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    • 2. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20170077220A1
    • 2017-03-16
    • US15062207
    • 2016-03-07
    • KABUSHIKI KAISHA TOSHIBA
    • Ryoichi OHARATakao NODAYoichi HORI
    • H01L29/06H01L29/872H01L29/78H01L29/16
    • H01L29/0634H01L29/0615H01L29/0692H01L29/1608H01L29/32H01L29/7811H01L29/872
    • A semiconductor device includes a SiC layer that has a first surface and a second surface, a first electrode in contact with the first surface, a first SiC region of a first conductivity type in the SiC layer, a second SiC region of a second conductivity type in the SiC layer and surrounding a portion of the first SiC region, a third SiC region of the second conductivity type in the SiC layer and surrounding the second SiC region, the third SiC region having an impurity concentration of the second conductivity type lower than that of the second SiC region, and a fourth SiC region of the second conductivity type in the SiC layer between the second SiC region and the third Sic region, the fourth SiC region having an impurity concentration of the second conductivity type higher than that of the second SiC region.
    • 半导体器件包括具有第一表面和第二表面的SiC层,与第一表面接触的第一电极,SiC层中的第一导电类型的第一SiC区域,第二导电类型的第二SiC区域 在SiC层中并且包围第一SiC区域的一部分,SiC层中的第二导电类型的第三SiC区域并且围绕第二SiC区域,具有低于第二导电类型的第二导电类型的第三导电类型的第三SiC区域 以及在第二SiC区域和第三Sic区域之间的SiC层中的第二导电类型的第四SiC区域,具有比第二SiC区域的第二导电类型的第二导电类型的杂质浓度高的第四SiC区域 SiC区域。