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1. 发明授权

US07863698B2 Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices 有权
标题翻译：用于垂直集成微加工设备的性能提升双面MEMS锚定设计
公开(公告)号：US07863698B2
公开(公告)日：2011-01-04
申请号：US12418554
申请日：2009-04-03
申请人： Joseph Seeger , Goksen G. Yaralioglu , Bruno Borovic , Alexander Castro
发明人： Joseph Seeger , Goksen G. Yaralioglu , Bruno Borovic , Alexander Castro
IPC分类号： H01L29/84
CPC分类号： B81C1/00039 , B81B2203/0307
摘要： An anchoring assembly for anchoring MEMS device is disclosed. The anchoring assembly comprises: a top substrate; a bottom substrate substantially parallel to the top substrate; and a first portion of the anchor between the top substrate and the bottom substrate. The first portion of the anchor is rigidly connected to the top substrate; and the first portion of the anchor is rigidly connected to the bottom substrate. A second portion of the anchor is between the top substrate and the bottom substrate. The second portion of the anchor is rigidly connected to the top substrate; the second portion of the anchor being an anchoring point for the MEMS device. A substantially flexible mechanical element coupling the first portion of the anchor and the second portion of the anchor; the flexible element providing the electrical connection between the first portion of the anchor and the second portion of the anchor.
摘要翻译：公开了一种用于锚定MEMS装置的锚固组件。锚固组件包括：顶部基底; 基本上平行于顶部衬底的底部衬底; 以及锚固件在顶部基底和底部基底之间的第一部分。锚的第一部分刚性地连接到顶部基底; 并且锚的第一部分刚性地连接到底部基底。锚的第二部分在顶部基底和底部基底之间。锚的第二部分刚性地连接到顶部基底; 锚的第二部分是用于MEMS装置的锚定点。将锚固件的第一部分和锚固件的第二部分联接的基本上柔性的机械元件; 所述柔性元件提供所述锚固件的第一部分和所述锚固件的第二部分之间的电连接。

2. 发明授权

US08534127B2 Extension-mode angular velocity sensor 有权
公开(公告)号：US08534127B2
公开(公告)日：2013-09-17
申请号：US12558398
申请日：2009-09-11
申请人： Joseph Seeger , Bruno Borovic
发明人： Joseph Seeger , Bruno Borovic
IPC分类号： G01C19/00
CPC分类号： G01C19/5712 , G01C19/56 , G01C19/5719 , G01C19/574
摘要： An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

3. 发明授权

US08347717B2 Extension-mode angular velocity sensor 有权
公开(公告)号：US08347717B2
公开(公告)日：2013-01-08
申请号：US13564615
申请日：2012-08-01
申请人： Joseph Seeger , Bruno Borovic
发明人： Joseph Seeger , Bruno Borovic
IPC分类号： G01C19/00
CPC分类号： G01C19/5712 , G01C19/56 , G01C19/5719 , G01C19/574
摘要： An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

4. 发明授权

US08141424B2 Low inertia frame for detecting coriolis acceleration 有权
标题翻译：用于检测科里奥利加速度的低惯性框架
公开(公告)号：US08141424B2
公开(公告)日：2012-03-27
申请号：US12210045
申请日：2008-09-12
申请人： Joseph Seeger , Bruno Borovic
发明人： Joseph Seeger , Bruno Borovic
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： A sensing frame that moves in response to torque generated by the Coriolis acceleration on a drive subsystem is disclosed. The sensing frame include a first rail. The first rail is constrained to move along the first axis parallel to the first rail. The frame includes a second rail substantially parallel to said first rail. The second rail is constrained to move along the first axis. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. A first guiding arm is flexibly coupled to the first rail and flexibly coupled to the second rail and a second guiding arm is flexibly coupled to the first rail and flexibly coupled to the second rail. The first guiding arm is flexibly suspended to the base at a first anchoring point for allowing rotation of the first guiding arm around the second axis that is perpendicular to the first axis and normal to the plane, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm around the third axis parallel to the second axis. The sensing frame includes a plurality of coupling flexures connecting said sensing frame to the drive subsystem and a transducer for sensing motion of the first and second rails responsive to said angular velocity.
摘要翻译：公开了响应由驱动子系统上的科里奥利加速度产生的扭矩移动的感测框架。感测框架包括第一轨道。第一轨道被限制为沿着平行于第一轨道的第一轴线移动。框架包括基本上平行于所述第一轨道的第二轨道。第二个轨道被限制为沿着第一个轴线移动。框架包括底座和至少两个引导臂，用于确保第一轨道和第二轨道沿着第一轴线以相位方式移动。第一引导臂柔性地联接到第一轨道并且柔性地联接到第二轨道，并且第二引导臂被柔性地联接到第一轨道并且柔性地联接到第二轨道。第一引导臂在第一锚固点处被柔性地悬挂到基部，以允许第一引导臂围绕垂直于第一轴线并垂直于平面的第二轴线旋转，并且第二引导臂悬挂到基座在第二锚固点处允许第二引导臂围绕平行于第二轴线的第三轴线旋转。感测框架包括将所述感测框架连接到驱动子系统的多个联接弯曲件，以及响应于所述角速度感测第一和第二轨道的运动的换能器。

5. 发明授权

US08539835B2 Low inertia frame for detecting coriolis acceleration 有权
标题翻译：用于检测科里奥利加速度的低惯性框架
公开(公告)号：US08539835B2
公开(公告)日：2013-09-24
申请号：US13427784
申请日：2012-03-22
申请人： Joseph Seeger , Bruno Borovic
发明人： Joseph Seeger , Bruno Borovic
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： A sensing frame is disclosed. The sensing frame includes a first rail and a second rail. The first and second rails are constrained to move along a first axis parallel to the first and second rails. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. First and second guiding arms are flexibly coupled to the first rail and second rail. The first guiding arm is flexibly suspended to the base at first anchoring points for allowing rotation of the first guiding arm, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm. The sensing frame includes a plurality of coupling flexures and a transducer for sensing motion of the first and second rails.
摘要翻译：公开了一种感测框架。感测框架包括第一轨道和第二轨道。第一轨道和第二轨道被限制为沿着平行于第一轨道和第二轨道的第一轴线移动。框架包括底座和至少两个引导臂，用于确保第一轨道和第二轨道沿着第一轴线以相位方式移动。第一和第二引导臂柔性地联接到第一轨道和第二轨道。第一引导臂在第一锚固点处被柔性地悬挂到基部，以允许第一引导臂的旋转，并且第二引导臂在允许第二引导臂旋转的第二锚定点处悬挂到基部。感测框架包括多个耦合弯曲部和用于感测第一和第二导轨的运动的换能器。

6. 发明申请

US20100064805A1 LOW INERTIA FRAME FOR DETECTING CORIOLIS ACCELERATION 有权
标题翻译：用于检测矫正加速度的低惯性框架
公开(公告)号：US20100064805A1
公开(公告)日：2010-03-18
申请号：US12210045
申请日：2008-09-12
申请人： Joseph Seeger , Bruno Borovic
发明人： Joseph Seeger , Bruno Borovic
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： A sensing frame that moves in response to torque generated by the Coriolis acceleration on a drive subsystem is disclosed. The sensing frame include a first rail. The first rail is constrained to move along the first axis parallel to the first rail. The frame includes a second rail substantially parallel to said first rail. The second rail is constrained to move along the first axis. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. A first guiding arm is flexibly coupled to the first rail and flexibly coupled to the second rail and a second guiding arm is flexibly coupled to the first rail and flexibly coupled to the second rail. The first guiding arm is flexibly suspended to the base at a first anchoring point for allowing rotation of the first guiding arm around the second axis that is perpendicular to the first axis and normal to the plane, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm around the third axis parallel to the second axis. The sensing frame includes a plurality of coupling flexures connecting said sensing frame to the drive subsystem and a transducer for sensing motion of the first and second rails responsive to said angular velocity.
摘要翻译：公开了响应由驱动子系统上的科里奥利加速度产生的扭矩移动的感测框架。感测框架包括第一轨道。第一轨道被限制为沿着平行于第一轨道的第一轴线移动。框架包括基本上平行于所述第一轨道的第二轨道。第二个轨道被限制为沿着第一个轴线移动。框架包括底座和至少两个引导臂，用于确保第一轨道和第二轨道沿着第一轴线以相位方式移动。第一引导臂柔性地联接到第一轨道并且柔性地联接到第二轨道，并且第二引导臂被柔性地联接到第一轨道并且柔性地联接到第二轨道。第一引导臂在第一锚固点处被柔性地悬挂到基部，以允许第一引导臂围绕垂直于第一轴线并垂直于平面的第二轴线旋转，并且第二引导臂悬挂到基座在第二锚固点处允许第二引导臂围绕平行于第二轴线的第三轴线旋转。感测框架包括将所述感测框架连接到驱动子系统的多个联接弯曲件，以及响应于所述角速度感测第一和第二轨道的运动的换能器。

7. 发明申请

US20070267939A1 Systems and methods for improved control of micro-electrical-mechanical system (MEMS) electrostatic actuator 失效
标题翻译：用于改进微机电系统（MEMS）静电致动器的控制的系统和方法
公开(公告)号：US20070267939A1
公开(公告)日：2007-11-22
申请号：US11436411
申请日：2006-05-18
申请人： Bruno Borovic , Frank L. Lewis , Ai Qun Liu , Dan O. Popa
发明人： Bruno Borovic , Frank L. Lewis , Ai Qun Liu , Dan O. Popa
IPC分类号： H02N1/00
CPC分类号： H02N1/008 , H02K2201/18
摘要： Methods and apparatuses for sensing and adjusting lateral motion in a comb drive actuated MEMS device are provided. If lateral motion is sensed by a lateral motion sensor coupled to the comb drive actuated MEMS device, and the lateral motion is greater than a reference value, a feedback controller adjusts the lateral motion by providing a drive signal to a comb drive electrode of a comb drive actuator.
摘要翻译：提供了用于感测和调节梳状驱动MEMS装置中的横向运动的方法和装置。如果通过耦合到梳状驱动的MEMS装置的横向运动传感器感测到侧向运动，并且横向运动大于参考值，则反馈控制器通过向梳子的梳状驱动电极提供驱动信号来调节横向运动驱动执行器。

8. 发明授权

US07677099B2 Integrated microelectromechanical systems (MEMS) vibrating mass Z-axis rate sensor 有权
标题翻译：集成微机电系统（MEMS）振动质量Z轴速率传感器
公开(公告)号：US07677099B2
公开(公告)日：2010-03-16
申请号：US11935357
申请日：2007-11-05
申请人： Steven Nasiri , Joe Seeger , Bruno Borovic
发明人： Steven Nasiri , Joe Seeger , Bruno Borovic
IPC分类号： G01P9/04 , G01C19/00
CPC分类号： G01C19/5719
摘要： A sensor that measures angular velocity about an axis that is normal to a sensing plane of the sensor. The sensor comprises a sensing subassembly that includes a planar frame parallel to the sensing plane, a first proof mass disposed in the sensing plane, a second proof mass disposed in the sensing plane laterally to the first proof mass, and a linkage within the frame and connected to the frame. The linkage is connected to the first proof mass and to the second proof mass. The sensor further includes actuator for driving the first proof mass and the second proof mass into oscillation along a drive axis in the sensing plane. The sensor further includes a first transducer to sense motion of the frame in response to a Coriolis force acting on the oscillating first proof mass and the oscillating second proof mass.
摘要翻译：测量与传感器感应平面垂直的轴的角速度的传感器。传感器包括感测子组件，其包括平行于感测平面的平面框架，设置在感测平面中的第一检测质量块，设置在感测平面中的第二检测质量体横向于第一检测质量块，以及框架内的连杆连接到框架。连杆连接到第一个检验质量块和第二个检测质量块。该传感器还包括用于驱动第一检测质量块和第二检测质量块沿传感平面中驱动轴的振荡的致动器。传感器还包括响应于作用在振荡的第一检测质量块和振荡的第二检测质量块上的科里奥利力来感测框架运动的第一换能器。

9. 发明授权

US07548011B2 Systems and methods for improved control of micro-electrical-mechanical system (MEMS) electrostatic actuator 失效
标题翻译：用于改进微机电系统（MEMS）静电致动器的控制的系统和方法
公开(公告)号：US07548011B2
公开(公告)日：2009-06-16
申请号：US11436411
申请日：2006-05-18
申请人： Bruno Borovic , Frank L. Lewis , Ai Qun Liu , Dan O. Popa
发明人： Bruno Borovic , Frank L. Lewis , Ai Qun Liu , Dan O. Popa
IPC分类号： H02N1/00
CPC分类号： H02N1/008 , H02K2201/18
摘要： Methods and apparatuses for sensing and adjusting lateral motion in a comb drive actuated MEMS device are provided. If lateral motion is sensed by a lateral motion sensor coupled to the comb drive actuated MEMS device, and the lateral motion is greater than a reference value, a feedback controller adjusts the lateral motion by providing a drive signal to a comb drive electrode of a comb drive actuator.
摘要翻译：提供了用于感测和调节梳状驱动MEMS装置中的横向运动的方法和装置。如果通过耦合到梳状驱动的MEMS装置的横向运动传感器感测到侧向运动，并且横向运动大于参考值，则反馈控制器通过向梳子的梳状驱动电极提供驱动信号来调节横向运动驱动执行器。

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