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    • 1. 发明授权
    • Apparatus and method for evaluating layers in a multi-layer structure
    • 用于评估多层结构中的层的装置和方法
    • US08903680B2
    • 2014-12-02
    • US12965356
    • 2010-12-10
    • John R. LinnJeffrey G. Thompson
    • John R. LinnJeffrey G. Thompson
    • G01B7/02G01B7/14G01N27/90G01N29/265G01B7/06
    • G01B7/14G01B7/06G01B7/105G01B7/107G01N27/902G01N29/265
    • An apparatus for evaluating layers, including interlayer gaps, in a multi-layer structure; the multi-layer structure presenting a plurality of edges generally aligned athwart an axis; the apparatus includes: (a) a sensing unit configured for sensing at least one parameter; (b) a positioning unit coupled with the sensing unit; the positioning unit being configured to effect moving the sensing unit generally along the axis; and (c) a control unit coupled with at least one of the positioning unit and the sensing unit. The control unit provides an electrical signal to the sensing unit. The control unit monitors changes in the at least one parameter as the sensing unit moves past the plurality of edges. The control unit employs the changes in the at least one parameter to effect the evaluating.
    • 一种用于评估多层结构中的层,包括层间间隙的装置; 所述多层结构呈现出大致对准的多个边缘; 所述装置包括:(a)感测单元,被配置为感测至少一个参数; (b)与感测单元耦合的定位单元; 所述定位单元被配置为实现大致沿所述轴线移动所述感测单元; 和(c)与所述定位单元和所述感测单元中的至少一个耦合的控制单元。 控制单元向感测单元提供电信号。 当感测单元移动经过多个边缘时,控制单元监视至少一个参数的变化。 控制单元采用至少一个参数的变化来进行评估。
    • 2. 发明申请
    • APPARATUS AND METHOD FOR EVALUATING LAYERS IN A MULTI-LAYER STRUCTURE
    • 用于评估多层结构层的装置和方法
    • US20120150466A1
    • 2012-06-14
    • US12965356
    • 2010-12-10
    • John R. LinnJeffrey G. Thompson
    • John R. LinnJeffrey G. Thompson
    • G06F19/00G01B7/06G06F15/00G01R27/00
    • G01B7/14G01B7/06G01B7/105G01B7/107G01N27/902G01N29/265
    • An apparatus for evaluating layers, including interlayer gaps, in a multi-layer structure; the multi-layer structure presenting a plurality of edges generally aligned athwart an axis; the apparatus includes: (a) a sensing unit configured for sensing at least one parameter; (b) a positioning unit coupled with the sensing unit; the positioning unit being configured to effect moving the sensing unit generally along the axis; and (c) a control unit coupled with at least one of the positioning unit and the sensing unit. The control unit provides an electrical signal to the sensing unit. The control unit monitors changes in the at least one parameter as the sensing unit moves past the plurality of edges. The control unit employs the changes in the at least one parameter to effect the evaluating.
    • 一种用于评估多层结构中的层,包括层间间隙的装置; 所述多层结构呈现出大致对准的多个边缘; 所述装置包括:(a)感测单元,被配置为感测至少一个参数; (b)与感测单元耦合的定位单元; 所述定位单元被配置为实现大致沿所述轴线移动所述感测单元; 和(c)与所述定位单元和所述感测单元中的至少一个耦合的控制单元。 控制单元向感测单元提供电信号。 当感测单元移动经过多个边缘时,控制单元监视至少一个参数的变化。 控制单元采用至少一个参数的变化来进行评估。