基板与处理中心对准。
    • 8. 发明申请
    • Wafer level led package structure for increasing light-emitting efficiency and method for making the same
    • 用于提高发光效率的晶片级LED封装结构和制造它的方法
    • US20100127292A1
    • 2010-05-27
    • US12461742
    • 2009-08-24
    • Bily WangSung-Yi HsiaoJack Chen
    • Bily WangSung-Yi HsiaoJack Chen
    • H01L33/00H01L21/30
    • H01L33/38H01L33/508H01L33/62H01L2224/48091H01L2924/00014
    • A wafer level LED package structure for increasing light-emitting efficiency includes: a light-emitting unit, an insulating unit, two first conductive units and two second conductive units. The light-emitting unit has a light-emitting body, a positive conductive layer, a negative conductive layer, and a reflecting insulating layer formed between the positive conductive layer and the negative conductive layer. The light-emitting body has a bottom material layer and a top material layer. The insulating unit is formed around an outer area of a top surface of the bottom material layer and formed on a top surface of the reflecting insulating layer. One first conductive unit is formed on one part of the positive conductive layer and the insulating unit, and another first conductive unit is formed on one part of the negative conductive layer and the insulating unit. The two second conductive units are respectively formed on the two first conductive units.
    • 用于提高发光效率的晶片级LED封装结构包括:发光单元,绝缘单元,两个第一导电单元和两个第二导电单元。 发光单元具有形成在正导电层和负导电层之间的发光体,正导电层,负导电层和反射绝缘层。 发光体具有底部材料层和顶部材料层。 绝缘单元形成在底部材料层的顶表面的外部区域周围,并形成在反射绝缘层的顶表面上。 一个第一导电单元形成在正导电层和绝缘单元的一部分上,另一个第一导电单元形成在负导电层和绝缘单元的一部分上。 两个第二导电单元分别形成在两个第一导电单元上。
    • 10. 发明申请
    • Sealed pump
    • 密封泵
    • US20090104058A1
    • 2009-04-23
    • US11975180
    • 2007-10-18
    • Jack Chen
    • Jack Chen
    • F04B17/03
    • F04D3/00F04D13/064
    • A liquid pump has an annular stator having wire windings that extend around a generally tubular central opening. An inner housing made of a non-ferrous material has an inner opening, an input end, and an output end such that liquid can enter the input end, pass through the inner opening and exit through the output end. A portion of the housing extends through the central opening of the stator and a brushless rotor mounted on a shaft is positioned entirely within the housing to thereby seal the shaft from leakage. A drive attached to the shaft urges the liquid from the input end of the housing to the output.
    • 液体泵具有环形定子,其具有围绕大体上管状的中心开口延伸的线绕组。 由有色金属材料制成的内壳体具有内部开口,输入端和输出端,使得液体可以进入输入端,穿过内部开口并通过输出端排出。 壳体的一部分延伸穿过定子的中心开口,并且安装在轴上的无刷转子完全位于壳体内,从而密封轴免于泄漏。 连接到轴的驱动器将液体从壳体的输入端推到输出端。